The invention discloses a
decomposition method for analyzing trace impurities of a
metal organic compound, which comprises the following steps of feeding a dry sampling
bottle and a sampling device which are accurately weighed into an
inert atmosphere operation box, taking the
metal organic compound by using the sampling device, and putting the
metal organic compound into the sampling
bottle, accurately weighing a sampling
bottle and the total weight of the metal organic compounds in the sampling bottle, then sequentially connecting the sampling bottle, a buffer bottle, an absorption bottle and a
drying bottle in the
inert atmosphere operation box, slowly introducing
ultrapure water into the sampling bottle in the form of
water vapor, and after complete
decomposition, preparing a corresponding to-be-detected solution by absorbing a
nitric acid or
hydrochloric acid solution with the
mass percentage of 5% for substance in the bottle and detecting. The
water vapor is adopted to decompose the metal organic source to form the soluble
hydroxide, and the method has the advantages of easiness in operation, good safety, short detection time, no environmental
pollution, good analysis result
repeatability, wide applicability and the like.