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Method for preparing probe tip of nano tube

A technology of probe tips and nanotubes, which is applied in the field of preparing nanotube probe tips, can solve the problems of uncontrollable growth point position and size, low efficiency, etc., and achieve the effects of convenient operation, simple equipment, and improved resolution

Inactive Publication Date: 2003-08-06
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The advantage of this method is that it is easy to operate, but because the position and size of the growth point cannot be controlled, and the growth direction is also random, the carbon tube tip prepared is easy to form multiple needle points, so the efficiency of this preparation method is very low

Method used

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  • Method for preparing probe tip of nano tube
  • Method for preparing probe tip of nano tube
  • Method for preparing probe tip of nano tube

Examples

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Effect test

preparation example Construction

[0024] The method for preparing the nanotube probe tip of the present invention comprises the following steps: (1) modifying the hydrophobic monolayer film on the surface of the probe tip, (2) removing the hydrophobic monolayer film at the tip of the needle tip by a pulse electric field or removing (3) Calculate the size of the activation area by detecting the effect of the needle tip with the electric field on the surface of the standard sample by scanning probe microscope, (4) Adsorb the catalyst droplet in the hydrophilic area at the tip of the needle tip To immobilize the catalyst particles, (5) place the tip loaded with the catalyst nanoparticles in the nanotube reactor to grow nanotubes.

[0025] The probe tip can be a tip made of silicon semiconductor material, or a silicon tip that has been coated with a metal or non-metal film or a compound film.

[0026] The hydrophobic monolayer film on the probe tip can be bonded to the surface of the tip by chemical reaction, or f...

Embodiment

[0034] Example, Hydrophobic treatment of needle tip: Immerse the clean silicon needle tip in 0.1% (volume ratio) octadecyltrichlorosilane benzene solution for 26 hours, take it out, soak it with chloroform and ethanol in turn, and then dry it with nitrogen. Selective activation of silicon tip hydrophobic monolayer film: control the distance between the tip of the hydrophobic film and the gold thin film sample, and apply a pulse voltage, such as 0.4 volts for 100 milliseconds to complete the activation. Fixation of catalyst particles: immerse the activated needle tip in a 0.5 molar ferric nitrate solution, take it out and dry it in a drying oven at 110°C for 2 hours. Growth of carbon nanotubes: put the needle tip immobilized with the catalyst into a furnace, feed 0.5 L / min ethylene gas, and grow at 750 degrees Celsius for 30 minutes.

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Abstract

The invention is a method for manufacturing nano tube probe tip; the pin applies to various mode of atom microscope. At first, the method decorates hydrophobe single layer film on the surface of various silicon probe pin, then it uses electrical field to eliminate the film or oxides the film into hydrophile film, it calculates the size of the activated area through the action that the pin acts onthe standard sample surface, then it fixed catalyst particles in the hydrophile area on the surface of the pin, finally, puts the pin which carries catalyst nano particles in the nano reactor and forms into nano tube.

Description

1. Technical field [0001] The invention relates to a method for preparing a nanotube probe tip, which belongs to the technical field of nanometer device manufacturing. 2. Background technology [0002] The atomic force microscope can detect the shape of atoms and molecules with high resolution, and determine the electrical, magnetic and mechanical properties of the surface of the object. conventional tools. The probe tip is a key part of the atomic force microscope, which directly determines the resolution of the microscope and affects various uses of the microscope. Scanning probes are usually prepared from semiconductor materials through sputtering deposition, etching and other processing procedures. The semiconductor materials used include silicon nitride, various doped single crystal silicon, etc. The probe is composed of a micro-cantilever and a needle tip, such as a strip-shaped cantilever, a "V"-shaped cantilever, etc. In addition to the irregular shape, the needle...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/38
Inventor 肖忠党巴龙蔡承志陆祖宏
Owner SOUTHEAST UNIV
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