3002 results about "Electrostatic adsorption" patented technology

The present invention provides a temperature control unit for an electrostatic adsorption electrode that is capable of controlling the wafer temperature rapidly over a wide temperature range without affecting in-plane uniformity while high heat input etching is conducted with high wafer bias power applied. A refrigerant flow path provided in the electrostatic adsorption electrode serves as an evaporator. The refrigerant flow path is connected to a compressor, a condenser, and a first expansion valve to form a direct expansion type refrigeration cycle. A second expansion valve is installed between the electrostatic adsorption electrode and the compressor to adjust the flow rate of a refrigerant. This makes it possible to compress the refrigerant in the refrigerant flow path of the electrostatic adsorption electrode and adjust the wafer temperature to a high level by raising the refrigerant evaporation temperature. Further, a thin-walled cylindrical refrigerant flow path is employed so that the thin-walled cylinder is deformed only slightly by the refrigerant pressure.

An electrostatic adsorption layer, an electrode layer, and an insulating layer are provided in a lower portion of a focus ring disposed in an outer periphery of a substrate stage. A high frequency bias is applied to the focus ring by applying a high frequency electric power to the electrode layer. Further, the focus ring is electrostatically chucked to the electrostatic chucking layer and a heat transfer gas is provided between the focus ring and the electrostatic adsorption layer. Thus, the focus ring can be cooled and the temperature of the focus ring is controlled to a predetermined value. With this structure, an etching characteristic at a wafer edge portion can be maintained favorably for a long time. Also, a yield rate at the edge portion can be favorably maintained for a long time, a wet period can be prolonged, and the device operation rate can be improved.

The invention discloses a graphene / carbon black thermoplastic resin master batch with high dispersibility and a preparation method thereof. The graphene / carbon black compound in the master batch is formed in an electrostatic self-assembly manner, and comprises 10-50% of graphene, 5-20% of carbon black, 0.5-10% of surfactant, 10-65% of carrier resin and 2-10% of assistant. The preparation method comprises the following steps: (1) compounding and dispersing graphene by adopting the surfactant to control the positive electricity of the graphene surface; (2) forming a stable graphene / carbon black compound from the modified graphene and carbon black with positive electricity through electrostatic incorporation in a self-assembly manner; (3) preparing the graphene / carbon black thermoplastic resin master batch with high dispersibility by matching with a solution blended process, a melt-blending method and an in-situ polymerization method; (4) adding the assistant to extrude and pelletize, so as to prepare the graphene / carbon black / thermoplastic resin master batch particles after processing the master batch. By adopting the obtained master batch, the problems of difficult charging of graphene powder, uneven dispersion, dust pollution, unstable product performance and the like are solved.

The present invention is constituted of a lower electrode structure (1) comprising a base table (2) formed of a conductive material, an electrostatic adsorption member (3) formed on the base table (2) and having a dielectric layer (4) on which the substrate to be mounted and within which an electrode (5) electrically isolated from the base table (2) is housed, first wiring (7) having an end connected to the electrode (3) of the electrostatic adsorption member, a direct-current source (8) connected to the other end of the first wiring (7), second wiring (10) having an end connected to the base table (2), a high frequency source (11) connected to the other end of the second wiring (10), a third wiring (14) for connecting the first wiring (7) and the second wiring (10), and a capacitor (13) formed on the third wiring (14). Plasma processing is performed by disposing the lower electrode structure (1) in the chamber (21).

A substrate processing apparatus includes: a holding stage which includes a susceptor having a substrate holding surface on which a wafer is held and a focus ring holding surface on which a focus ring is held; an electrostatic chuck which electrostatically adsorbs a rear surface of the wafer to the substrate holding surface and electrostatically adsorbs a rear surface of the focus ring to the focus ring holding surface; and a heat transfer gas supplying mechanism, wherein the heat transfer gas supplying mechanism independently provides a first heat transfer gas supply unit supplying a first heat transfer gas to the rear surface of the substrate and a second heat transfer gas supply unit supplying a second heat transfer gas to the rear surface of the focus ring.

