882 results about "Active matter" patented technology

This invention provides an apparatus and method for injecting gas within a plasma reactor and tailoring the distribution of an active species generated by the remote plasma source over the substrate or wafer. The distribution may be made more or less uniform, wafer-edge concentrated, or wafer-center concentrated. A contoured plate or profiler is provided for modifying the distribution. The profiler is an axially symmetric plate, having a narrow top end and a wider bottom end, shaped to redistribute the gas flow incident upon it. The profiler is situated below an input port within the plasma reactor chamber and above the wafer. The method for tailoring the distribution of the active species over the substrate includes predetermining the profiler diameter and adjusting the profiler height over the substrate. A coaxial injector tube, for the concurrent injection of activated and non-activated gas species, allows gases (or gas mixtures) to be delivered in an axially symmetric manner whereby one gas can be excited in a high density RF plasma, while the other gas can be prevented from excitation and / or dissociation caused by exposure to the plasma or heated surfaces in the source apparatus. The gas admixture that is not to be excited or dissociated prior to contact with the wafer surface is shielded from direct exposure to the RF field surrounding the plasma confinement tube. The tube walls are also shielded from the infrared energy emitted from the plasma. The profiler is used in conjunction with the coaxial injector tube for redistributing the excited gases emerging from the injector tube, while allowing the non-excited gases to pass through its center.

A device to enhance the delivery of a drug or other substance of interest into a selected organ or tissue, comprising special electrodes, one of the electrodes carrying a container with the selected drug or other substance of interest, said electrodes being capable of being positioned at preselected locations of said organ or tissue, wherein the electrodes are all connected with a selected energy source which generates and maintains an energy field before and during the enhanced delivery of said substance, under the influence of which delivery is accomplished in a direction from the active to the passive electrode and into said organ or tissue. The energy source may be selected from suitable sources providing an electric field, a magnetic field, ultrasonic waves, high energy waves like laser beams, or a combination thereof. Further a method for the enhanced delivery of said drug or other substance of interest to an internal organ or target tissue of an organism, for example the brain, bypassing the blood-brain barrier, is disclosed.