Langmuir multi-probe control circuit used for plasma diagnosis

Abstract

The invention discloses a Langmuir multi-probe control circuit used for plasma diagnosis and belongs to the technical field of plasma diagnosis. The control circuit is located outside a plasma device and comprises three Langmuir single-probes, an alternating-current sawtooth wave supply voltage generation device, a direct-current supply voltage generation device, a double-pole-double-throw switch, a reversing switch, a first double-pole-three-throw switch, a second double-pole-three-throw switch, a first single-pole-single-throw switch, a second single-pole-single-throw switch and a transform resistor. Selection of the Langmuir single-probes, a double-probe, and a three-probe in different diagnosis circuits is carried out through switching-over of the switches in control circuits, and a cleaning circuit is provided for cleaning of the probes. According to the Langmuir multi-probe control circuit used for the plasma diagnosis, similarities of three probe diagnosis methods on an experimental instrument are used, experimental cost can be saved, different methods can be used by switching-over of the control circuits due to the fact that difference of the three probe diagnosis methods are combined, convenience and high efficiency are achieved, experimental period is greatly shortened, and experimental results are enabled to be accurate due to the fact that the probes can be cleaned during experiment.

Description

technical field [0001] The invention belongs to the technical field of plasma diagnosis and relates to a contact diagnosis method, in particular to a Langmuir multi-probe control circuit for plasma diagnosis. Background technique [0002] Plasma diagnosis is divided into two types: contact and non-contact. Langmuir probe technology belongs to a kind of contact measurement and is the earliest effective tool used in plasma diagnosis. [0003] During 1923-1935, Langmuir (Langmuir) used the electrostatic probe to diagnose plasma for the first time, developed basic methods and theories, and made a lot of pioneering research work on probe technology, so the electrostatic probe is called Langmuir probe . An electrostatic probe is a conductor that protrudes into the plasma. It can have various shapes and sizes, depending on the specific experimental requirements. The most commonly used shapes are spherical, cylindrical and flat. The materials used to make the probe are generally T...

AI Technical Summary

Problems solved by technology

This analysis and calculation process is very complex, with a large amount of data, and requires rich experience. It is only suitable for the measurement of steady-state plasma parameters, and there are certain limitations in the measurement of instantaneous discharge plasma parameters.

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