The invention provides a graphene-coated glass fiber reinforced resin-based composite material. The preparation method comprises the following steps of dispersing graphene modified by a silane coupling agent in water to obtain a uniformly-dispersed aqueous dispersion, dipping glass fibers into the aqueous dispersion of the modified graphene so that compact and uniform graphene coatings are formed on surfaces of the glass fibers under the action of electrostatic adsorption, and carrying out compounding molding on the glass fibers with the graphene coatings and a resin matrix to obtain a composite material. The graphene coatings are arranged on the surfaces of the glass fibers so that the interaction area and interface bonding strength of the fibers and the matrix are improved, graphene dispersion is avoided and excellent composite material mechanical properties are obtained. The preparation method has simple processes, a low cost and good practicality.

The invention discloses a variable-frequency variable-pressure electronic type efficient air purifier. The variable-frequency variable-pressure electronic type efficient air purifier comprises a primarily efficient filter screen positioned at the front end, wherein an insulating framework is arranged behind the primarily efficient filter screen; a PCB pin base, an ion emission pin and a grounding stainless steel plate are arranged in the insulating framework from front to rear in sequence; the ion emission pin is connected to a variable-frequency variable-pressure type ion generator; an ion air outlet which corresponds to the ion emission pin is arranged on the grounding stainless steel plate; a honeycomb type electrostatic electret filter screen is arranged behind the insulating framework; and the polarity of charge of the honeycomb type electrostatic electret filter screen is reverse to that of charge released by the variable-frequency variable-pressure type ion generator. The variable-frequency variable-pressure electronic type efficient air purifier realizes various functions of condensation, electrostatic adsorption, sterilization and fitness on fine particles in air, and also avoids obvious defects of high noises, much peculiar smell and high energy consumption of the conventional purifying technology.

The invention discloses a method for preparing a graphene-loaded platinum nano catalyst, which comprises the following steps of: (1) preparing graphene (GNS); (2) preparing polydiallyl dimethyl ammonium chloride (PDDA) functional graphene; and (3) preparing the graphene-loaded platinum nano (Pt / GNS) catalyst. The method has the advantages of uniformly adsorbing and distributing PtCl6<2-> with negative charge on the surface of the GNS through electrostatic adhesion by using positive charge uniformly distributed on the surface of the PDDA-modified GNS, solving the technical problem that metallic particles per se aggregate, realizing higher loading rate of PtNPs and having uniform grain size and controllable size.

The invention provides a method for utilizing electrostatic self-assembly to prepare a natural rubber-carbon nano-tube composite material. The method comprises the following steps of adopting surfactant to modify the surfaces of carbon nano-tubes so as to enable the surfaces of the carbon nano-tubes to have positive charges, directly mixing the carbon nano-tubes with lacteous natural rubber with negative charges and utilizing self-assembly in an electrostatic adsorption principle to prepare the natural rubber-carbon nano-tube composite material. The preparation method realizes that the carbon nano-tubes are uniformly dispersed in the natural rubber and have good compatibility with the natural rubber, thereby providing technical guarantee for preparing nano-composite rubber products with excellent comprehensive properties.

The invention relates to a method for transferring a graphene film with a static protective film as a medium. The method includes that the static protective film is attached to graphene containing a growing lining through an electrostatic adsorption effect, then the growing lining is removed, a graphene / static protective film combination is obtained, finally a single layer of the graphene / static protective film combination is attached to a target substrate, static is released, the static protective film is removed, and the single-layer graphene film is obtained; or after the single layer of the graphene / static protective film combination is obtained, the single-layer of the graphene / static protective film combination replaces the static protective film, attaching of the graphene / static protective film is conducted sequentially on the graphene containing the growing lining repeatedly, the growing lining is removed, and finally a plurality of layers of graphene films are obtained. The method is simple to operate and free of residual glue, and organic solvent for following washing is not required, and therefore process cost for transferring the graphene films is reduced.

An electrostatic chuck device includes: an electrostatic chuck section including a substrate, which has a main surface serving as a mounting surface on which a plate-like sample is mounted and an electrostatic-adsorption inner electrode built therein, and a power supply terminal for applying a DC voltage to the electrostatic-adsorption inner electrode; and a metal base section that is fixed to the other main surface of the electrostatic chuck section so as to be incorporated into a body and that serves as a high frequency generating electrode. Here, the electrostatic-adsorption inner electrode has one or more electrode portions, and a resistance value of a distance between a point corresponding to a center axis of the substrate or a point closest to the center axis and a point most distant from the center axis among distances between two points in the electrode portion is in the range of 102Ω to 1010Ω.

