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3848results about "Analysis by thermal excitation" patented technology

Method and apparatus for chemical monitoring

The present invention relates to monitoring chemicals in a process chamber using a spectrometer having a plasma generator, based on patterns over time of chemical consumption. The relevant patterns may include a change in consumption, reaching a consumption plateau, absence of consumption, or presence of consumption. In some embodiments, advancing to a next step in forming structures on the workpiece depends on the pattern of consumption meeting a process criteria. In other embodiments, a processing time standard is established, based on analysis of the relevant patterns. Yet other embodiments relate to controlling work on a workpiece, based on analysis of the relevant patterns. The invention may be either a process or a device including logic and resources to carry out a process.
Owner:LIGHTWIND CORP

Inductively coupled plasma spectrometer for process diagnostics and control

The present invention relates to an apparatus and method for forming a plasma in the exhaust line of a primary process reactor. The plasma is generated in an inductive source (5) to examine the chemical concentrations of the waste or exhaust gas in vacuum lines that are below atmospheric pressure. The optical radiation emitted by the plasma is analyzed by an optical spectrometer (9) and the resulting information is used to diagnose, monitor, or control operating states in the main vacuum vessel.
Owner:LIGHTWIND CORP

Additive manufacturing apparatus and method

This invention concerns a laser solidification apparatus for building objects by layerwise solidification of powder material. The apparatus including a build chamber containing a build platform, a device for depositing layers of powder material on to the build platform, an optical unit for directing a laser beam to selectively solidify areas of each powder layer and a spectrometer for detecting characteristic radiation emitted by plasma formed during solidification of the powder by the laser beam. The invention also relates to a spectrometer for detecting characteristic radiation generated by interaction of the metal with the or a further laser beam. The spectra recorded using the spectrometer may be used for feedback control during the solidification process.
Owner:RENISHAW PLC

Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment

An apparatus and method are disclosed for monitoring and / or detecting concentrations of a chemical precursor in a reaction chamber. The apparatus and method have an advantage of operating in a high temperature environment. An optical emissions spectrometer (OES) is coupled to a gas source, such as a solid source vessel, in order to monitor or detect an output of the chemical precursor to the reaction chamber. Alternatively, a small sample of precursor can be periodically monitored flowing into the OES and into a vacuum pump, thus bypassing the reaction chamber.
Owner:ASM IP HLDG BV

Drilling, perforating and formation analysis

A system and method of drilling and / or perforating uses a laser beam to remove material, such as to perforate the casing, cement and formation or drill a well bore. The system and method can further or alternately encompass material analysis that can be performed without removing the material from the well bore. The analysis can be performed apart from or in connection with drilling operations and / or perforating the casing, cement and formation. The analysis can be used in a feed back loop to adjust material removal, adjust material analysis, determine the location of future material removal, and for other uses.
Owner:HALLIBURTON ENERGY SERVICES INC

Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment

An apparatus and method are disclosed for monitoring and / or detecting concentrations of a chemical precursor in a reaction chamber. The apparatus and method have an advantage of operating in a high temperature environment. An optical emissions spectrometer (OES) is coupled to a gas source, such as a solid source vessel, in order to monitor or detect an output of the chemical precursor to the reaction chamber. Alternatively, a small sample of precursor can be periodically monitored flowing into the OES and into a vacuum pump, thus bypassing the reaction chamber.
Owner:ASM IP HLDG BV

Method And System For Obtaining Geochemistry Information From Pyrolysis Induced By Laser Induced Breakdown Spectroscopy

A method for determining geochemistry of at least one geological sample with laser-induced breakdown spectral measurements performed on the geological sample in a time variant manner with spectral acquisitions made after each of a plurality of measurement shots, spectral pre-processing performed as necessary, and subsequent analysis is applied to the collected data to determine at least one geochemistry parameter of the sample. The method can provide a rapid method to estimate thermal maturity of a sample, which does not require sample preparation, and which can be non-destructive with respect to portions of the sample. A system for performing the method also is provided.
Owner:HALLIBURTON ENERGY SERVICES INC

Processes for monitoring the levels of oxygen and/or nitrogen species in a substantially oxygen and nitrogen-free plasma ashing process

Processes for monitoring the levels of oxygen and / or nitrogen in a substantially oxygen and nitrogen-free plasma ashing process generally includes monitoring the plasma using optical emission. An effect produced by the low levels of oxygen and / or nitrogen species present on other species generally abundant in the plasma is monitored and correlated to amounts of oxygen and nitrogen present in the plasma. This so-called “effect detection” process monitors perturbations in the spectra specifically associated with species other than nitrogen and / or oxygen due to the presence of trace amounts of oxygen and / or nitrogen species and is used to quantitatively determine the amount of oxygen and / or nitrogen at a sensitivity on the order of 1 part per million and potentially 1 part per billion.
Owner:LAM RES CORP

