778results about How to "Guaranteed accuracy requirements" patented technology

The invention relates to a multi-layer mixed synchronization bonding structure and a method for three-dimensional packaging. The method comprises the following steps of: forming a hard metal conical array on a surface of a metallic pad of a substrate to be mixed and bonded; forming a soft metal layer on the surface of the metallic pad of the other substrate to be mixed and bonded; forming dielectric adhesion layers on surfaces of non-metallic pads of the two substrates to be mixed and bonded; aligning the hard metal conical array with the soft metal layer, heating and pressurizing to make thehard metal conical array inserted into the soft metal layer, and combining the dielectric adhesion layers with each other to form a mixed pre-bonding structure; and then heating, forming an intermetallic compound in the hard metal conical array which is inserted into the soft metal layer, and solidifying and combining the dielectric adhesion layers. Compared with the conventional bonding method, the method provided by the invention has the advantages that: yield is high; bonding time is saved; cost is reduced; and the reliability of a product is improved at the same time.

The invention discloses a heavy-load precise double-arm manipulator with arms cooperating with each other in a space. The manipulator comprises a linkage guide rail assembly, the load-bearing mechanical arm used for bearing weights and the assistant positioning mechanical arm used for guaranteeing workpiece positioning precision. Because the load-bearing mechanical arm and the assistant positioning mechanical arm can cooperate with each other in the space, it is guaranteed that the whole manipulator structure has high load bearing capacity and also has high positioning precision, the problem of contradiction between the load bearing capacity and precision of existing manipulators is solved, and the requirements for clamping of workpieces with different shapes, high surface precision, high efficiency and high safety performance are met.

The invention relates to the technical field of artificial intelligence, and discloses an intelligent customer service question answering method based on text similarity, which comprises the followingsteps of collecting all questions and answers corresponding to the questions in a current scene, carrying out text word segmentation and keyword extraction on the questions, and constructing a text corpus of the current question answering; constructing a convolutional neural network model structure based on the similarity between the text keywords; using the text corpus and the convolutional neural network model to train the convolutional neural network model; and receiving a question inputted by a user, inputting the question into the trained convolutional neural network model, predicting the question in the corpus with the highest text similarity with the inputted question, and sending an answer corresponding to the question to the user. The invention further provides an intelligent customer service question answering device and a computer readable storage medium. According to the invention, the accuracy and the calculation speed of intelligent customer service question answering can be ensured.

The invention discloses a constructing method and a dynamically updating method of a GNSS network difference positioning reference station network. In the method, each GNSS reference station is projected to a two-dimensional plane according to the known and accurate coordinates of the GNSS reference station; a reference station network taking a triangle as a basic structure is formed by the discrete points of the two-dimensional plane according to the network constructing rule of a Delaunay triangle network, and the shape of the network is unique. When a new reference station is increased or a certain reference station is not used, the real-time construction of a new network is finished through operation of point insertion or point deletion. The invention can keep the unique optimized network shape of the reference stations and meet the precision requirement when a movable station is positioned.

The invention discloses a real-time prediction method of mine gas concentration in short and medium terms based on radial basis function neural network integration. The method comprises the following steps of: taking mine gas concentration data as a chaotic time series to construct a plurality of prediction sub-models of radial basis function (RBF) neural networks, and taking a weighted mean of synchronous prediction results of all prediction sub-models as an integrated prediction value to realize prediction model initializtion of RBF neural network integration; then realizing prediction of the gas concentration in the range of from a short term to a medium term through setting an integrated capacity parameter (the integrated capacity parameter is also equal to an RBF network prediction step-length); and obtaining a new prediction sub-model by utilizing an incremental training mode aiming at the characteristics that gas concentration information is continuously collected, and realizing updating of the RBF neural network integration according to a first in first out queue sequence so as to improve real-time prediction precision of the gas concentration, therefore, a proper compromise can be obtained between prediction range and prediction precision requirements, and the technical requirement on a mine gas information management system is satisfied.

The embodiment of the invention provides a method and device for monitoring Ethernet clock synchronization. In the method, a slave clock device returns a delay request message to a master clock device, and the delay request message carries link delay information between the master clock device and the slave clock device of a last time hack cycle, determined by the slave clock device, so that the master clock device is enabled to determine a time deviation between the master clock device and the slave clock device and according to whether the time deviation is smaller than a set time deviation threshold, whether to send alarm information is determined. Because in the method, the slave clock device returns the determined link delay information between the slave clock device and the master clock device to the master clock device from the master clock device so that the master clock device is enabled to determine a time hack condition of the slave clock device so as to achieve an objective of monitoring of the slave clock device and thus precision demands of time synchronization are ensured and loss caused by inaccuracy of time hack is reduced.

