A rubber composition which comprises (a) a crosslinkable fluororubber, (b) a reactive
fluorine-containing compound (except the crosslinkable fluororubber (a)) having a
divalent perfluoropolyether structure or
divalent perfluoroalkylene structure and containing, in the terminal or a
side chain thereof, two or more of alkenyl groups capable of conducting an
addition reaction at least with a hydroxyl group in the following organic
silicon compound (c), and (c) a reactive organic
silicon compound having two or more of hydroxyl groups in the molecule thereof and being capable of conducting an
addition reaction with an alkenyl group in the above compound (b), in such amounts wherein the total amount of (b) and (c) is 1 to 10 parts by weight relative to 100 parts by weight of said rubber (a), and further comprises a vulcanizing agent and optionally a co-crosslinking agent; and a sealing agent for a
plasma treatment device, which is produced by subjecting said composition to the primary
vulcanization and forming, and then subjecting unreacted components in the
resultant formed article to the secondary
vulcanization in a vacuum oven, to thereby reduce the amount of a gas which is an unreacted component and may be discharged. The above sealing agent for a
plasma treatment device is less prone to cause the stick or adhesion onto a
mating member, is free from the problem of generation of particles and from the
contamination by a discharged gas, even in the case of
continuous use for a long period of time at a high temperature, in particular, in a
semiconductor manufacturing process or the like, and can be produced at a low cost.