Method for producing a tube

A method is described for producing tubular substrates having parallel spaced concentric rings of electrical conductors that can be used as the drift tube of an Ion Mobility Spectrometer (IMS). The invention comprises providing electrodes on the inside of a tube that are electrically connected to the outside of the tube through conductors that extend between adjacent plies of substrate that are combined to form the tube. Tubular substrates are formed from flexible polymeric printed wiring board materials, ceramic materials and material compositions of glass and ceramic, commonly known as Low Temperature Co-Fired Ceramic (LTCC). The adjacent plies are sealed together around the electrode.
Owner:NAT TECH & ENG SOLUTIONS OF SANDIA LLC

Full spectrum endpoint detection

A method of endpoint detection during plasma processing of a semiconductor wafer comprises processing a semiconductor wafer using a plasma, detecting radiation emission from the plasma during the semiconductor processing, and tracking data points representing changes in spectra of the radiation as a function of time during the semiconductor processing. At any point prior to or during processing a plurality of profiles are provided, each profile representing a different processing condition affecting detection of the desired plasma processing endpoint of the semiconductor wafer. After selecting a desired profile, a first set of parameters are input, representing simplified values for determining when changes in spectra of the radiation indicate that plasma processing of the semiconductor wafer reaches a desired endpoint. The selected profile converts the input first set of parameters into a larger, second set of parameters, and then applies the second set of parameters to an algorithm that converts data points from the spectra of the radiation as a function of time into an endpoint curve. The method then uses the algorithm to track changes in spectra of the radiation as a function of time and determine when plasma processing of the semiconductor wafer reaches a desired endpoint.
Owner:NOVELLUS SYSTEMS

Systems and methods for additive manufacturing operations

This disclosure describes various system and methods for monitoring photons emitted by a heat source of an additive manufacturing device. Sensor data recorded while monitoring the photons can be used to predict metallurgical, mechanical and geometrical properties of a part produced during an additive manufacturing operation. In some embodiments, a test pattern can be used to calibrate an additive manufacturing device.
Owner:SIGMA LAB OF ARIZONA

Drilling, perforating and formation analysis

A system and method of drilling and / or perforating uses a laser beam to remove material, such as to perforate the casing, cement and formation or drill a well bore. The system and method can further or alternately encompass material analysis that can be performed without removing the material from the well bore. The analysis can be performed apart from or in connection with drilling operations and / or perforating the casing, cement and formation. The analysis can be used in a feed back loop to adjust material removal, adjust material analysis, determine the location of future material removal, and for other uses.
Owner:HALLIBURTON ENERGY SERVICES INC

Catalyst deterioration detecting apparatus and method

An upstream side catalyst and a downstream side catalyst are disposed in an exhaust passage. A first oxygen sensor is disposed between these two catalysts and a second oxygen sensor is disposed downstream of the downstream side catalyst. The air-fuel ratio is forcibly oscillated and the oxygen storage capacity of the upstream side catalyst is detected. Deterioration of the upstream side catalyst is then detected based on whether this oxygen storage capacity is larger than a predetermined value. The forced oscillation of the air-fuel ratio is performed only when the oxygen storage state of the downstream side catalyst is appropriate.
Owner:TOYOTA JIDOSHA KK

Monitoring drug compliance, food-intake or toxin-intake using non-invasively-read labels

A system is disclosed for monitoring a property of an ingested or in-taken drug, food, drink or toxic substance, non-invasively or minimally invasively, which can also identify the subject person being monitored, if desired. The system comprises: a means of labeling the substance with a labeling media to have a useful signature indicative of, or bearing a relation to the property; a means to allow the signature to be read non-invasively or minimally invasively; and a means to identify, in any manner, who is being monitored.
Owner:SLIWA JOHN W +3

Inductively-coupled RF power source

A system and method are disclosed for implementing a power source including a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency. The power amplifier also generates a reference phase signal that is derived from the radio-frequency power signal. An impedance match provides the radio-frequency power signal to a plasma coil that has a variable resonance condition. A phase probe is positioned adjacent to the plasma coil to generate a coil phase signal corresponding to the adjustable operating frequency. A phase-locked loop then generates an RF drive signal that is based upon a phase relationship between the reference phase signal and the coil phase signal. The phase-locked loop provides the RF drive signal to the power amplifier to control the adjustable operating frequency, so that the adjustable operating frequency then tracks the variable resonance condition.
Owner:THERMO ELECTRON MFG

Analyses testing method of aluminum, calcium, iron, molybdenum, niobium, titanium, tungsten impurity elements in chromium carbide

The invention discloses an analysis and detection method for impurity elements such as aluminum, calcium, ion, molybdenum, niobium, titanium, tungsten and the like in chromium carbide. The method comprises adding a chromium carbide sample into a dissolving cup, adding hydrofluoric acid, sulphuric acid and nitric acid sequentially, stirring, charging into a sealed high-pressure jar; putting the sealed high-pressure jar into a microwave extinguishing instrument for two times of microwave extinguishment; taking the high-pressure jar out of the microwave extinguishing instrument for cooling, transferring the dissolved chromium carbide liquid sample into a volumeric flask, diluting to a predetermined index, stirring; preparing a chromium substrate matched mixed standard solution series of aluminum, calcium, iron, molybdenum, niobium, titanium and tungsten; measuring element emission power of aluminum, calcium, iron, molybdenum, niobium, titanium, tungsten or the like in a blank liquid sample, a chromium carbide liquid sample and the prepared series mixed standard solution by an inductively coupled plasma atomic emission spectrometer in the same time, obtaining the analysis result by checking a standard working curve or by linear equation calculation. The invention adopts two times of microwave extinguishment using the mixed acid, solves the problem of hardness in chromium carbide decomposition, having a measurement range from 0.010% to 1.00%, which is high in accuracy, and good in precision.
Owner:ZHUZHOU HARD ALLOY GRP CO LTD

