Several embodiments of enhanced
integrated circuit probe card and
package assemblies are disclosed, which extend the mechanical compliance of both MEMS and thin-film fabricated probes, such that these types of spring probe structures can be used to test one or more integrated circuits on a
semiconductor wafer. Several embodiments of
probe card assemblies, which provide tight
signal pad
pitch compliance and / or enable high levels of parallel testing in commercial
wafer probing equipment, are disclosed. In some preferred embodiments, the
probe card assembly structures include separable standard components, which reduce
assembly manufacturing cost and manufacturing time. These structures and assemblies enable high speed testing in
wafer form. The probes also have built in mechanical protection for both the integrated circuits and the MEMS or thin film fabricated spring tips and probe
layout structures on substrates. Alternate card
assembly structures comprise a stiffening structure and a compliant carrier structure, such as a decal or screen, which is fixedly attached to the probe
chip substrate.