114 results about "Plasma diagnostics" patented technology

The new type compound probe is used to measure the parameter of plasma in high accuracy, real time and with certain space resolution, which belongs to the technical area of plasma diagnosis. The character is that installing Langmuir single probe and the difference emission probe into the same probe tube forms the compound probe. Measuring the parameter of plasma in high accuracy and real time is realized by combining following circuits and software. These circuits and software are: Langmuir single probe scanning circuit, the automatic follow circuit of the space electric potential for the difference emission probe, the pulse generating circuit of square wave, computer interface circuit as well as software for automatic collecting and analyzing data.

A method and apparatus to generate a beam of coherent light including x-rays or XUV by colliding a high-intensity laser pulse with an electron beam that is accelerated by a synchronized laser pulse. Applications include x-ray and EUV lithography, protein structural analysis, plasma diagnostics, x-ray diffraction, crack analysis, non-destructive testing, surface science and ultrafast science.

The invention belongs to the field of plasma diagnosis computer processing, in particular to a processing method and device for multi-channel energy spectrum measurement. The processing method includes the following steps: collecting a pulse signal sent by a probe and converting it into a digital pulse signal; counting and classifying the digitized pulse signal to obtain a count spectrum; converting the count spectrum into an energy spectrum; The energy attenuation produced by the beryllium foil is reduced, and the energy spectrum obtained in the third step is restored; the energy spectrum after reduction is smoothed and peaked and fitted to obtain the electron temperature. The processing device includes a pulse signal generation module, a high-speed acquisition card, an analog / digital signal conversion module, a high-speed cache module, and a processor unit with an energy counting module and a temperature calculation module. The problems of common multi-channel energy spectrum measurement and processing methods, such as high hardware cost, strong equipment specificity, limited number of energy channels, low spatial and temporal resolution, and inability to save original signals, are solved.

A laser system utilizing a fluid as the excitatory medium for stimulated light emission, wherein the fluid is supplied from a sorbent-based fluid storage and dispensing system coupled in fluid-supplying relationship with the laser apparatus. The laser may be an excimer laser utilizing as the laser working fluid a rare gas halide compound such as fluorides and / or chlorides of krypton, xenon and argon, as well as fluorine and / or chlorine per se. The laser system may alternatively be a far infrared gas laser utilizing a gas such as CO2, N2O, CD3OD, CH3OD, CH3OH, CH3NH2, C2H2F2, HCOOH, CD3I, CH3F, and C13H3F. Laser systems of the present invention may be utilized in applications such as materials processing, measurement and inspection, reading, writing, and recording of information, holography, communications, displays, spectroscopy and analytical chemistry, remote sensing, surveying, marking, and alignment, surgical and medical applications, plasma diagnostics, laser weaponry, laser-induced nuclear fusion, isotope enrichment and atomic physics.

A plasma diagnostic apparatus includes a vacuum chamber unit having at least one electrode and having plasma generated inside. A bias power unit is disposed inside the vacuum chamber unit to apply a radio frequency voltage to an electrode that supports a wafer. A spectrum unit decomposes light emitted from inside the plasma according to wavelengths. A light detection unit detects the light decomposed according to wavelengths. A control unit controls a turn-on and turn-off process of the light detection unit according to a waveform of the radio frequency voltage.

The invention discloses a Langmuir multi-probe control circuit used for plasma diagnosis and belongs to the technical field of plasma diagnosis. The control circuit is located outside a plasma device and comprises three Langmuir single-probes, an alternating-current sawtooth wave supply voltage generation device, a direct-current supply voltage generation device, a double-pole-double-throw switch, a reversing switch, a first double-pole-three-throw switch, a second double-pole-three-throw switch, a first single-pole-single-throw switch, a second single-pole-single-throw switch and a transform resistor. Selection of the Langmuir single-probes, a double-probe, and a three-probe in different diagnosis circuits is carried out through switching-over of the switches in control circuits, and a cleaning circuit is provided for cleaning of the probes. According to the Langmuir multi-probe control circuit used for the plasma diagnosis, similarities of three probe diagnosis methods on an experimental instrument are used, experimental cost can be saved, different methods can be used by switching-over of the control circuits due to the fact that difference of the three probe diagnosis methods are combined, convenience and high efficiency are achieved, experimental period is greatly shortened, and experimental results are enabled to be accurate due to the fact that the probes can be cleaned during experiment.

