A
parallel plate type
plasma processing apparatus including a RF feed rod for applying a
high frequency power to a
susceptor and a temperature detection unit for detecting the temperature of a substrate on the
susceptor is configured to reduce an effect that
high frequency current flowing in the RF feed rod has on temperature detection of the temperature detection unit. A surface portion of the
susceptor serves as a mounting unit including an electrostatic chuck and a heater. A shaft, which is a protection
pipe extracted downward from the
processing chamber, is provided under the mounting unit. A chuck
electrode of the electrostatic chuck serves as an
electrode for applying a
high frequency voltage. Provided in the shaft are two RF feed rod for supplying a power to the
electrode and an
optical fiber, i.e., a temperature detection unit, having a
dielectric fluorescent material is disposed in a leading end thereof. Then, the two RF feed rods and bar type conductive leads for the heater are alternately arranged at equal intervals in a circumferential direction on a circle having the
optical fiber at the center thereof such that the region having therein the
optical fiber is an electromagnetic wave-free region since the
electric force lines respectively traveling from the RF feed rods to bar type conductive leads are offset with each other.