The invention discloses a
cantilever type end face coupler. The
cantilever type end face coupler comprises a
silicon substrate, a
buried oxide layer, a
silicon waveguide and a
silicon nitride waveguide; a groove having the first pre-set height is etched on the silicon substrate; the
buried oxide layer is formed on the upper surface of the silicon substrate; the
buried oxide layer comprises a flatplate layer and a
ridge type layer; the flat plate layer is formed on the upper surface of the silicon substrate; the
ridge type layer is formed on the upper surface of the flat plate layer, and horizontally extends out of the flat plate layer; the silicon
waveguide is formed in the buried
oxide layer, and positioned over the
ridge type layer; and the
silicon nitride waveguide is formed in the buried
oxide layer, and positioned over the silicon waveguide. The
cantilever type end face coupler in the invention has the benefits that: the ridge type buried
oxide layer is adopted; the end face coupler matched with the light-field speckle of a single-mode optical fibre is realized; the flat plate layer is used as the support structure of the cantilever type end face coupler; the
mechanical stability is ensured; the flat plate layer serves as the index-matching fluid; the dependence of the cantilever type end face coupler on the index-matching fluid is reduced; the
silicon nitride waveguide is used as the intermediate
transition layer; and thus, the
light field of the single-mode optical fibre can enter the silicon waveguide with the relatively high
coupling efficiency.