The invention relates to a surface electrification simulation test system and a method for satellite tail regions, and belongs to the test field. The system comprises a medium and low energy electronic gun, a three-dimensional transmission mechanism, a surface potentiometer, lamp filaments, a plasma diagnostic system, a Kaufmann ion source, a vacuum-pumping system, a vacuum chamber and a personal computer (PC). The method comprises that a satellite component is placed in the vacuum chamber to vacuumize the vacuum chamber; the Kaufmann ion source and the medium and low energy electronic gun are opened, and grid accelerating voltages, ion beams and electronic beams of the Kaufmann ion source and beam density and energy of the medium and low energy electronic gun are set; the plasma diagnostic system is used for diagnosing produced plasma environments; and the three-dimensional transmission mechanism drives the surface potentiometer to measure surface charging potentials in the satellite tail region. By means of the surface electrification simulation test system and the method for satellite tail regions, plasma environment simulation can be performed on satellite tail region environments, and the charging simulation test of the satellite component tail region can be performed.

A diagnosis system for pulsed plasma includes an optical emission sensor (OES) to receive light generated the pulsed plasma, the pulsed plasma having been generated in accordance with a pulse signal, a digitizer to synchronize the electrical signal with the pulse signal, and an analyzer to analyze the synchronized electrical signal.

The invention belongs to the technical field of plasma, and discloses a plasma diagnostic method of a multi-amplitude AC bias probe based on a data acquisition card. The plasma diagnostic method comprises the steps of: generating AC bias signals based on the data acquisition card, driving the signals via a power amplifier, and applying the signals to a probe in plasma through a sampling resistor, meanwhile, acquiring a voltage signal on the sampling resistor by means of a differential simulation input port of the data acquisition card commanded by a computer, sending the voltage signal to the computer, and converting the voltage signal into a current signal by the computer; and carrying out spectral analysis and least square method fitting, and further calculating to obtain an accurate electronic temperature value and an accurate ion density value. The plasma diagnostic method solves the problem that electronic temperature and ion density measured by adopting the existing fixed-amplitude AC bias probe diagnostic technique are inaccurate, can diagnose the plasma especially insulating deposition environment plasma, can automatically complete the plasma diagnosis process, and output the accurate electronic temperature and ion density values.

The invention discloses a plasma sheath ground simulation electromagnetic experiment device and an application method, and the experiment device comprises a plasma generator, a spray pipe and a plasmadiagnosis system; the plasma generator is used for ionizing a neutral gas to generate high-temperature plasma; the spray pipe is used for accelerating the plasma by utilizing an aerodynamic principleand shaping the cross section of the plasma jet flow in a vacuum dark chamber; and the plasma diagnosis system is used for diagnosing the electron density of the plasma jet flow in real time througha non-contact method and feeding back the electron density to a comprehensive controller, and the comprehensive controller compares the actually measured electron density with a preset electron density value, and the power supply output power of the plasma generator is adjusted through feedback to realize continuous and stable control of the electron density of plasma jet. The plasma jet flow generated by the invention is stable and controllable, the electron density range is wide, the collision frequency range is wide, the length is large, the components are pure, and the regulation and control of the non-uniform distribution of the plasma electron density can be realized.

