The invention relates to a purifying method of ultrahigh pure
hydrofluoric acid, comprising the technological steps as follows: filling industrial
anhydrous hydrogen fluoride liquid into a rectifying still, and adding
potassium permanganate with 0.16 to 1 percent weight, stirring, then stopping; after that, adding
hydrogen peroxide with 0.16 to 1 percent weight, stirring, then stopping; heating up to 60 to 80 DEG C, the
hydrogen fluoride liquid is gasified and generated into purified
hydrogen fluoride gas; subsequently, filling the purified
hydrogen fluoride gas which goes out of the rectifying still into a cooler for cooling and filtering; injecting deionized water into an absorption
tower whose bottom is provided with a gas distribution plate tube, after that, filling the
hydrogen fluoride gas which goes out of the cooler into the gas distribution plate tube at the bottom of the
tower; after sprayed out of the gas distribution holes on the tube wall of the gas distribution plate tube, the hydrogen
fluoride gas is absorbed by the deionized water and produced into semi finished product of
hydrofluoric acid; finally, filling the semi finished product of
hydrofluoric acid which goes out of the absorption
tower into a filter in 0.05Mum, after that, obtaining the finished product of ultrahigh pure hydrofluoric acid. The product prepared by the method of the invention has high
fineness and output, according to the requirements of the
environmental protection.