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692results about "Emission spectroscopy" patented technology
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Method and apparatus for chemical monitoring
The present invention relates to monitoring chemicals in a process chamber using a spectrometer having a plasma generator, based on patterns over time of chemical consumption. The relevant patterns may include a change in consumption, reaching a consumption plateau, absence of consumption, or presence of consumption. In some embodiments, advancing to a next step in forming structures on the workpiece depends on the pattern of consumption meeting a process criteria. In other embodiments, a processing time standard is established, based on analysis of the relevant patterns. Yet other embodiments relate to controlling work on a workpiece, based on analysis of the relevant patterns. The invention may be either a process or a device including logic and resources to carry out a process.
Owner:LIGHTWIND CORP
Inductively coupled plasma spectrometer for process diagnostics and control
InactiveUS6867859B1High sensitivitySimple reactor designEmission spectroscopyRadiation pyrometryOptical radiationInductively coupled plasma
The present invention relates to an apparatus and method for forming a plasma in the exhaust line of a primary process reactor. The plasma is generated in an inductive source (5) to examine the chemical concentrations of the waste or exhaust gas in vacuum lines that are below atmospheric pressure. The optical radiation emitted by the plasma is analyzed by an optical spectrometer (9) and the resulting information is used to diagnose, monitor, or control operating states in the main vacuum vessel.
Owner:LIGHTWIND CORP
Assay plates, reader systems and methods for luminescence test measurements
InactiveUS20050052646A1Improve collection efficiencyEmission spectroscopyRadiation pyrometryTest measurementBiology
Luminescence test measurements are conducted using an assay module having integrated electrodes with a reader apparatus adapted to receive assay modules, induce luminescence, preferably electrode induced luminescence, in the wells or assay regions of the assay modules and measure the induced luminescence.
Owner:MESO SCALE TECH LLC
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
ActiveUS20190264324A1Emission spectroscopyElectric discharge tubesOptical Emission SpectrometerSmall sample
An apparatus and method are disclosed for monitoring and / or detecting concentrations of a chemical precursor in a reaction chamber. The apparatus and method have an advantage of operating in a high temperature environment. An optical emissions spectrometer (OES) is coupled to a gas source, such as a solid source vessel, in order to monitor or detect an output of the chemical precursor to the reaction chamber. Alternatively, a small sample of precursor can be periodically monitored flowing into the OES and into a vacuum pump, thus bypassing the reaction chamber.
Owner:ASM IP HLDG BV
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
ActiveUS20210180189A1Emission spectroscopyElectric discharge tubesOptical Emission SpectrometerOptical spectrometer
An apparatus and method are disclosed for monitoring and / or detecting concentrations of a chemical precursor in a reaction chamber. The apparatus and method have an advantage of operating in a high temperature environment. An optical emissions spectrometer (OES) is coupled to a gas source, such as a solid source vessel, in order to monitor or detect an output of the chemical precursor to the reaction chamber. Alternatively, a small sample of precursor can be periodically monitored flowing into the OES and into a vacuum pump, thus bypassing the reaction chamber.
Owner:ASM IP HLDG BV
Analysis of component for presence, composition and/or thickness of coating
A method comprising the following steps: (a) providing a turbine component comprising a metal substrate having an external surface; and (b) analyzing the external surface by laser plasma spectroscopy to determine whether a metallic coating is present on or absent from the external surface. If a metallic coating is determined to be present on the external surface, the elemental composition, elemental concentration and / or thickness of the metallic coating present on the external surface may be determined (qualitatively and / or quantitatively) by laser plasma spectroscopy. Another method comprises the following steps: (a) providing a turbine component comprising a metal substrate having an external surface which has been subjected to treatment to remove a metallic coating applied to the external surface; and (b) analyzing the treated external surface by laser plasma spectroscopy to determine the degree of removal of the metallic coating from the treated external surface.
