The invention provides a high-sensitivity terahertz micro-fluid sensor based on
band gap plasma resonance, and relates to the field of design of sensors. The high-sensitivity terahertz micro-fluid sensor comprises a cap, an
etching groove, a
metal array periodic structure layer, a micro-fluid channel, a
metal reflective mirror, a substrate medium
chip and a liquid inlet / output channel from top tobottom, wherein the cap is etched with the
etching groove, and a
metal micro-structure layer is attached to the
etching groove; the metal plane reflective mirror is arranged on a substrate. The high-sensitivity terahertz micro-fluid sensor has the advantages that the metal array micro-structure uses the center-symmetric double-circular ring structure as a metal micro-structure array, so that the characteristics of no sensitivity to polarization and double
resonance are realized; on the basis of double rings, the number of
resonance rings can be increased, so as to realize the higher-order resonance response and multi-resonance detection; compared with the sensor without the etching groove, the sensitivity of the sensor provided by the invention is increased by 25% or above; compared with the existing sensor, the sensitivity is greatly increased; the structure is simple, and the
processing and use are easy.