The invention relates to a spray booth for automatically recycling spray mist through electrostatic adsorption, in particular to a spray booth for automatically recycling and treating spray mist generated during spraying operation. The spray booth comprises an electrostatic spray gun, a paint bucket providing paint to the spray gun, an air compressor providing high-pressure air and an enclosure which is provided with a workpiece fixing device and provides operation space for spraying. The enclosure comprises four operation chambers, including a spray chamber, an electrostatic chamber and a fan chamber which run through each other in sequence along the spraying direction, and a recycle chamber which is positioned below the electrostatic chamber and runs through the electrostatic chamber. The operators in the spray booth need to be equipped with masks and inflated protective clothing so that the operators can not breathe the toxic gases in the spray booth and can not have occupational diseases. The spray booth solves the problem that the existing machines have low spraying efficiency, even spraying but high price, low manual spraying cost, flexible operation but heavy labor intensity, poor operation conditions, etc, and has the characteristics of spray mist reduction and environmental protection, reduction of damage to the bodies of the operators and the environment, reduction of waste of paint resources, simple operation, high efficiency, etc.

A preparing method of fluorescent cocoon fibre assembled with quantum point nano particles, takes the quantum point nano particles as fluorescent particles, takes cocoon fibre as nuclear, adopts an electrostatic absorption method to connect one layer of organic high molecule on the cocoon fibre surface, and then adopts an electrostatic absorption method to connect one layer of quantum point nano particles on the organic high molecule surface, or alternately repeats steps for multitime, and then uses an electrostatic absorption method to connect one layer of organic high molecule on the quantum point nano particles surface, so as to compose a fluorescent cocoon fibre coated by quantum point nano particles once or many times, wherein, the quantum point nano particles surface is coated by organic small molecule and / or organic high molecule. The invention has advantages that the inventive fluorescent cocoon fibre assembled with quantum point nano particle, not only has large superiority in optical aspects such as fluorescent stability, fluorescent strength and fluorescent color kinds, but also can produce in large under low cost conditions with better product character repetitiveness.

The invention discloses a preparation method of a flexible transparent conducting polymer thin film with antibacterial properties, and belongs to the technical field of nanocomposite materials. The preparation method comprises the steps: preparing stably dispersed graphene oxide (GO) colloid by a Hummers method at first; next, performing surface modification on the graphene oxide under the electrostatic adsorption action of poly(diallyldimethylammonium chloride) (PDDA) and preparing a nanowire / graphene nano hybrid material by a method of inducing the growth of silver nanowires in situ, and then further preparing a silver nanowire / graphene / polyvinyl alcohol thin film by a solution casting method. The thin film has the characteristics of antibiosis, high electricconductivity, high lighttransmittance, flexibility and the like, and is expected to be applied to a plurality of fields such as biosensing and nano-devices; and therefore, the flexible transparent conducting polymer thin film with antibacterial properties has a wide application prospect.

The invention relates to a graphene / polyvinyl alcohol modified nonwoven fabric production method, and belongs to the technical field of textile chemistry. The method comprises the following steps: dipping a nonwoven fabric in a graphene oxide / polyvinyl alcohol composite modification solution, drying the nonwoven fabric, and reducing graphene oxide to make the surface of the nonwoven fabric covered with a layer of reduced graphene oxide in order to obtain a nonwoven fabric product with excellent hydrophilic, antibiotic, antistatic and adsorptive functions. The method is suitable for modifying polypropylene fibers, terylene, polyamide, acrylic fibers, polyethylene fibers, polyvinyl chloride fibers, polytetrafluoroethylene, polyphenylene sulfide and other nonwoven fibers, and the nonwoven fabric product obtained in the invention can be used in fields of clothes, home textiles, medical health care, air purification, sewage treatment and military matters. The preparation method has the advantages of simplicity, low cost, wide application range and high application values.

