The invention discloses a process for improving the
adhesive force of a
coating layer, belongs to the technical field of vapor deposition, and aims to solve the problems that the existing
parylene coating layer is low in
adhesive force and easy to fall off due to non-uniform adhesion of a
coupling agent in the early stage and non-uniform thickness of the
coating layer during vapor deposition. Putting the workpiece into a
drying oven, and
drying and cleaning
water vapor adsorbed on the surface of the workpiece; putting the workpiece into an
evaporation reaction tank of a coating
machine; sealing the reaction tank, vacuumizing to adsorb the
silane coupling agent through the
sponge, putting the
sponge into the reaction tank, and carrying out
coupling agent
evaporation coating according to the requirements of a coating
machine; adding
parylene into the reaction tank, and carrying out vapor deposition to coat
parylene according to the requirements of a coating
machine; deflating the
system and taking out the workpiece. The
silane coupling agent is adsorbed through the
sponge, the distribution area is increased, steam is evenly distributed in the reaction tank cavity, the coupling agent is evenly coated on the surface of a workpiece in an
evaporation mode, then parylene is coated in a vapor deposition mode, and the
adhesive force of a coating layer is improved.