Owner:GENERAL ELECTRIC CO
Method And System For Obtaining Geochemistry Information From Pyrolysis Induced By Laser Induced Breakdown Spectroscopy
ActiveUS20160054284A1Simple methodEmission spectroscopyEarth material testingNon destructiveLaser-induced breakdown spectroscopy
A method for determining geochemistry of at least one geological sample with laser-induced breakdown spectral measurements performed on the geological sample in a time variant manner with spectral acquisitions made after each of a plurality of measurement shots, spectral pre-processing performed as necessary, and subsequent analysis is applied to the collected data to determine at least one geochemistry parameter of the sample. The method can provide a rapid method to estimate thermal maturity of a sample, which does not require sample preparation, and which can be non-destructive with respect to portions of the sample. A system for performing the method also is provided.
Owner:HALLIBURTON ENERGY SERVICES INC
Method and apparatus for etch endpoint detection
ActiveUS20060087644A1Preventing any perturbationEmission spectroscopyRadiation pyrometryEngineeringSpecific time
Broadly speaking, an invention is provided for monitoring a plasma optical emission. More specifically, the present invention provides a method for monitoring the plasma optical emission through a variable aperture to detect an endpoint of a plasma etching process without interferences that could lead to false endpoint calls. The method includes collecting optical emission data from a plasma through an aperture defined by moveable members. The moveable members are capable of varying a configuration of the aperture. The method also includes holding the moveable members at a particular time to cause the aperture to maintain a fixed configuration. The method further includes detecting a specific perturbation in the plasma optical emission while holding the moveable members.
Owner:LAM RES CORP
Socket for use with a micro-component in a light-emitting panel
InactiveUS6545422B1Sufficient resolutionManufactured very thinEmission spectroscopyStatic indicating devicesIonizationVoltage
An improved light-emitting panel having a plurality of micro-components at least partially disposed in a socket and sandwiched between two substrates is disclosed. Each micro-component contains a gas or gas-mixture capable of ionization when a sufficiently large voltage is supplied across the micro-component via at least two electrodes.
Owner:LEIDOS
On-site analyzer
InactiveUS6452179B1Minimizes undesirable effect of fringingEmission spectroscopyRadiation pyrometryOptical Emission SpectrometerOptical spectrometer
An apparatus (10) for analyzing lubricant oils and functional fluids includes an optical emission spectrometer (OES) (26) having a substantially continuously valued wavelength versus intensity output (140). The OES (26) analyzes light captured from a spark emission stand (58) through which the fluid sample is flowed. An expert system (160-172) operates according to a set of Rules that corrects background influence from the electrodes, and generates diagnostic text (174) for an operator based on the information about the fluid sample provided by the OES (26) and other measurement devices. The apparatus (10) is reduce in size, weight and cost.
Owner:SPECTRO SCI INC
Arrangements and methods for facilitating photoluminescence imaging
ActiveUS20070087445A1Eliminate needFacilitates extended imagingEmission spectroscopyRadiation pyrometryPhotoluminescencePhysics
Exemplary systems and methods for obtaining a photoluminescence radiation from at least one portion of a sample can be provided. For example, using the exemplary embodiment, it is possible to receive a first radiation and disperse the first radiation into at least one second radiation and at least one third radiation. The second and third radiations can be provided to different locations of the portion. In addition, it is possible to receive the photoluminescence radiation from the portion based on the second and third radiations.
Owner:THE GENERAL HOSPITAL CORP
Arrangements and methods for facilitating photoluminescence imaging
ActiveUS7889348B2Facilitates extended imagingIncrease flexibilityEmission spectroscopyRadiation pyrometryPhotoluminescencePhysics
Exemplary systems and methods for obtaining a photoluminescence radiation from at least one portion of a sample can be provided. For example, using the exemplary embodiment, it is possible to receive a first radiation and disperse the first radiation into at least one second radiation and at least one third radiation. The second and third radiations can be provided to different locations of the portion. In addition, it is possible to receive the photoluminescence radiation from the portion based on the second and third radiations.
