50results about How to "Even gas distribution" patented technology

A heating device with a function of dynamical temperature-control includes an oven housing, a door, at least one air-discharge device and a plurality of heaters. The oven housing has a plurality of walls, and the walls define a chamber. The door is pivoted disposed on the oven housing. The air-discharge device and the heaters are disposed on the oven housing. The heaters are respectively dynamical-adjustable and independent-operating heating elements to achieve the uniformity of chamber temperature.

A Hall-current ion source with a narrow ion beam energy distribution is presented. A narrow ion beam energy distribution is provided by a utilization of a multi-chamber anode through which a working gas is applied and delivers a uniform working gas distribution in a discharge channel. Introduction of a working gas through a lower part of anode makes applied electric potential in a narrow area and leading to enhanced conditions for a working gas ionization, high ion beam current, high translation of a discharge voltage into a “monochromatic” ion beam mean energy distribution. A multi-chamber anode with a slit exit for introduction of a working gas into area under anode is utilized to prevent a backflow of insulating and dielectric depositions on anode parts, and under anode area makes a nominal operation with reactive gases without a phenomenon called as “anode poisoning” during long operating hours. The ion source with a shielded Hot Filament design shows very effective ion beam neutralization properties; it produces less heating of the substrate than a traditional one; it has a cleaner ion beam because its beam is not contaminated by the Hot Filament material particles. In the design with two Hot Filaments the ion source operation is extended for tens of hours.

A fuel cell stack comprising a plurality of fuel cells, each having an anode flow field plate, a cathode flow field plate and a membrane electrode assembly disposed between the flow field plates. The anode and cathode flow field plates have primary channels and ribs separating the primary channels. At least a portion of the anode and cathode primary channels are disposed directly opposite one another with a membrane exchange assembly therebetween and with at least some of the ribs on the anode and cathode flow field plates located directly opposite one another to sandwich the membrane exchange assembly therebetween. The flow field plates can also have inlet distribution and outlet collection channels. Each of these distribution and collection channels is connected to a plurality of the primary channels, preferably located centrally, so as to improve flow distribution of the reactants.

The invention discloses a gas injection device used for feeding gas to a reaction chamber, which comprises a body, a gas channel arranged in the body, a nozzle with arch-shaped surface arranged at the front end of the body, and a plurality of orifices arranged along the arch surface of the nozzle. The diameters of the orifices are 0.3 to 0.7 mm, and the gas is sprayed into the reaction chamber through the gas channel and via the orifices. The central orifice is arranged along the central axis direction of the gas injection device, the peripheral orifices are arranged on the periphery of the central orifice, and have 0 to 90 degree included angle with the central orifice. The peripheral orifices are radiated from the central orifice to the periphery, and the radiation angle is 15 to 30 degrees. The included angle between orifices is 5 to 15 degrees. The invention has the advantages that the structure is simple, the gas injection covering area is large, and the gas is distributed evenly, thereby especially suitable for gas supply systems of semiconductor silicon wafer processing equipment, and also suitable for the gas supply in other occasions.

Disclosed are a carbon porous membranous structure having fine interconnecting pores an average diameter of which is 0.05 to 10 μm and a porosity of 15 to 85% and a metal-dispersed carbon structure comprising that carbon porous membranous structure having dispersed therein fine particles of at least one kind of a metal and an alloy. The carbon porous membranous structures are useful as a component of fuel cells, particularly as an electrode base material of gas diffusion electrodes for solid polymer electrolyte fuel cells and phosphoric acid fuel cells.

The invention discloses an electric thruster gas distributor. The electric thruster gas distributor comprises a first welding screw, a second welding screw, a first gas inlet pipe, a second gas inletpipe, a first gas inlet pipe fixing seat, a second gas inlet pipe fixing seat, a distributor lower bottom and a distributor upper bottom, wherein a plurality of pairs of fixing key grooves, a circumferential gas conveying groove, a first gas inlet hole, a second gas inlet hole, a first counter bore, a second counter bore and radial gas conveying grooves are formed in the inner circumference and the outer circumference of the distributor lower bottom; and fixing keys corresponding to the plurality of pairs of fixing key grooves, a 0.32 mm jet hole, a 0.46 mm jet hole, a 0.56 mm jet hole, a 0.6mm jet slit and a 1 mm flow blocking plate are arranged on the inner circumference and the outer circumference of the distributor upper bottom. According to the technical scheme of the electric thruster gas distributor, the distribution of the gas flow can be controlled so as to achieve more uniform gas distribution, and a uniform and stable neutral particle environment is provided for an electricthruster.

