3610results about How to "Adjustable temperature" patented technology

A gas chamber contains upper and lower chamber bodies forming a cavity, a heating chuck for a wafer, a remote gas source, and an exhaust unit. Gas is injected into the cavity through channels in an injector. Each channel has sections that are bent with respect to each other at a sufficient angle to substantially eliminate entering light rays entering the channel from exiting the channel without reflection. The channels have funnel-shaped nozzles at end points proximate to the chuck. The injector also has thermal expansion relief slots and small gaps between the injector and mating surfaces of the chamber and gas source. The temperature of the injector is controlled by a cooling liquid in cooling channels and electrical heaters in receptacles of the injector. The upper chamber body is funnel-shaped and curves downward at an end of the upper chamber body proximate to the chuck.

Methods for loading a compressed fluid, such as natural gas, into and discharging the compressed fluid out of containment are provided. The compressed fluid is injected into a bottom portion of a container system for storage and / or transport until a target pressure is reached after which gas is withdrawn from an upper portion of the container system at a rate to maintain the target pressure while the compressed fluid is injected in the bottom portion. The compressed fluid is cooled through an expansion valve and by refrigerated chillers or by injecting a cold liquid of the same chemical composition as the compressed fluid, such as liquid natural gas, into the compressed fluid prior to injection into the container system. Withdrawal or discharge from the container system to a receiving facility begins with blow down from the bottom portion of the container system without a displacement fluid and continues until pressure falls below an acceptable differential pressure. The discharge stream is passed through a separator and a light gas from the separator is pressurized and injected into an upper portion of the container system to drive the compressed fluid out the bottom. The light gas is pressurized using either a compressor or a heated tank system, where two vessels operate in parallel, trapping and heating the light gas and then discharging to the container system from one while filling the other and alternating the operation between the two.

A battery housing structure, in an electric vehicle, is operable to regulate a temperature of a battery disposed between front and rear wheels of the vehicle. The battery housing structure includes a main housing body for receiving the battery, inlet and outlet ports for respectively supplying air to and discharging air from the main housing body; and a fan for discharging air from the main housing body. A bypass passage is provided in the battery housing structure for selectively connecting a downstream side of the fan with the inlet ports. First and second air flow control valves are also provided in the battery housing structure for selectively controlling and routing the flow of air within the battery housing structure.