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Array micro-joist unit deflection angle measuring systems

A measurement system and micro-beam technology, which is applied in the direction of measurement devices, optical components, optics, etc., can solve the problems of bulky and inability to measure the deflection angle of array-type micro-beams, and achieve the effect of improving detection sensitivity

Inactive Publication Date: 2008-09-10
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0002] By measuring the deflection angle of the plane or the microbeam, it is possible to monitor the motion posture of the moving object, analyze the force on the microbeam, detect the temperature change of the environment, monitor the interaction between the biological probe molecule and the molecule, and realize infrared radiation imaging. The collimated light tube angle measuring device can only measure the deflection angle of a single plane, but it is bulky and cannot realize the deflection angle measurement of different microfacets in the array microbeam area

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Embodiment Construction

[0014] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0015] Such as figure 1 As shown, the device of the embodiment of the present invention consists of an illumination source 1, a condenser lens 2, a filter pinhole 3, a collimation system 4, a polarizer 5, a polarizing beam splitter 6, a 1 / 4 wave plate 7, a Fourier transform system 8, and a filter knife edge 9. A Fourier inverse transform system 10, a CCD camera 11, and an array microbeam 12 are composed.

[0016] The monochromatic light source in the range of 400nm-600nm is used as the lighting source 1, and the lighting source commonly used in engineering technologies such as lasers and light-emitting diodes can be selected. The light emitted by the lighting source 1 is combined by the condenser lens 2 and the filter pinhole 3 to form a lens-needle The hole space filter forms a point light source, and this point light source passes through ...

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Abstract

The invention provides an array micro-beam unit deflection angle measurement system, comprising an illumination light source, a condenser, a filter needle hole, a collimating system, a polarizer, a polarizing beam splitter, a one quarter wave plate, a fourier conversion system, a filter edge, a fourier reverse conversion system and a CCD camera; the light emitted by the illumination light source passes through the beam filter which consists of the condenser and the filter needle hole, is converted into parallel light by the collimating system, and is converted into a linearly polarized light beam by the polarizer; the linearly polarized light beam illuminates the array micro-beam by the reflection of the polarizing beam splitter and reaches the polarizing beam splitter again after being reflected by the array micro-beam; the linearly polarizing light beam passes through the one quarter wave plate between the polarizing beam splitter and the array micro-beam twice, with the phase change of Pi / 2; the imaging beam reflected by the array micro-beam can pierce the polarizing beam splitter and is imaged on the CCD camera after passing through a 4f filter system which consists of the fourier conversion system, the filter edge and the fourier reverse conversion system. By controlling the polarizing state of the illumination light, the array micro-beam unit deflection angle measurement system reduces the background noise of the measured signal, improves the signal-noise-ratio of the system, and presents unique advantages.

Description

technical field [0001] The invention belongs to the field of angle deflection non-contact measurement, in particular to an array microbeam unit deflection angle measurement system. technical background [0002] By measuring the deflection angle of the plane or the microbeam, it is possible to monitor the motion posture of the moving object, analyze the force on the microbeam, detect the temperature change of the environment, monitor the interaction between the biological probe molecule and the molecule, and realize infrared radiation imaging. The collimated light tube angle measuring device can only measure the deflection angle of a single plane, but it is bulky and cannot realize the deflection angle measurement of different microfacets within the area of ​​the array microbeam. Contents of the invention [0003] The technical problem to be solved in the present invention: In view of the above deficiencies, an array microbeam unit deflection angle measurement system is pro...

Claims

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Application Information

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IPC IPC(8): G01D5/28G01B11/26G02B27/46
CPCG01B11/26
Inventor 赵立新张青川陈大鹏胡松唐小萍
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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