High-sensitivity terahertz micro-fluid sensor based on band gap plasma resonance

Abstract

The invention provides a high-sensitivity terahertz micro-fluid sensor based on band gap plasma resonance, and relates to the field of design of sensors. The high-sensitivity terahertz micro-fluid sensor comprises a cap, an etching groove, a metal array periodic structure layer, a micro-fluid channel, a metal reflective mirror, a substrate medium chip and a liquid inlet / output channel from top tobottom, wherein the cap is etched with the etching groove, and a metal micro-structure layer is attached to the etching groove; the metal plane reflective mirror is arranged on a substrate. The high-sensitivity terahertz micro-fluid sensor has the advantages that the metal array micro-structure uses the center-symmetric double-circular ring structure as a metal micro-structure array, so that the characteristics of no sensitivity to polarization and double resonance are realized; on the basis of double rings, the number of resonance rings can be increased, so as to realize the higher-order resonance response and multi-resonance detection; compared with the sensor without the etching groove, the sensitivity of the sensor provided by the invention is increased by 25% or above; compared with the existing sensor, the sensitivity is greatly increased; the structure is simple, and the processing and use are easy.

Description

technical field [0001] The invention relates to a high-sensitivity terahertz microfluidic sensor based on bandgap plasmon resonance, in particular to a terahertz sensor based on the combination of bandgap plasmon and microfluidic channels. Background technique [0002] In recent years, as a new type of detection method, metamaterial biosensors can break through the resolution limitation of traditional sensors, and have the characteristics of no label, fast response, timeliness and no loss. The research of this type of sensor mainly focuses on the microwave, terahertz and optical bands, etc., especially the research on biosensors in the terahertz band has attracted more attention. Through the study of terahertz waves, it is found that many biological macromolecules have characteristic peaks at the terahertz wave end, making terahertz sensing technology an important detection method for biomolecules and chemical substances. Utilizing the affinity combination of metamaterials ...

AI Technical Summary

Problems solved by technology

However, most MPA-based sensing devices use the surface plasmon field of the wave absorber to interact with the analyte, and do not make full use of the overlap of the space field to maximize the utilization of electromagnetic energy, and are not suitable for terahertz biological microfluidic sensing.

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