The invention provides compositions and methods useful in providing strongly bonded functional layers on substrates. In some embodiments, the invention provides functionalized substrate surfaces that have a surface property selected from smudge resistance, easy clean, oleophobic, oleophilic, hydrophobic, hydrophilic, electrostatic, sorbing, electroresponsive, charge responsive, bioinert, and bioactive. Methods for the manufacture of such coated substrates are provided. The invention finds utility, for example, in the fields of surface and ultrathin coating chemistry and chemical functionalization of surfaces. In some embodiments, the method provides surfaces having smudge resistance and easy-clean characteristics.

The invention discloses a graphene coated lead powder composite material and an application thereof. A preparation method of graphene coated lead powder composite material comprises the following steps of: (1) modifying lead powder by using an aminosilane coupling agent so that the lead powder has positive charges on the surface, and then obtaining the modified lead powder with positive charges; (2) carrying out self-assembly of the modified lead powder obtained in the step (1) with oxidized graphene in deionized water A through electrostatic adsorption to obtain the oxidized graphene coated lead powder composite material; and (3) reducing the oxidized graphene coated lead powder composite material obtained in the step (2) into the graphene coated lead powder composite material. The graphene coated lead powder composite material can be used as the cathode material of a lead-carbon super battery. A polar plate made from the graphene coated lead powder composite material is good in mechanical strength; a battery made from the composite material as the cathode material is excellent in charge / discharge performance, power density, specific capacity and cycle life.

The invention belongs to the field of preparation of photocatalysis materials, and particularly relates to a preparation method for a photocatalysis composite material made from graphite oxide and carbon nitride. The preparation method comprises the steps that a nitrogen-containing compound serves as a precursor and is subjected to high-temperature roasting, and then carbon nitride is obtained; the carbon nitride is acidized by sulfuric acid, so that the surface of the carbon nitride is positively charged; the carbon nitride with the positively charged surface and negatively charged graphite oxide are assembled through electrostatic adsorption, and the photocatalysis composite material made from the graphite oxide and the carbon nitride is obtained. Raw materials used for preparing the photocatalysis composite material from the graphite oxide and the carbon nitride are abundant, the prepared photocatalysis composite material made from the graphite oxide and the carbon nitride is high in photocatalytic activity, low in cost and suitable for large-scale production, and the preparation process is simple.

An electrostatic chuck using the Johnson-Rahbek force, comprising: a dielectric material layer including a ceramics layer and a resin layer formed on the ceramics layer; and an electrode for generating an electrostatic adsorption power.

The invention relates to an oil-water emulsion separation membrane of a metal organic framework compound / polyacrylonitrile. According to the oil-water emulsion separation membrane, polyacrylonitrile is used as a raw material and is prepared into a fiber membrane with the yarn diameter of about 300 nanometers and extremely high porosity by utilizing an electrostatic spinning technology; then the fiber membrane is subjected to a hydrolytic action so that functional groups including hydroxyl, carboxyl and the like are formed on surfaces of fibers; furthermore, the fiber membrane and amino on hydrophilic UIO-66-NH2 can form hydrogen bonding and electrostatic adsorption; finally, a porous fiber membrane with a hydrophilic multi-grade structure is prepared. The porous fiber membrane can be usedfor carrying out efficient separation on oil-water emulsion and has extremely low oil adhesion and relatively high oil stain resistance; furthermore, a preparation method of the oil-water emulsion separation membrane is simple and feasible, is safe and environmentally friendly and has very good application value.

The invention relates to a method for preparing a drug carrier based on a magnetic carbon quantum dot / chitosan composite microsphere. The method specifically comprises the following steps of: (1) carrying out a coprecipitation reaction on bivalent and trivalent iron salts in an alkaline aqueous solution so as to prepare nano magnetic ferroferric oxide; (2) carrying out microwave radiation reaction on a glucose and polyethylene glycol mixed solution to prepare carbon quantum dots, and forming magnetic carbon quantum dot composite particles through electrostatic adsorption; (3) reacting the chitosan which is dissolved in a mixed solution of sodium methoxide / absolute methanol with nitric oxide in a high-pressure kettle, and forming a chitosan-nitric oxide addition product; and (4) dropwise adding the magnetic carbon quantum dots into the addition product, and forming the magnetic carbon quantum dot / chitosan composite microsphere through electrostatic adsorption. Compared with the prior art, the method is simple, rapid, low in cost, and the prepared product can be developed into the drug carrier which integrates magnetic targeting, fluorescence imaging or tracing, nitric oxide in-situ release and fluorescence detection.

