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CMP pad conditioner having working surface inclined in radially outer portion

A CMP pad conditioner including: (a) a disk-shaped substrate having a working surface which is provided by one of its axially opposite end surfaces and which is to be brought into contact with the CMP pad; and (b) abrasive grains which are fixed to the working surface. The substrate includes a radially inner portion and a radially outer portion which is located radially outwardly of the radially inner portion. The working surface in the radially outer portion is inclined with respect to the working surface in the radially inner portion, such that a thickness of the radially outer portion as measured in an axial direction of the substrate is reduced as viewed in a direction away from an axis of the substrate toward a periphery of the substrate. A ratio of an outside diameter of the radially inner portion to an outside diameter of the substrate is 60-85%.
Owner:NORITAKE CO LTD +1

Kingdon mass spectrometer with cylindrical electrodes

The invention relates to measuring devices of an electrostatic Fourier transform mass spectrometer and measurement methods for the acquisition of mass spectra with high mass resolution. The measuring device includes electrostatic measuring cells according to the Kingdon principle, in which ions can, when appropriate voltages are applied, orbit on circular trajectories around the cylinder axis between two concentric cylindrical surfaces, which are composed of specially shaped sheath electrodes, insulated from each other by parabolic gaps, and can harmonically oscillate in the axial direction, independently of their orbiting motion. In the longitudinal direction, the two cylindrical surfaces of the measuring cell are divided by the parabolic separating gaps into different types of double-angled and tetragonal sheath electrode segments. Appropriate voltages at the sheath electrode segments generate a potential distribution between the two concentric cylindrical surfaces which forms a parabolic potential well in the axial direction for orbiting ions. The ion clouds oscillating harmonically in the axial direction in this potential well induce image currents in suitable electrodes, from which the oscillation frequencies can be determined by Fourier analyses.
Owner:BRUKER DALTONIK GMBH & CO KG
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