The invention discloses an evaporation source device. The evaporation source device comprises a crucible, a coil, a buoyancy ring and an evaporation interface heating device, wherein the coil surrounds outside the crucible, a cylindrical hollow bulge is arranged in the middle of the crucible, the bulge is internally provided with an iron core, the buoyancy ring is of a hollow annular structure and sheaths on the bulge in the middle of the crucible, the evaporation interface heating device comprises a plurality of concentric annulus heating sheets, the iron flake of each annulus heating sheet is wrapped by ceramic, and the evaporation interface heating device sheaths on the bulge in the middle of the crucible and is arranged on the buoyancy ring. The evaporation source device heats by induction eddy, so that on the one hand, on even ground, stabilization time of evaporation rate can be remarkably shortened; on the other hand, the evaporation interface can be directly heated at real time so as to supplement heat taken away by evaporation, thus being beneficial to improving evaporation rate and evaporation stability and being easy to form uniform coating films.