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Phase change film material of silicon-adulterated sulfur series for phase change memory

A phase-change memory and chalcogenide technology, which is applied in the field of materials in the field of microelectronics, can solve problems such as affecting the contact between phase-change films and electrodes or other film layers, affecting device stability, and detrimental device operation, and reducing write Operating current, improved life, good energy transfer effect

Inactive Publication Date: 2008-01-09
SHANGHAI JIAO TONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In this process, the thickness of the phase change film will change, if the change is too large, it will affect the contact between the phase change film and electrodes or other film layers, thus affecting the stability of the device
Commonly used Ge 2 Sb 2 Te 5 The thickness of the film varies greatly between the amorphous state and the crystalline state, which is not conducive to the long-term stable operation of the device

Method used

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  • Phase change film material of silicon-adulterated sulfur series for phase change memory
  • Phase change film material of silicon-adulterated sulfur series for phase change memory
  • Phase change film material of silicon-adulterated sulfur series for phase change memory

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Embodiment 1

[0026] The phase change material series is Si doped into Te a Ge b Sb 100-(a+b) Alloy Si-doped Ge-Sb-Te films. The ranges of parameters a and b are proposed with reference to the parameter ranges of the patents of S.R.Ovshinsky et al. on phase change memory. Figure 2 shows Si-doped Ge obtained with different Si doping amounts 2 Sb 2 Te 5 Thin films and commonly used Ge 2 Sb 2 Te 5 The relationship between film resistivity and annealing temperature. At a temperature of 160°C and below, all films are in an amorphous state, and the film resistance is in a high resistance state. As the annealing temperature increases, the film begins to crystallize, and the film resistivity begins to decrease. When the film is crystallized, the film resistance is in a low resistance state. This process is realized in the device by heating the phase-change film with electric pulses, and the reversible transition between the high-resistance state and the low-resistance state can be achieve...

Embodiment 2

[0033] The phase change material series is a Si-Sb-Te alloy film formed by completely replacing the Ge element in the Ge-Sb-Te alloy with Si element. Fig. 4 is Si-Sb-Te chalcogenide film of the present invention and commonly used Ge 2 Sb 2 Te 5 The relationship between film resistivity and annealing temperature. At a temperature of 160°C and below, all films are in an amorphous state, and the film resistance is in a high resistance state. As the annealing temperature increases, the film begins to crystallize, and the film resistivity begins to decrease. When the film is crystallized, the film resistance is in a low resistance state. This process is realized in the device by heating the phase-change film with electric pulses, and the reversible transition between the high-resistance state and the low-resistance state can be achieved by applying different electric pulses. Si-Sb-Te alloy thin films compared with commonly used Ge 2 Sb 2 Te 5 thin film, its amorphous resisti...

Embodiment 3

[0042] Both Ge element and Si element are group IV elements and have the same valence in the alloy, so the element Si can partially or even completely replace the Ge element in the Ge-Sb-Te alloy. When the Si element completely replaces the Ge element, it forms an implementation Si-Sb-Te alloy thin films described in Example 2. Si elements partially replace Te a Ge b Sb 100-(a+b) The Ge element in the alloy can form Te a Ge b-c Si c Sb 100-(a+b) alloy film. With reference to the experimental results of Example 1 and Example 2, it can be seen that the partial replacement of Ge elements by Si elements can still achieve the following effects: (1) improve the amorphous / crystalline resistance change rate of the film, thereby improving the on / off of the device Compare. (2) At the same time, the crystalline resistance of the thin film is appropriately increased, so as to achieve the purpose of reducing the writing operation current. (3) Lower the melting point of the film. ...

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Abstract

The invention is concerned with a kind of phase change film material with chalcogenide in silicon series for phase change storage, belonging to micro-electronics technology field. Si element takes place of Ge element of TeaGebSb100-(a+b) alloy to form TeaGeb-cSicSb100-(a+b) alloy film, and a is from 48 to 60, b is from 8 to 40, the replace scalar c of Si is from 1 to 40 atom percent. This invention has higher crystal resistance than common Ge2Sb2Te5 phase change film, and more higher amorphous / crystalline state change ratio of resistance and more lower amorphous / crystalline state film thickness change ratio and lower melting point. This kind of storage has more higher open / close ratio and stability of piece to reduce writing current of storage and get storage multi-value with higher density.

Description

[0001] The present invention is based on the patent application number: 200510028671.X, the patent application name is: "silicon-containing series chalcogenide phase change thin film material for phase change memory", the patent applicant is: Shanghai Jiaotong University, silicon storage technology company, The patent application date is: a patent divisional application on August 11, 2005. technical field [0002] The invention relates to a material in the technical field of microelectronics, in particular to a silicon-containing series chalcogenide phase-change thin film material used for a phase-change memory. Background technique [0003] The basic principle of phase change memory technology is to use phase change thin film material as storage medium. The resistivity of phase change thin film is very different between amorphous state and crystalline state. Using programmed electric pulse can make phase change thin film in amorphous state The reversible conversion between ...

Claims

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Application Information

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IPC IPC(8): H01L45/00G11C11/56G11B7/243C22C29/00G03C1/705G11B7/2433
Inventor 冯洁乔保卫赖云峰蔡炳初陈邦明
Owner SHANGHAI JIAO TONG UNIV
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