245987 results about "Manufacturing engineering" patented technology

The present invention relates to an apparatus and method for processing the flow of semiconductor wafers through a furnace tool having a front-opening unified pod (FOUP) material handling system. The invention provides for an automated control flow to realize greater efficiency and assure process quality. In one aspect of the invention the wafer batch completing its operation is discharged simultaneous with the charging of the next batch. Essentially the operation takes place by overlapping processing operations. An embodiment of the invention includes a process comprising the steps of: providing a first batch of semiconductor material, and loading the first batch into a carrier which transports the first batch into a semiconductor manufacturing process, and while the first batch undergoes the process, forming a second batch of semiconductor material, and pausing a second batch process operation until the first batch completes processing, to reduce the idle time of said process.

A variety of process modules are described for use in semiconductor manufacturing processes.

A semiconductor production system has a semiconductor manufacturing apparatus having an exposure unit, a control unit for controlling the exposure unit and a storage device; a semiconductor inspection apparatus having an observation unit, a control unit for controlling the observation unit and a storage device; and a storage device commonly used by the semiconductor manufacturing apparatus and the semiconductor inspection apparatus. The manufacturing apparatus, the inspection apparatus and the commonly used storage device are interconnected via a storage area network. With the semiconductor manufacturing apparatus and the storage device linked together via the storage area network, a large volume of image data or design data can be communicated at high speed, thus improving the system throughput.

A thermal control device for wafer processing which comprises a) a platform for placement of an object of various sizes to be heated, b) at least a shaft extending substantially transverse to the platform; and c) a plurality of resistance heating elements patterned in a plurality of circuits defining at least one zone for independent controlled heating of objects of varying sizes on the platform.

A process and apparatus for free form fabrication of a three-dimensional work piece comprising (a) feeding raw material in a solid state to a first predetermined location; (b) depositing the raw material onto a substrate as a molten pool deposit under a first processing condition; (c) monitoring the molten pool deposit for a preselected condition; (d) comparing information about the preselected condition of the monitored molten pool deposit with a predetermined desired value for the preselected condition of the monitored molten pool deposit; (e) solidifying the molten pool deposit; (f) automatically altering the first processing condition to a different processing condition based upon information obtained from the comparing step (d); and repeating steps (a) through (f) at one or more second locations for building up layer by layer a three-dimensional work piece. The apparatus is characterized by a detector that monitors a preselected condition of the deposited material and a closed loop electronic control device for controlling operation of one or more components of the apparatus in response to a detected condition by the detector.

A quality prognostics system and a quality prognostics method for predicting the product quality during manufacturing processes are disclosed. The present invention utilizes the current production tool parameters sensed during the manufacturing process and several previous quality data collected from the measurement tool to predict the future product quality. The quality prognostics system is composed of conjecture modeling means and prediction modeling means. The conjecture modeling means itself also can be applied for the purpose of virtual metrology. Further, the quality prognostics method possesses a self-searching means and a self-adjusting means for searching the best combination of various parameters/functions used by the conjecture algorithm or prediction algorithm; and meeting the requirements of new equipment parameters and conjecture/prediction accuracy.

PCT No. PCT/EP95/03289 Sec. 371 Date Dec. 10, 1998 Sec. 102(e) Date Dec. 10, 1998 PCT Filed Aug. 18, 1995 PCT Pub. No. WO97/07472 PCT Pub. Date Feb. 27, 1997The inventive concept comprises a system platform for a synergistic, role modular work process environment. A work process object (WPO) (1001) is created, residing in a data base, and stored in a memory of the process and project management computer system (1030). All data concerning the process and project management are reported to said work process object (WPO) (1001) and said work process object (WPO) (1001) is used as a common data base. According to the inventive concept, each view must be supported by a specific workplace, represented by digital data and enforcing the rules for the specific role. A work process information model supports the dynamic definition and use of a data base object representing a work process, boch in its process and project planning modes and its execution. According to the inventive concept, one object supports simultaneously all modes delimited by dynamically moving boundaries. Workplace implementation enforces over-all rules for each role in the inventive system.

RFID tags attached to a product contain information regarding the product and communicate this information to a reader. This information can include the age of the product, the amount of product left and preparation or care instructions for the product. To record the age of a product, a timer is initiated in the RFID tag. Thereafter, the elapsed time on the timer can be read and displayed by the reader. For other products, the RFID tag can have contacts monitoring the level of remaining product. Once the contacts sense that the amount of product is low, this information can be transmitted and communicated by the reader. Preparation and care instructions are prerecorded on the tag. Instructions can also be communicated between a product and a base, such as a heater.

PCT No. PCT/AU96/00144 Sec. 371 Date Jan. 12, 1998 Sec. 102(e) Date Jan. 12, 1998 PCT Filed Mar. 15, 1996 PCT Pub. No. WO96/28236 PCT Pub. Date Sep. 19, 1996A method and apparatus for determining the fouling effect of a feedstream on a filter having known characteristics disclosed. The method comprises passing the feedstream through a filter (5) having known characteristics; determining the change in resistance to flow of the feedstream across the filter, either continuously or over a number of time intervals and from this data, calculating a feed fouling index (FFI) representative of the fouling characteristics of the feedstream with respect to the filter. A method and apparatus for monitoring the operation of a filtration system is also disclosed the method comprising sampling system parameter values at selected locations within the filtration system at a predetermined sampling rate; generating a parameter profile characteristic from the sampled parameter values at predetermined intervals of time; and analysing the parameter profile characteristic to determine correct operation of the filtration system. A further method and apparatus of monitoring and controlling a filtering system based on backwash efficiency is also disclosed, the method comprising determining resistance values of filtering elements used in the filtering system at predetermined times during the backwash cycle of the system by monitoring a number of operating parameters of the system; calculating a backwash efficiency value representative of the efficiency of the backwash cycle of the filtering system using the resistance values determined; and controlling the operation of the filtering system in dependence on the value of the backwash efficiency calculated.

Surface coverings, such as floor coverings, with an interlocking design are described. Methods of making the surface coverings are further described.

A panel, in particular a flooring panel, of a wood material which is provided with a mechanism for the detachable connection of a least two panels, whereby form-fitting elements for locking in the vertical direction and in the horizontal direction with another panel are embodied on at least one lateral edge of a first panel, whereby a chamfer is embodied on at least one lateral edge starting from an upper side. The chamfer or the form-fitting elements are coated or impregnated with at least one melamine layer.

Methods and substrate processing systems for analyzing an end point of a process are provided. By-products of the process are detected and monitored to determine the completion of various types of reaction processes within a substrate processing chamber. The methods provide real time process monitoring, thereby reducing the need to rigidly constrain other substrate processing parameters, increasing chamber cleaning efficiency, and/or increasing substrate processing throughput.

A method of conditioning a processing chamber for a production process includes performing a conditioning step at a conditioning process recipe substantially different than a process recipe of the production process, and performing a warm-up process at a warm-up process recipe substantially the same as the process recipe of the production process. The method can be performed after a wet-cleaning process has been performed. The conditioning procedure can allow the maintenance time to be decreased and can cause the etched features to be more accurate.