The invention discloses a solid thin film electrolyte material and a preparation method thereof. The solid thin film electrolyte material has a structure as shown in the formula: Li-(Mn1-Xm1x)-(Til-yM2y)-O, wherein, 0<=x<=1, 0<=y<=1, M1 is selected from at least one of La, Sr, Na, Nd, Pr, Sm, Gd, Dy, Y, Eu, Tb and Ba, and M2 is selected from at least one of Mg, W, Al, Ge, Ru, Nb, Ni, Ta, Co, Fe, Zr, Hf, Fe, Cr and Ga. The solid thin film electrolyte material is obtained by using a sol-gel method or radio frequency magnetron sputtering method. The solid thin film electrolyte material has relatively high Li ion conductivity, relatively low electron conductivity and favorable thermodynamic stability, and is particularly suitable for producing solid lithium ion batteries.