Owner:THE GENERAL HOSPITAL CORP
Remote detection and analysis of chemical and biological aerosols
InactiveUS20050026276A1Quickly thermalizedEasy to detectBioreactor/fermenter combinationsEmission spectroscopyElectromagnetic radiationOxygen
A system for detecting and analyzing chemical and biological aerosols. A beam of radiation is used to radiate a target cloud including the aerosol. The radiation energy that is absorbed by the cloud is thermalized by collisional energy transfer between the molecules that absorb the radiation to generate heat. The wavelength of the electromagnetic radiation is selected to be in resonance with the absorption lines of water or oxygen molecules in the cloud, or to be in resonance with absorption lines of known target molecules in the cloud to generate the heat. An increase in the cloud temperature increases the emission intensity of the molecules against the background, resulting in improved detection of the target molecules in the aerosol. A tracking telescope collects the thermal emissions generated by the radiation beam. A spectrometer receives the emissions from the cloud and generates an emission spectrum.
Owner:NORTHROP GRUMAN CORP
Etching process state judgment method and system therefor
ActiveUS20090253222A1Impossible to accuratelyEmission spectroscopySemiconductor/solid-state device testing/measurementPeak valuePeak detection
An etching process state judgment method comprising: a spectral data obtaining step, in which an optical emission spectrum distribution is obtained by monitoring optical emission during an etching process of a plurality of wafers; a peak detection step, in which peaks are detected from the optical emission spectrum distribution at a specific time point during the etching process, to obtain peak characteristics; a common peak identifying step, in which peaks common to the wafers are identified among the peaks detected in the peak detection step; and a state detection step, in which the characteristics are compared regarding the common peaks, to detect a state of each wafer in the etching process.A state (anomaly or normalcy) of an etching process is detected from optical emission spectrum distribution at the time of etching process, by a simple method without assuming substances.
Owner:HITACHI HIGH-TECH CORP
Laser ablation apparatus and method
Provided is a laser ablation spectroscopy apparatus and method. A pulse laser is focused on the sample site to generate a plasma plume during a laser ablation process. The plasma plume is detected with a spectrometer and an intensified charge coupled device. A sample of material is coupled to a stage movable in the x, y and z directions using an array of x-y-z motors. A change in the height of the sample is detected using a triangulation sensor. The apparatus includes a system computer for synchronizing the movement of the stage in the x, y and z direction during the laser ablation process. The method includes a protocol of generating one or more laser ablations per sample site. The spectral data of the total number of laser ablations for each sample site are averaged together. The protocol includes laser ablating additional sample sites and averaging the spectral data of the total number of sample sites.
Owner:APPLIED SPECTRA
Magnetic focusing immunosensor for the detection of pathogens
A magnetic focusing immunosensor for the detection of pathogens comprising a laser, an exciting fiber and a collecting fiber, a fiber optic magnetic probe in communication with the collecting and exciting fibers and means for detecting, collecting and measuring fluorescent signals in communication with the collecting fiber. The probe and the collecting and exciting fibers are configured to focus paramagnetic microspheres attached to antigen / antibody / optically labeled complexes in a predetermined pattern in the field of view of the collecting fiber while blocking background interference.
Owner:BOARD OF GOVERNORS FOR HIGHER EDUCATION STATE OF RHODE ISLAND & PROVIDENCE PLANTATIONS
Magnetic focusing immunosensor for the detection of pathogens
A magnetic focusing immunosensor for the detection of pathogens comprising a laser, an exciting fiber and a collecting fiber, a fiber optic magnetic probe in communication with the collecting and exciting fibers and means for detecting, collecting and measuring fluorescent signals in communication with the collecting fiber. The probe and the collecting and exciting fibers are configured to focus paramagnetic microspheres attached to antigen / antibody / optically labeled complexes in a predetermined pattern in the field of view of the collecting fiber while blocking background interference.
Owner:BOARD OF GOVERNORS FOR HIGHER EDUCATION STATE OF RHODE ISLAND & PROVIDENCE PLANTATIONS
Method and apparatus for flow cytometry linked with elemental analysis
An apparatus (100) for sequentially analyzing particles such as single cells or single beads, by spectrometry. The apparatus, an elemental flow cytometer, includes means (102) for sequential particle introduction, means (104) to vaporize, atomize and excite or ionize the particles, or an elemental tag associated with an analyte on the particles, and means (106) to analyze the elemental composition of the vaporized, atomized and excited or ionized particles, or an elemental tag associated with the particles. Methods for sequentially analyzing particles such as singe cells or single beads by spectrometry are also described.
