The invention relates to a
copper substrate-based
nitride LED vertical
chip and a preparation method thereof. The
copper substrate-based
nitride LED vertical
chip comprises an n-type
electrode, a two-dimensional derived film, a
nitride epitaxial layer and a p-type
electrode, wherein the two-dimensional derived film is attached onto the n-type
electrode; the nitride epitaxial layer is attached onto the two-dimensional derived film; the p-type electrode is attached onto the nitride epitaxial layer. The preparation method for the
copper substrate-based nitride LED vertical
chip comprises the following steps: after a
copper substrate-based nitride LED epitaxial
wafer is prepared, piercing a hole from the back surface of a
copper substrate to a buffer layer or an n-type
electron injection layer by using a hole piercing process; manufacturing a
metal channel structure for realizing the contact with the n-type
electron injection layer, and simultaneously realizing the conduction between the n-type
electron injection layer and the
copper substrate; manufacturing the p-type electrode on the top of a p-type cavity injection layer. The nitride LED vertical chip disclosed by the invention has the characteristics of better current expanding, lower
thermal resistance, higher reliability and the like, and is very suitable for the application directions of
high current density driving and high
optical power density output.