The invention belongs to the technical field of
semiconductor memories, and particularly relates to a semi-floating gate memory based on a two-dimensional material and a preparation method thereof. The semi-floating gate memory comprises an L-shaped
bottom gate, a
barrier layer covering the surface of the
bottom gate, and an L-shaped semi-floating gate layer which is a first type of two-dimensional material, and the top of the L-shaped semi-floating gate layer is flush with the top of the
bottom gate; the semi-floating gate memory further comprises a semi-closed tunneling layer at the bottom of the semi-floating gate, wherein the semi-closed tunneling layer is a second type of two-dimensional material, and the upper surface of the semi-closed tunneling layer is flush with the top of the semi-floating gate; the semi-floating gate memory further comprises a channel layer which covers the semi-floating gate and the semi-closed tunneling layer and is made of a third type two-dimensional material, and the upper surface of the channel layer is flush with the top of the
barrier layer; the semi-floating gate memory further comprises a source
electrode and a drain
electrode which are on thesurface of the channel and are a fourth type of two-dimensional material. The first type of two-dimensional material and the third type of two-dimensional material form a
diode, and the first type oftwo-dimensional material, the third type of two-dimensional material, the
barrier layer and the bottom gate form a grid-control
diode. The device is good in reliability and high in data erasing and writing speed, and the
data retention time can be prolonged; in addition, the device is small in size and suitable for being used in ultrathin
electronic equipment.