The invention belongs to the technical field of plasma diagnostic, and concretely discloses a three-dimensional zonal current probe system. The invention comprises a 5 probe group, a first 6 probe group and a second 6 probe group, wherein, the 5 probe group arranged on a magnetic transmission mechanism of a controlled nuclear fusion research device has a two-combination three-step structure; the first 6 probe group arranged on an electric scan gas mechanism of the controlled nuclear fusion research device has a three-step structure; the second 6 probe group arranged on a fast pneumatic reciprocating scan mechanism of the controlled nuclear fusion research device has the three-step structure. The invention has the advantage that the probe group adopting the three-step structure can measure the three-dimensional structure and the distribution of various parameters of marginal plasma in radial direction, poleward direction and circumferential direction at the same time. A graphite probe head and a graphite protective sleeve adopt pyrolytic graphite. Metrical data is exact and reliable, and the service life of the probe group is enhanced. The invention can be used for measuring three-dimensional spatial-temporal distribution of the parameters of the marginal plasma in the controlled nuclear fusion research device.

The invention relates to a method and a device for preparing a hydroxyl radical solution, and belongs to the technical field of gas discharge physics and radical chemistry. The method comprises the following steps: switching on a power supply so that a feed gas enters an oxygen plasma producing source for ionization and dissociation to generate an oxygen plasma gas, then introducing a part of the oxygen plasma gas into an oxygen plasma gas concentration detector from the outlet of the oxygen plasma producing source, and introducing the rest oxygen plasma gas into a high-pressure jet device, wherein water is pumped into a filter, then flows into the high-pressure jet device to be subjected to gas-liquid mixed dissolution with the oxygen plasma gas which enters the high-pressure jet device and then flows into a gas-liquid separator for further mixed dissolution, and the oxygen plasma gas which is not dissolved in the water is thermally decomposed into oxygen by virtue of a rest gas remover to be discharged so as to generate the hydroxyl radical solution. The device is provided with the oxygen plasma producing source, the power supply, plasma diagnostic equipment, the oxygen plasma gas concentration detector, the gas-liquid high-pressure jet device, the filter, a pump, the gas-liquid separator, the rest gas remover, a total oxidant TRO detector and a main pipeline.

Methods for obtaining and analyzing data from a spectral source is provided. The method includes identifying an environment that is capable of generating spectral information, and obtaining the generated spectral information from the environment. The method further includes splitting the generated spectral information into a plurality of spectral data units. The spectral data units are further captured in separate storage entities and separately processed in parallel in order to produce a complete processing and quantification of the environment.

The invention provides a convex-and-concave probe and a plasma diagnosis method thereof. The convex-and-concave probe and the plasma diagnosis method are used for diagnosing plasma for acquiring accurate plasma spatial potential, electron density and electron energy distribution function. The convex-and-concave probe is characterized in that a convex probe, an insulating tube and a metal lead form a convex probe assembly; a concave probe, an insulating sleeve tube and a metal lead form a convex probe assembly; the convex probe assembly and the concave probe assembly form a convex-and-concave probe assembly; the convex-and-concave probe assembly comprises a split type and an integral telescoping type; and in plasma diagnosis, current changes of the convex probe and the concave probe along with scanning offset voltage are measured, and volt-ampere characteristic curves of the convex probe and the concave probe are obtained, and the electron energy distribution function is obtained by means of a formula. The convex-and-concave probe and the plasma diagnosis method thereof can accurately indicate the plasma spatial potential and determine the electron collection area of the convex probe, and furthermore realize more accurate electron density and electron energy distribution function. The convex-and-concave probe and the plasma diagnosis method thereof have advantages of least interference of the convex probe to the plasma, uniform current density and higher accuracy of the obtained electron energy distribution function.

The invention belongs to a nuclear fusion plasma diagnostic system, and particularly relates to a device and method for online cleaning of optical elements in a vacuum chamber on the basis of laser and optical technologies. The device comprises a pulse laser, a two-dimensional galvanometer system, a CCD camera, an auxiliary light source and a light path transmission system. The two-dimensional galvanometer system, a light beam conversion system, a two-color beam splitter, a fusion device diagnosis window, a first lens and a fusion device vacuum chamber are arranged along a straight line. The fusion device vacuum chamber is provided with the fusion device diagnosis window. The pulse laser is arranged on one side of the two-dimensional galvanometer system. The auxiliary light source is arranged on one side of the two-color beam splitter. The CCD camera is arranged on the outer side of the auxiliary light source. The method and system have the advantages that proper laser parameters are selected, interaction of laser and pollutants on the surface of the first mirror is utilized, thermal expansion is generated, explosion, gasification and evaporation are generated within a short period of time, and the pollutants are separated from the surface of the mirror to achieve the cleaning effect.

