The invention discloses a manufacturing method of a piezoelectric micro-
cantilever beam probe, belonging to the technical field of micro-mechanical sensors and actuators. The invention is characterized in that a partial piezoelectric layer is adopted to realize integration of the manufacturing technique of a
nano silicon needle point and the manufacturing technique of a piezoelectric film. In the manufacturing process, the
nano silicon needle point adopts anisotropic wet
corrosion method with a
mask; the piezoelectric film is manufactured by adopting a
sol-
gel method. The invention has the beneficial effects of having both functions of sensing and executing by adopting the piezoelectric film as a sensitive part, being capable of finishing the whole technological process by adopting a
dry etching and wet
etching technique, having lower requirements on the technological equipment, being capable of being produced in batches and reducing the cost of products. The piezoelectric micro-
cantilever beam probe manufactured by the method can be used for atomic force microscopes, nano-imprint storage devices and field emission devices.