System and method for multiple mode flexible excitation and acoustic chaos in sonic infrared imaging

A defect detection system for thermally imaging a structure that has been energized by a sound energy. The system includes a transducer that couples a sound signal into the structure, where the sound signal causes defects in the structure to heat up. In one embodiment, the sound signal has one or more frequencies that are at or near an eigen-mode of the structure. In another embodiment, an on-linear coupling material is positioned between the transducer and the structure to couple the sound energy from the transducer to the structure. A predetermined force is applied to the transducer and a pulse duration and a pulse frequency of the sound signal are selected so that the sound energy induces acoustic chaos in the structure, thus generating increased thermal energy. A thermal imaging camera images the structure when it is heated by the sound signal.
Owner:WAYNE STATE UNIV +1

Determining endpoint in etching processes using principal components analysis of optical emission spectra with thresholding

A method is provided for determining an etch endpoint. The method includes collecting intensity data representative of optical emission spectral wavelengths during a plasma etch process. The method further includes analyzing at least a portion of the collected intensity data into at most first and second Principal Components with respective Loadings and corresponding Scores. The method also includes determining the etch endpoint using the respective Loadings and corresponding Scores of the second Principal Component as an indicator for the etch endpoint using thresholding applied to the respective Loadings of the second Principal Component.
Owner:GLOBALFOUNDRIES INC

System and method for rapid thermal cycling

At least one exemplary embodiment is directed to an apparatus that includes a microfluidic channel and at least one energy absorbing element, where the energy absorbing element is configured to absorb at least a portion of an incident electromagnetic radiation. The absorption of the radiation by the energy absorbing element varies the temperature of a sample in the microfluidic channel.
Owner:CANON US LIFE SCIENCES INC

Method of determining etch endpoint using principal components analysis of optical emission spectra

A method is provided for determining an etch endpoint. The method includes collecting intensity data representative of optical emission spectral wavelengths during a plasma etch process. The method further includes calculating Scores from at least a portion of the collected intensity data using at most first, second, third and fourth Principal Components derived from a model. The method also includes determining the etch endpoint using Scores corresponding to at least one of the first, second, third and fourth Principal Components as an indicator for the etch endpoint.
Owner:GLOBALFOUNDRIES INC

Analyte detection with infrared light

ActiveUS20110271738A1Efficiently vaporizeEfficiently probeComponent separationPreparing sample for investigationAnalyteChemical physics
The present invention is generally directed to a method for non-contact analyte detection by selectively exciting one or more analytes of interest using an IR source optionally operated to produce pulses of light and tuned to at least one specific absorption band without significantly decomposing organic analytes and determining if the analyte is present by comparing emitted photons with an IR detector signal collected one or more times before, during, after, or any combination thereof exciting the analyte. Another embodiment of the present invention provides a method for non-contact analyte detection by selectively exciting one or more analytes of interest using one or more IR sources that are optionally operated to produce pulses of light and tuned to at least one specific wavelength without significantly decomposing organic analytes, wherein the analyte is excited sufficiently to increase the amount of analyte in the gas phase, and wherein the content of the gas is examined to detect the presence of the analyte.
Owner:U S A AS REPRENSENTED BY THE SEC OF THE NAVY THE

Experimental apparatus for acquiring large-area uniform discharge plasmas

The invention relates to an experimental apparatus for acquiring large-area uniform discharge plasmas, which belongs to the technical field of plasmas. The experimental apparatus comprises a bipolar nanosecond pulse power supply, a reactor, multi-needle-to-plate electrodes, a gas distribution system, a spectral measurement system and a discharge measurement system, wherein the bipolar nanosecond pulse power supply drives dielectric barrier discharge of air and other gas mixtures among the multi-needle-to-plate electrodes in the reactor, and the gas mixtures are input to the reactor through the gas distribution system; the spectral measurement system collects photonic information of plasma discharge in real time and inputs the photonic information to a computer for spectral analysis; and the discharge measurement system collects discharge voltage and current of the high-voltage nanosecond pulse power supply in real time, and the discharge voltage and current are displayed through a digital oscilloscope. By virtue of the bipolar nanosecond narrow-pulse power supply, the large-area discharge plasmas are generated without a magnetic field; and the generated plasmas are uniform, diffusive, high in electron density, high in energy utilization ratio, low in energy consumption and easy to control in a discharge process.
Owner:DALIAN UNIV OF TECH
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