The invention relates to an aiming device and an aiming method of an X-ray optical system for plasma diagnosis. The device comprises an analog positioning assembly and an adjustment mechanism thereof. The analog positioning assembly comprises a positioning rod, an analog positioning member, a slider, a bracket, a linear guide rail and an objective lens group, wherein one end of the positioning rod is connected with the analog positioning member and the other end of the positioning rod is connected with the slider, the lower side of the bracket is provided with the linear guide rail and the upper side of the bracket is provided with the objective lens group, the slider is slidingly connected with the linear guide rail, and the bracket is connected with the adjustment mechanism. The method comprises the following steps: first, coincidence of the analog positioning member and a marking hole of a square-hole mesh is finished under surveillance of a tool microscope; then, an optimal object point of the system and an optimal field of view of the square-hole mesh are enabled to coincide with each other through an X-ray grid imaging experiment; and finally, the objective lens group and the bracket are solidified together by epoxy resin. Compared with the prior art, the collimation device and the collimation method have the advantages of high system reliability, high theoretical and practical aiming accuracy, simple structure, low cost and the like.

The invention discloses a real-time plasma configuration reconstructing system and a real-time plasma configuration reconstructing method for Tokamak. The real-time plasma configuration reconstructing system comprises a plasma diagnosis system, the plasma diagnosis system is connected with a real-time configuration acquiring industrial personal computer, and the real-time configuration acquiring industrial personal computer is provided with a data acquisition card and a corresponding reflection memory card. Plasma diagnosis signals of the plasma diagnosis system enters the data acquisition card of the real-time configuration acquiring industrial personal computer, a time sequence unifying system provides a unified time sequence signal which also enters the real-time configuration acquiring industrial personal computer, the real-time configuration acquiring industrial personal computer transmits numerical value information of the plasma diagnosis signals acquired by the data acquisition card to a reflection memory interchanger through the reflection memory card, the reflection memory interchanger synchronizes numerical values of the plasma diagnosis signals to a reflection memory card of a high-grade real-time configuration reconstructing work station, the high-grade real-time configuration reconstructing work station transmits calculated plasma configuration information to the reflection memory interchanger through the reflection memory card connected onto the high-grade real-time configuration reconstructing work station, and a configuration controls calculates according to the plasma configuration information.

The invention discloses a closed bomb vessel for plasma diagnosis. The closed bomb vessel comprises a combustion chamber, two closed devices, a plasma gas generation device, a pressure relief device and an optical visual window, wherein the combustion chamber is made of gun steel, the two closed devices are separately arranged on the two sides of the combustion chamber, the plasma gas generation device is arranged at one end of the combustion chamber and is also arranged inside the closed device at the end, the pressure relief device is arranged inside the closed device at the other end of the combustion chamber and is used for leading out a high-pressure gas in the closed bomb vessel, and the optical visual window is arranged at the top of the combustion chamber and is used for an operator to observe plasma distribution condition in the combustion chamber. By the closed bomb vessel, gunpowder can be detonated in a high-temperature and high-pressure closed environment, and plasma generated after explosion is collected; thermal ionization plasma is diagnosed by a spectroscopy method, the quality of gunpowder is adjusted, and thus, the plasma density is regulated; and the adjustment is accurate and rapid, and the maneuverability is high.