The invention relates to a hyaluronic-acid-based double-targeting nano-composite medicament and a preparation method thereof. Hydrophobic group ursodeoxycholic acid is included in a hyaluronic acid nano-polymer structure and can form an amphipathic polymer and automatically generate micelles in an aqueous solution, and polyethylene glycol can be introduced into the micelles to improve the dispersity and stability of a composite. An anti-tumor medicament can enter a nano-carrier through electrostatic adsorption or physical inclusion to generate a nano-medicament composite, wherein the nano-medicament composite is selectively concentrated in a tumor cell under an active targeting effect of hyaluronic acid and a surface CD44 receptor of a tumor cell, and promotes a tumor tissue to absorb the nano medicament-carrying composite by using a passive osmotic accumulation effect (EPR) at the same time. After an anti-tumor medicament is wrapped by a modified hyaluronic acid polymer, the anti-tumor medicament has the advantages of improving the bioavailability of the medicament, improving the targeting property, reducing the toxic and side effects, prolonging the half-life period of the medicament, being stably stored and the like, so that the tumor targeting therapy efficiency is improved in many ways.

The invention discloses an electrostatic adsorption type soft gripper simulating a fin structure. The soft gripper comprises a soft gripper body and an electrostatic adsorption electrode; the electrostatic adsorption electrode is a flexible electrode and is fixed on the gripping surface of the soft gripper body in an attached manner; the soft gripper body is a fin ray type gripper; self-adaptive coating type close fitting with an object can be realized with the structure, and the electrostatic adsorption force can be produced between the soft gripper and the surface of the adsorbed object through application of voltage to the electrostatic adsorption electrode. The soft gripper is combined with the electrostatic adsorption technology, the object can be adsorbed by the aid of the electrostatic adsorption force and can also be gripped by the aid of the clamping force produced through close fitting of the soft gripper with the surface of the object, the object is gripped by the aid of theclamping force and the electrostatic adsorption force simultaneously, and adaptive gripping of objects in different shapes and sizes is realized.

Belonging to the technical field of graphite / metal phthalocyanine, the invention relates to a method for preparing a graphene / metal phthalocyanine compound composite material through electrostatic assembly. The method includes: combining graphene oxide with PDDA through electrostatic adsorption, and reducing the graphene oxide into graphene with a reducing agent so as to obtain a GR / PDDA composite material, which is then further combined with a metal phthalocyanine compound by electrostatic adsorption, thus finally obtaining the graphene / metal phthalocyanine compound composite material. In the invention, strong electrostatic adsorption exists between the graphene and the PDDA, and between the PDDA and a metal phthalocyanine derivative, self-agglomeration of graphene can be prevented, so that the metal phthalocyanine derivative can be evenly attached to the graphene surface.

The invention discloses a preparation method for a graphene / polyvinyl chloride composite material. The preparation method comprises the following steps of (1) anchoring an azo initiator on the surface of graphene through electrostatic adsorption; (2) preparing graphene emulsion, namely cooperatively dispersing and stabilizing the graphene under mutual action caused by molecular structures of a dispersing agent and an emulsifier, so as to obtain uniformly dispersed graphene emulsion through a high-speed stirrer; (3) initiating polymerization on the surface of the graphene by adopting an in-situ polymerization method to generate polyvinyl chloride, and preparing a polyvinyl chloride-cladded graphene composite material; and (4) post-treating graphene / polyvinyl chloride resin slurry. According to the preparation method, the process is simple; under the complexing cooperation action of in-situ anchoring modification and a surfactant, the compatibility of a graphite powder body and the polyvinyl chloride is improved from multiple aspects, so that the composite material with the high performance is obtained; the preparation method can be widely applied to materials such as building materials, packaging materials and medical materials, and the graphene / polyvinyl chloride composite material can be used as a novel upgrading replacement product for a conventional composite material.