Owner:FLUIDIGM CORP
Method and apparatus for elemental analysis of a fluid downhole
The present invention provides a method and apparatus for performing elemental analysis of a formation fluid downhole. The present invention provides elemental analysis of a formation fluid downhole using breakdown spectroscopy. In one aspect of the invention, a method and apparatus are provided for performing laser induced breakdown on a formation fluid sample is provided. In another aspect of the invention a method and apparatus are provided for performing spark induced breakdown spectroscopy. Plasma is induced in a fluid under test downhole. Emissions from the plasma are analyzed to determine the elemental composition of the fluid under test. Emissions include but are not limited to light in the ultraviolet, visible, and near infrared regions of the spectrum. A spectrometer is provided for elemental analysis of a fluid downhole. Elemental analysis yields information about the fluid and the formation from which the fluid originated.
Owner:BAKER HUGHES INC
Laser-induced breakdown spectroscopy for specimen analysis
InactiveUS7092087B2Minimally traumaticRapid accurate diagnosisEmission spectroscopyRadiation pyrometryCancer cellTrace element
Owner:MISSISSIPPI STATE UNIVERSITY
Spectrometers using 2-dimensional microelectromechanical digital micromirror devices
InactiveUS20080174777A1Low costSpeed up the time required for analysisEmission spectroscopyRadiation pyrometryGratingSpectroscopy
Echelle gratings and microelectromechanical system (MEMS) digital micromirror device (DMD) detectors are used to provide rapid, small, and highly sensitive spectrometers. The new spectrometers are particularly useful for laser induced breakdown and Raman spectroscopy, but could generally be used with any form of emission spectroscopy. The new spectrometers have particular applicability in the detection of improvised explosive devices.
Owner:UNIVERSITY OF WYOMING
Multiwavelength imaging and spectroscopic photoemission microscope system
InactiveUS6222187B1Wide of electromagnetic emissionReduce the temperatureEmission spectroscopyRadiation pyrometryBeam splitterSpectrograph
A multiwavelength imaging and spectroscopic photoemission microscope system (100) which simultaneously provides images in a broad range of the electromagnetic spectrum, such as between 200 nm-1000 nm (optical or visible light) and 1000 nm-500 nm (infrared light). The multiwavelength imaging and spectroscopic photoemission microscope system comprises a microscope (102), a spectrometer (106), a beam splitter (108), a first spectrum focal plane array (110) including an appropriate photodiode (114A), a second spectrum focal plane array (120) including an appropriate photodiode (114B), and a cryogenic vessel (160) to maintain relevant portions of the system at a very low temperature. The invention may be used in failure analysis of integrated circuits and in semiconductor and low temperature physics.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI +1
Fluorescent analysis method
InactiveUS20120126142A1Improve detection efficiencyImprove throughputEmission spectroscopyPhotometrySequence analysisLength wave
Disclosed is a fluorescent analysis method whereby the throughput in DNA sequence analysis or the like can be improved. The method comprises irradiating a substrate, which carries biological molecules such as oligonucleotides immobilized thereon, with light for fluorescent measuring, collecting the generated fluorescence, dispersing the collected light, forming an image by focusing the light on a two-dimensional sensor, and then detecting the fluorescence with the two-dimensional sensor. In this method, since wavelengths are dispersed in different directions and then detected at the same time, the intensity of each dispersed wavelength and the position of the subject of spectroscopic imaging can be calculated even in the case where the wavelength dispersion distance is longer than the inter-lattice distance.
Owner:HITACHI HIGH-TECH CORP
Monitoring erosion of system components by optical emission
A method and system are provided for monitoring erosion of system components in a plasma processing system. The system components contain emitters that are capable of producing characteristic fluorescent light emission when exposed to a plasma. The method utilizes optical emission to monitor fluorescent light emission from the emitters for determining system component status. The method can evaluate erosion of system components in a plasma, by monitoring fluorescent light emission from the emitters. Consumable system components that can be monitored using the method include rings, shields, electrodes, baffles, and liners.
