The invention relates to a heating electrode material for phase varying memory and the preparing method thereof, where the heating electrode material is a heating electrode material at least containing Ge element whose general formula is one of GexWyN1-x-y, GexTiyN1-x-y, GexWyO1-x-y and GexTiyO1-x-y, where x and y are atomic percents of elements and 0<x<=1, 0<=y<1, and 0<x+y<=1; the preparing method adopts any one of the processes: sputtering, evaporating, atomic layer deposition, chemical vapour deposition, and metallic organic matter thermal decomposition or laser auxiliary deposition, and as compared with traditional heating electrode materials such as W, TiN, TiON and TiAlN, the Ge-base heating electrode material of the invention has advantages of adhesive property to phase varying material, high resistance, etc, able to raise heating efficiency of devices and reduce device power losses.