Redundant drive planar motion platform applied to optoelectronic packaging
A motion platform and planar motion technology, which is applied in the direction of circuits, electrical components, sustainable manufacturing/processing, etc., can solve problems such as increasing the load of linear motors, the impact of motion speed, acceleration, and start-stop accuracy, and reducing the efficiency and accuracy of optoelectronic packaging. , to achieve the effect of improving efficiency and precision, small size and high acceleration
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[0021] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0022] like figure 1 As shown, according to one aspect of the present invention, a redundantly driven planar motion platform applied to optoelectronic packaging is provided, including: an object stage 10 and symmetrically arranged on the object stage 10 along the first direction and the second direction, respectively. Linear motors 20 on both sides; the linear motors 20 arranged symmetrically on both sides of the stage 10 along the first direction are used to drive the stage 10 to move along the second direction; arranged symmetrically along the second direction The linear motors 20 on both sides of the object stage 10 are used to drive the object stage 10 to move along a...
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