The invention discloses a
diode and a manufacturing method thereof, and belongs to the technical field of power
semiconductor devices. The cellular structure of the device comprises a
metal cathode, an N+ substrate, an N- epitaxial layer and a
metal anode, wherein groove structures are arranged on two sides of the top layer of the N- epitaxial layer, each groove structure comprises a P+
semiconductor area and a P-type
semiconductor Well area from the bottom up, each P-type semiconductor Well area contacts the
metal anode thereon,
dielectric layers are arranged on the upper surfaces of the partof the P-type semiconductor Well area and the part of the N- semiconductor epitaxial layer; heterogeneous semiconductors are arranged on the upper surfaces of the
dielectric layers and the N-semiconductor epitaxial layer; the heterogeneous semiconductors, the
dielectric layers, the P-type semiconductor Well area and the N- semiconductor epitaxial layer form a super barrier structure. According tothe
diode and the manufacturing method thereof provided by the invention, the traditional PIN device forward opening
voltage is significantly reduced without influencing the device performance, the
reverse recovery property of the device is optimized, and the good property of compromise between the forward breakover
voltage drop and turn-off losses is acquired. In addition, the device provided bythe invention also provides a plurality of working
modes for selection, so as to be greatly conveniently used in actual applications.