The invention discloses a detecting micro-needle with a strengthened Raman and a fluorescence signal and a preparation method of the detecting micro-needle. The detecting micro-needle is characterized in that a medical acupuncture needle is used a basis for preparation. A metal nanometer material layer and a high molecular material layer with a strengthened Raman and a fluorescence signal cover the surfaces of the needle body and the needle tip part of the micro-needle. The detecting micro-needle structure comprises a micro-needle with a mercapto and amination surface, a metal nanoparticle layer and a high molecular material layer. The metal nanoparticles with a diameter of 20-1000nm coat the surface of the acupuncture needle by a covalent bond or a static adsorption effect. The high molecular layer covers the protecting metal nanoparticles in the outmost layer. Raman and fluorescence detection of in vitro samples and sampling and minimally invasive sampling and Raman and fluorescence detection in organism can be carried out based on the features of the detecting micro-needle. A novel rapid and super-sensitive detecting method for in vivo and in vitro experiment research, clinical diagnosis and large sample screening is provided by the invention.

The invention discloses an intelligent ventilation and purification window. The intelligent ventilation and purification window comprises aluminum alloy window borders, double-layer glass and widow rolling wheels, wherein the inner side of the double-layer glass is plated with a conductive coating, the double-layer glass is arranged inside the aluminum alloy window borders, an outdoor air inlet air grid towards outdoors, an indoor air outlet air grid towards indoors and an indoor air inlet air grid are arranged on the aluminum alloy window borders, the outdoor air inlet air grid and the indoor air inlet air grid are arranged oppositely, and are separated by an interlayer, and a multifunctional efficient filter screen is arranged on the inner side of the outdoor air inlet air grid. According to the intelligent ventilation and purification window, an air purifier is embedded into a traditional window, and a modularized simple installation mode is achieved on the premise that an original building window frame is not changed; by fully making use of an internal space structure of an aluminum alloy window, a fan and an air filtering device are creatively integrated in the window borders on the two sides, the natural interlay formed by the double-layer glass with the inner side plated with the conductive layer serves as a sedimentation pole of an electrostatic adsorption device to carry out secondary treatment on filtered outdoor air, and purification efficiency is greatly improved.

An electrostatic chuck device includes an electrostatic chuck section, a metal base section, and a dielectric plate. The electrostatic chuck section has a substrate, a main surface of which serves as a mounting surface for a plate-like sample, an electrostatic-adsorption inner electrode built in the substrate, and a power supply terminal for applying a DC voltage to the electrostatic-adsorption inner electrode. Here, a dielectric plate is fixed to a concave portion formed in the metal base section. The dielectric plate and the electrostatic chuck section are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric plate and the concave portion are adhesively bonded to each other with a conductive adhesive bonding layer interposed therebetween, the volume resistivity of which is 1.0×10−2Ωcm or less.

The invention discloses a clay-resistant polycarboxylate water reducer and a preparation method of the clay-resistant polycarboxylate water reducer. The water reducer comprises the following components by weight: 35-45% of unsaturated polyoxyethylene ether monomer I, 40-50% of unsaturated polyoxyethylene ether monomers II, 10-20% of unsaturated monocarboxylic acid and derivative monomer of unsaturated monocarboxylic acid, 5-15% of unsaturated alkenyl sulphonate, and the like, wherein the unsaturated polyoxyethylene ether monomers I, the unsaturated polyoxyethylene ether monomers II, the unsaturated monocarboxylic acid and the derivative monomers of the unsaturated monocarboxylic acid, the unsaturated alkenyl sulphonate and the like are mixed and copolymerized, and then neutralized by polyethylene polyamine which is 0.5-2.0% of total monomer weight. The polyethylene oxide alkenyl short side chain of the water reducer can enhance the stability of the solvation water membrane layer on the surface of mineral fine powder particles in concrete; carboxyl groups and sulfonic groups generate electrostatic adsorption to prevent the adsorption and water absorption expansion rate of internal structures between clay layers; and polyethylene polyamine chains are adsorbed on the surfaces of clay particles to have shielding and scattering functions, therefore, the problem that the polycarboxylate water reducer and overlarge mud content in a concrete material are incompatible can be solved effectively.