The invention discloses a Sense-Switch type pFLASH
unit structure with high power and low electric leakage, and belongs to the technical field of Flash type switch units. A deep N well is arranged ona substrate; an active region of a
programming / erasing
transistor T1 and an active region of a
signal transmission
transistor T2 are manufactured in the deep N well; a tunnel
oxide layer, a floating gate polycrystalline layer, an IPD polycrystalline
dielectric layer and a control gate polycrystalline layer are sequentially arranged on the deep N well; a side wall is arranged on the outer side of the control gate polycrystalline layer; an ILD
dielectric layer is arranged on the deep N well, and a
metal layer is arranged on the ILD
dielectric layer; the periphery of the tunnel
oxide layer is provided with an SAB
dielectric layer which is internally filled with
metal silicide, a through hole connecting structure penetrating through the ILD
dielectric layer is arranged above the
metal silicide, and the metal layer is in
ohmic contact with the
programming / erasing MOS
transistor T1 and the
signal transmission transistor T2 through the through hole connecting structure and the
metal silicide.The
static electricity leakage level of the Flash basic unit in the Flash type FPGA can be reduced, the current transmission capacity of the Flash type FPGA is improved, and a new thought is providedfor development of the Flash type FPGA with low
electricity leakage and high output power.