The invention discloses a
diode device and a manufacturing method thereof, and belongs to the technical field of power
semiconductor devices. A cellular structure of the device comprises a
metal negative
electrode, an N+ substrate and an N- epitaxial layer; a trench structure is arranged on the two sides of the top layer of the epitaxial layer; the trench structure comprises a P-type semiconductorregion and a heterogeneous
semiconductor from the bottom up; the top layer of the N-epitaxial layer is also provided with a P-type
body region, an N+ source region and a P+
contact region; the N+ source region, the P-type
body region, a part of the N- epitaxial layer and the heterogeneous
semiconductor are in contact through a
dielectric layer of the side wall of the trench; the surface of the device is covered with a
metal positive
electrode; and the heterogeneous semiconductor, the
dielectric layer, the source region, the
body region and the epitaxial layer form an ultra-potential barrier structure. By virtue of the
diode device and the manufacturing method thereof, the problems of high forward opening
voltage, poor
reverse recovery capability and the like existing in the existing
PIN diode device can be solved; and in addition, lower electric leakage and a larger safe working region are achieved on the premise that the withstand
voltage is not affected, and the reliability of the device is improved.