The invention relates to a Fischer-Tropsch synthesis fluidized bed reactor, wherein the fluidized bed reactor comprises a reactor cylinder and an internal component arranged in the reactor cylinder, and the internal component comprises a gas distribution mechanism, a heat exchange mechanism, a solid catalyst separation and circulation mechanism and a catalyst online feeding and discharging mechanism; the gas distribution mechanism comprises a first-stage gas distributor, a second-stage gas distributor and a third-stage gas distributor which is arranged in a main reaction dense-phase region ofthe fluidized bed reactor; the first-stage gas distributor and the second-stage gas distributor are arranged at the bottom of the reactor cylinder; a gas nozzle of the third-stage gas distributor transversely sprays gas to transversely cut longitudinally rising gas flow. Compared with the prior art, the reactor is reasonable in design structure and layout; the fluidized bed reactor is good in gas-solid contact in the reactor, uniform in fluid distribution, high in system heat transfer efficiency, uniform in temperature distribution, good in gas-solid separation effect, high in system operationflexibility and particularly suitable for design and operation of the large-scale Fischer-Tropsch synthesis fluidized bed reactor, and cavities in the fluidized bed reactor are avoided.

A method for preparing hydroxylamine by reducing nitric acid or its salt with hydrogen gas in an aqueous medium in the presence of a catalyst, wherein reduction of nitric acid or its salt is performed in a reactor comprising a reaction section, a cooler disposed at the lower portion of the reactor, and a middle gas distributor and a lower gas distributor respectively disposed above and below the cooler for introducing hydrogen gas into the reaction section. According to the present invention, gas distribution become more uniform by disposing the gas distributors at different positions of the reactor, which results in higher yield of hydroxylamine.

The invention belongs to the field of safety production and environment protection, and particularly relates to a high-pressure pipeline gas and liquid reactor for hydrogen sulfide treatment of an oilwell and a treatment method thereof. The high-pressure pipeline gas and liquid reactor consists of a gas supply unit, a dissolved gas mixing reaction unit and an automatic control unit, wherein the gas supply unit is connected with the dissolved gas mixing reaction unit, and is used for supplying required oxygen for the dissolved gas mixing reaction unit; the automatic control unit is used for detecting the contents of hydrogen sulfide and dissolved oxygen in each node of the dissolved gas mixing reaction unit, and controlling the supply amount of oxygen in each node of the dissolved gas mixing reaction unit. The high-pressure pipeline gas and liquid reactor has the advantages that the equipment is compact, and the land occupation area is small; the automation degree is high, and the maintenance is convenient; the treatment is performed at high pressure, the pressure-relief releasing and pressurizing transportation process of the hydrogen sulfide gas is not needed, and the energy consumption is low; by adopting the multiple stages of gas supply, the gas is uniformly distributed, the gas dissolving efficiency is high, the utilization rate of the gas is high, the treatment effect isgood, and the removal rate of the hydrogen sulfide reaches 99.5% or above; the high-pressure pipeline gas and liquid reactor can be widely applied into the hydrogen sulfide treatment technology of the oil well.

The invention discloses a method for improving film thickness uniformity in a gradient pressure mode. The method comprises the following steps: S1, ISSG (in-situ steam generation) equipment is adopted; S2, in STI (shallow trench isolation) is realized through steam pressure of the ISSG equipment with the gradient pressure mode so as to form a liner oxidation layer in a penetration process reaction stage of a wafer. The film thickness uniformity of the liner oxidation layer for STI is improved, and the method has the effects that the cost is reduced, the working efficiency is increased and the product quality is improved.

The invention relates to an environmental protection device, and discloses a device for composite adsorption microwave recovery or pyrolysis treatment of organic waste gas. The device comprises a pretreatment unit and a plurality of parallel microwave treatment units; wherein the microwave treatment unit comprises a reaction box, an inlet tube, ceramic tubes, a microwave generator, a connecting tube, an outlet tube and a heat exchanger; the ceramic tubes are arranged in parallel in the reaction box; and the ceramic tubes are filled with active carbon layers and zeolite layers at intervals. Thepretreatment unit can automatically clean a filter medium contaminated. The microwave treatment units have high recovery and pyrolysis efficiency for organic pollutants, and the adsorbent can be repeatedly regenerated for use; and the device is simple, energy-saving, and low in operating cost. The device has great advantages in small and medium-sized volatile organic waste gas recovery and treatment projects.

The invention relates to an environmental protection device, and discloses a method for composite adsorption microwave recovery or pyrolysis treatment of organic waste gas. Volatile organic pollutantsin the waste gas are adsorbed by a composite adsorbent loaded in a ceramic tube, so that the method is suitable for the treatment of both low-concentration large-volume organic waste gas and high-concentration organic waste gas. The low-concentration organic waste gas can be firstly adsorbed, enriched, then desorbed and pyrolyzed (or recovered); and the high-concentration organic waste gas can beadsorbed, desorbed and pyrolyzed simultaneously, in order to achieve the highest efficiency with the lowest energy consumption. Active carbon and zeolite are arranged at intervals, thereby avoiding the disadvantage that the radiation depth of microwave is affected by the fact that the single active carbon used at present absorbs the microwave, and improving the efficiency of the microwave.