The invention discloses a preparation method of a high-purity sphere-like nanometer AlN (aluminum
nitride) particle. The preparation method comprises the following steps of (1) weighing an Al2O3 (aluminum
oxide)
powder, soluble inorganic salt and a water-soluble organic precursor according to a
mass ratio, mixing, adding water, performing ball
grinding, spraying and granulating, so as to obtain amicrometer spherical particle; (2) synthesizing the
micrometer spherical particle by microwaves under the
nitrogen atmosphere in two stages, wherein in the first stage, the
room temperature is heatedto the temperature of 800 to 1200 DEG C at the heating speed of 0.1 to 5 DEG C / min, and the increased temperature is warmed; in the second stage, the temperature is increased to 1200 to 1800 DEG C atthe heating speed of 1 to 20 DEG C / min, and the increased temperature is warmed, so as to obtain the nanometer aluminum
nitride particle containing trace carbon; (3) decarbonizing the nanometer aluminum
nitride particle containing trace carbon under the CO2 (
carbon dioxide)
atmosphere, so as to obtain the high-purity sphere-like nanometer AlN particle. The preparation method has the advantages that the raw materials are wide and are easy to obtain, the equipment and technology are simpler, the cost is lower, and the preparation technology is especially suitable for industrialized production. The prepared AlN
powder has the advantages that the purity is high, the
particle size distribution range is broad, the specific surface area is high, and the like.