Owner:TOKYO ELECTRON LTD
Methods and apparatus for molecular species detection, inspection and classification using ultraviolet to near infrared Enhanced Photoemission Spectroscopy
InactiveUS20080191137A1Reduce sensitivityHigh sensitivityEmission spectroscopyRadiation pyrometryControl substancesUltraviolet
The invention relates generally to the field of substance and material detection, inspection, and classification at wavelengths between approximately 200 nm and approximately 1800 nm. In particular, a handheld Enhanced Photoemission Spectroscopy (“EPS”) detection system with a high degree of specificity and accuracy, capable of use at small and substantial standoff distances (e.g., greater than 12 inches) is utilized to identify specific substances (e.g., controlled substances, illegal drugs and explosives, and other substances of which trace detection would be of benefit) and mixtures thereof in order to provide information to officials for identification purposes and assists in determinations related to the legality, hazardous nature and / or disposition decision of such substance(s).
Owner:CDEX
Method and apparatus for flow cytometry linked with elemental analysis
An apparatus (100) for sequentially analyzing particles such as single cells or single beads, by spectrometry. The apparatus, an elemental flow cytometer, includes means (102) for sequential particle introduction, means (104) to vaporize, atomize and excite or ionize the particles, or an elemental tag associated with an analyte on the particles, and means (106) to analyze the elemental composition of the vaporized, atomized and excited or ionized particles, or an elemental tag associated with the particles. Methods for sequentially analyzing particles such as singe cells or single beads by spectrometry are also described.
Owner:FLUIDIGM CORP
Method and device for measuring luminescence
A method exites and determines a luminescence in an analyte sample which is located in contact with the waveguiding layer of an optical layer waveguide. The luminescence is generated by non-evanescent excitation in the volume of the analyte sample. Luminescence radiation generated in the immediate proximity of the surface of the waveguiding layer is conducted to a measuring device and determined after penetrating the waveguiding layer.
Owner:NOVARTIS AG
Laser plasma spectroscopy apparatus and method for in situ depth profiling
An in-situ laser plasma spectroscopy (LPS) system for automated near real-time elemental depth profiling of a target including: an optical source configured to generate an optical beam, wherein the optical beam is pulsed; an optical probe system configured to deliver the optical beam from the optical source to a surface of a target to generate an ablation plasma; a time resolved spectral detection system configured to generate time resolved spectral data from emission signals from the ablation plasma; and a data acquisition and processing system configured to acquire the time resolved spectral data to determine, in combination with predetermined calibration data, an absolute elemental concentration as a function of depth in near real-time.
Owner:GENERAL ELECTRIC CO
Optical sensor with chemically reactive surface
ActiveUS7652767B2Emission spectroscopyScattering properties measurementsChemical reactionOptical property
An improved optical sensor and methods for measuring the presence of various materials or constituents in a fluid sample uses reactive material(s) in a fluid environment. The reactive materials have optical properties that change in the presence of a target material that may be present in the environment. An optical emitter generates light that is directed to the reactive materials, and one or more optical detectors receive reflected light from one or more interfaces in the optical path between the emitter and the detector(s), one or more of the interfaces having a reactive material. The reactive material(s), emitter(s), and detector(s) are selected based on the desired target material to be sensed.
Owner:SPORIAN MICROSYST
Handheld LIBS spectrometer
A handheld LIBS spectrometer includes an optics stage movably mounted to a housing and including a laser focusing lens and a detection lens. One or more motors advance and retract the optics stage, move the optics stage left and right, and / or move the optics stage up and down. A laser source in the housing is oriented to direct a laser beam to the laser focusing lens. A spectrometer subsystem in the housing is configured to receive electromagnetic radiation from the detection lens and to provide an output. A controller subsystem is responsive to the output of the spectrometer subsystem and is configured to control the laser source and motors. In this way, auto-calibration, auto-clean, and auto-focus, and / or moving spot functionality is possible.
Owner:SCIAPS
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