The invention relates to the technical field of preparation of films and coatings, particularly to a compact and efficient
cold cathode arc source of a quasi
diffusion arc. The
cold cathode arc source is composed of an arc source head and a control
magnetic field group, wherein the arc source head comprises a target, a target base, a target base shielding cover, a target base plate, an arc striking device and a permanent
magnet device; the control
magnetic field group comprises a
flange sleeve, a
flange sleeve insulating bush, a dipolar radial rotating magnetic filed generating device, an axial focusing guiding
magnetic field generating device, a coaxial focusing magnetic field magnetic yoke and a
flange sleeve shielding cover; and the arc source head is connected with the bottom of the flange sleeve through the target base plate to form a whole arc
source structure, and connected with a finance through a flange arranged in front of the flange sleeve. Arc spots are distributed on the whole
target surface under the comprehensive action of a certain magnetic
field intensity and rotary frequency, the
power density of the arc spots is reduced, the quasi
diffusion arc state is achieved, launch of large grains is reduced, simultaneously, purified high-density plasmas are extracted through the axial focusing guiding magnetic field, and the transmission efficiency is improved.