The invention discloses a vacuum discharge plasma parameter measuring device and method, falling in the technical field of plasma diagnosis. The invention is characterized by adopting a grid, to which a negative potential is applied, to control plasma. The device structurally comprises the grid, a first probe and a second probe sequentially mounted on a plasma transmission channel. The grid is connected with a control signal generator, the first probe is connected with the common node of a direct current power supply DC1and a capacitor C1, and the second probe is connected with the common node of a direct current power supply DC2 and a capacitor C2. The invention can perform diagnosis on characteristics of plasma generated by discharge of a single pulse or continuous pulses and distributed in different spaces or at different time points; can realize on / off control on the plasma by applying a proper barrier potential; facilitates analysis of transmission characteristics of the plasma in a space; and has the characteristics of simple structure, high measurement precision and strong interference resistance.

An example embodiment relates to a plasma diagnostic apparatus that exists outside of a plasma generation chamber. The plasma diagnostic apparatus is configured to recognize and / or diagnose a state of plasma using a signal flowing from a floated electrode of a plasma generation apparatus to determine a diagnostic factor of the plasma.

A compact, high repetition rate, extreme ultraviolet / soft x-ray laser and method for generating such radiation are described. Excitation of the gaseous or vaporous lasing medium is achieved by discharging energy stored in a solid-dielectric capacitive device through a capillary channel containing the medium. By reducing the inductance of the discharge apparatus, excitation of the laser medium can be achieved without the use of Marx generators. Neon-like Ar atom laser pulses at 46.9 nm having energies of about 13 μJ are generated at repetition rates up to 12 Hz. Between 2 and 3×104 laser shots can be generated using a single capillary. Such a source of intense, short-wavelength radiation can be used for applications which include surface characterization of materials, high resolution imaging and printing, photochemistry and photophysics, laser ablation, characterization of x-ray optics, and dense plasma diagnostics.

Provided is a plasma diagnostic apparatus includes a probe unit, which is inserted into a plasma or disposed at boundary of a plasma, the apparatus includes: a signal supplying unit having a signal supplying source; a current detecting / voltage converting unit for applying a periodic voltage signal applied from the signal supplying unit to the probe unit, detecting the magnitude of the current flowing through the probe unit, and converting the detected current into a voltage; and a by-frequency measurement unit for computing the magnitude and phase of individual frequency components of the current flowing through the probe unit by receiving the voltage output from the current detecting / voltage converting unit as an input.

The invention discloses a method for manufacturing a variable-pitch optical grating and relates to the technical field of spectrums. The method for manufacturing the variable-pitch optical grating solves the problems that according to an existing method adopting hot melting, the technological conditions are hard to control, collapse of a photoresist etching groove is caused easily, and the technical indexes of an optical grating are affected seriously. The method for manufacturing the variable-pitch optical grating comprises the steps of washing of a substrate, photoresist evening, prebaking, exposure, developing, postbaking, ion beam etching, cleaning and film coating. According to the technological process for manufacturing the variable-pitch optical grating, cost is low, the method is easy to implement, cost is reduced greatly, and the manufacturing cycle is shortened. Due to the fact that the variable-pitch optical grating has the increasingly outstanding unique advantages of aberration correction, high resolution and flat focus field, the variable-pitch optical grating is widely applied in the fields such as the spatial spectrograph field, the plasma diagnosis field, the synchrotron radiation monochrometer field and the optical fiber communication field.

The invention relates to a method for measuring the non-extensive parameters of plasma electrons. According to the method, the non-extensive parameters of plasmas are measured by adopting non-extensive statistical mechanics and an electric probe; the plasmas are described by the non-extensive statistical mechanics, and a non-extensive electric single probe (measurement) theory is established on the basis of the non-extensive statistical mechanics; and electronic non-extensive parameters which cannot be measured by a traditional electric single probe are measured by applying the non-extensive electric single probe; and electronic temperature, plasma potential, electron density and suspension potential which are more accurate than those obtained by the traditional single probe are obtained.With the method provided by the technical schemes of the invention adopted, the non-extensive electric probe plays a role in plasma diagnosis, the non-extensive performance of the plasmas is measured,and the diagnosis precision of other plasma parameters is improved.

