The invention discloses a flexible piezoelectric three-dimensional
tactile sensor array which comprises a PDMS semispherical projection layer, an upper
electrode layer, a nanometer structure piezoelectric film layer, a lower
electrode layer and a
printed circuit board flexible substrate layer, wherein the PDMS semispherical projection layer, the upper
electrode layer, the nanometer structure piezoelectric film layer, the lower electrode layer and the
printed circuit board flexible substrate layer are successively connected from top to bottom. The nanometer structure piezoelectric film layer isa nano structure ZnO piezoelectric film and is arranged between the upper electrode layer and the lower electrode layer which are arranged in an array pattern manner, thereby forming a plurality of piezoelectric sensitive units. The three-dimensional
tactile sensor array is composed of M*N separated sensor units. Each sensor unit comprises a PDMS semispherical projection and three piezoelectric sensitive capacitors. The PDMS semispherical projection transmits a three-dimensional
contact force to the three piezoelectric sensitive capacitors. Through the magnitude of charges which are generatedby the three piezoelectric sensitive capacitors, the external three-dimensional
contact force is measured. The invention further discloses a preparation method of the flexible piezoelectric three-dimensional
tactile sensor. The flexible piezoelectric three-dimensional tactile
sensor array has advantages of three-dimensional
contact force measurement, high sensitivity, high flexibility and high dynamic response.