The invention discloses an enthalpy probe for diagnosing a thermal plasma, which comprises an outer tube, a water in and water out separation tube, an inner tube and a first base, a second base and a third base, wherein the first base, the second base and the third base are all cylinders and hermetically welded together end to end, and the water in and water out separation tube is located between the inner tube and the outer tube and respectively provided with gaps with the inner tube and the outer tube to respectively form a water inlet passage and a water outlet passage; the ends of the outer tube, the water in and water out separation tube and the inner tube are respectively hermetically welded on the inner walls of the first base, the second base and the third base, and the inner tube is communicated with the third base to form an air pumping and sampling passage; the lateral walls of the first base and the second base are respectively provided with a water inlet and a water outlet, and the water inlet passage and the water outlet passage are respectively provided with a water inlet temperature measurement platinum resistor and a water outlet temperature measurement platinum resistor; an air pumping and sampling temperature measurement platinum resistor is arranged inside the third base; and a corundum outer cover is arranged outside the outer tube, and the end of the corundum outer cover is hemispherical. The invention is easy and simple to handle and convenient to disassemble, poor working conditions and high temperature resistance property are considered both in the material selection and the design, and the interference on the plasma can be reduced during the measurement.

The invention provides a method to design an active species diagnostic apparatus for high-air pressure plasm, and its character: it combines molecular beam sampling and mass spectrum techniques, adopts three-stage molecular pump to differentially pump air and at the same time adopt two-stage liquid nitrogen absorbing pump to further enhance the background vacuum, reducing the loss of active species, in addition adopt the beam split technique and combine with phase locked amplifier, enhancing the signal-noise ratio of system. It overcomes the disadvantage that the routine mass spectrum can detect the active species only at low air pressure, and has the advantages of wide working air pressure range, high detecting sensitivity, primarily obtaining full spectrum chart, etc.

Provided is a plasma diagnostic apparatus having a probe unit, which is inserted into a plasma or disposed at boundary of a plasma, the apparatus including: a signal supplying unit having a signal supplying source; a current detecting / voltage converting unit for applying a periodic voltage signal applied from the signal supplying unit to the probe unit, detecting the magnitude of the current flowing through the probe unit, and converting the detected current into a voltage; and a by-frequency measurement unit for computing the magnitude and phase of individual frequency components of the current flowing through the probe unit by receiving the voltage output from the current detecting / voltage converting unit as an input.

The invention relates to an aiming device for a microscope for plasma diagnosis and a use method thereof. The aiming device comprises a line gatherer, a plane mirror, a luminous source, a glass plate and a grid plate. The line gatherer is connected with a short connecting pipe arranged on a vacuum pipeline through a flange piece, the plane mirror is arranged in the vacuum pipeline and connected with the line gatherer capable of driving the plane mirror to lead in and lead out, the grid plate is adhered to the glass plate, and the glass plate with the grid plate is arranged at one end of a long connecting pipe communicated with the vacuum pipeline and fixed through a flange cover. According to the method, a reverse imaging method is adopted, an image distance of an image system is first determined, and an object point is located through the microscope with small depth of field. Compared with the prior art, the aiming device and the use method of the aiming device have the advantages that a device structure is simple, a use method is easy, aiming precision is high, normal work of other diagnosis devices in a strong-laser device target cavity can not be affected and the like.

A compact, high repetition rate, extreme ultraviolet / soft x-ray laser and method for generating such radiation are described. Excitation of the gaseous or vaporous lasing medium is achieved by discharging energy stored in a solid-dielectric capacitive device through a capillary channel containing the medium. By reducing the inductance of the discharge apparatus, excitation of the laser medium can be achieved without the use of Marx generators. Neon-like Ar atom laser pulses at 46.9 nm having energies of about 13 μJ are generated at repetition rates up to 12 Hz. Between 2 and 3×104 laser shots can be generated using a single capillary. Such a source of intense, short-wavelength radiation can be used for applications which include surface characterization of materials, high resolution imaging and printing, photochemistry and photophysics, laser ablation, characterization of x-ray optics, and dense plasma diagnostics.