The invention discloses a human body dimension measurement method based on a Kinect depth camera, and belongs to the technical field of machine vision. The method comprises the following steps that: (1) depth camera calibration: carrying out up-sampling on an original depth image, and automatically extracting angular point information through OpenCV (Open Source Computer Vision Library) to finish calibration; (2) depth image processing: adopting a united bilateral filtering method, and utilizing a high-resolution color image to improve the quality of the depth image and reduce noise interference in the depth image; (3) point cloud fusion and bone point information acquisition; and (4) human body dimension calculation. While system cost is lowered, the accuracy requirement of garment customization is guaranteed, the human body bone point information is used for enabling a human body characteristic identification algorithm to be simpler, and the operation efficiency of a software system is effectively improved.

The invention belongs to the field of mobile application of industrial robots, and discloses an omnidirectional intelligent mobile platform used as a chassis of an industrial robot. The industrial robot, a robot control cabinet for controlling the industrial robot to move and a power supply cable for powering the industrial robot and the robot control cabinet are arranged on the platform. A control system is arranged on the platform, a walking mechanism is arranged at the bottom of the platform, the control system controls the walking mechanism to drive the whole platform to move, and work of the robot is completed. The omnidirectional mobile platform based on Mecanum wheels is adopted as a base of the robot, and the robot can move on the ground in all directions. When the robot is located to work, four electric lifting supporting legs are adopted, the omnidirectional mobile platform is jacked till wheels are lifted, meanwhile, electromagnetic suction cups are adopted at the bottoms of the lifting supporting legs to be attracted to ground sizing blocks, the whole base is fixed to a work position, the stability and rigidity of the base of the robot are guaranteed, and the need for the precision of the tail end of the robot is guaranteed.

The invention discloses a full-automatic coiling machine with high processing precision, high production efficiency and one-step processing and shaping. The full-automatic coiling machine comprises a work bench (1), a peeling mechanism (2), a solder machine (3), a wire feeding mechanism (4), a coiling mechanism (5), a break-in device (6) and a main controller, wherein the peeling mechanism (2), the solder machine (3), the wire feeding mechanism (4), the wire feeding mechanism (5) and the break-in device (6) are successively arranged on the work bench (1), and the main controller controls the above components to act; a copper wire to be coiled passes through the inner part of the solder machine (3) to plate a tin layer on the surface thereof after an oxide layer is peeled off by the peeling mechanism (2); the wire feeding mechanism (4) can guide the copper wire to the coiling mechanism (5); the coiling mechanism (5) comprises a coiling shaft (501) which coils the copper wire into a coil, and can move back and forth along the axial direction of the coiling shaft (501); after finishing coiling, the break-in device (6) cuts off the copper wire guided to the coiling shaft (501). The invention can be widely applied in processing no-core coils in the field of electronic communication.

The invention relates to a polytetrafluoroethylene (PTFE) composite material sealing ring with high temperature resistance and low creep, and a preparation method thereof. The PTFE and carbon fiber are subjected to pressure forming, high temperature sintering and heat treatment to prepare the composite material sealing ring. The carbon fiber is prepared through the following steps that: a pyrophosphoric acid-type titanic acid ester coupling agent is adopted for carrying out a surface coating treatment for the carbon fiber; then the treated carbon fiber is subjected to an oxidation treatment for 5-20 minutes at a temperature of 350-450 DEG C. According to the present invention, the interfacial combining capacity between the inorganic fiber and the PTFE resin is substantially improved, the mechanical property and the creep resistance of the modified sealing material are increased.

The invention discloses a cooling system used for an ultra-high strength steel plate thermal die cutting and forming die. The die comprises a concave die and a concave die seat; a water chamber is arranged between the concave die and the concave die seat; the water chamber is communicated with a water inlet and a water outlet. The water chamber is arranged between the concave die and the concave die seat of the invention; after cooled water is inlet in the water chamber, a steel plate workpiece can be quickly cooled by the thermal conduction between the die and the steel plate so as to meet the quenching condition of the steel plate. Especially, the water chamber is also internally provided with a supporting column; the upper end of the supporting column is contacted with the lower bottom surface of the concave die; the lower end of the supporting column is contacted with the upper bottom surface of the concave die seat; therefore, the structural strength of the concave die is ensured, the flowing direction of the water flow can be guided, flow perturbation conditions can be provided, meanwhile, the heat transfer area is increased, and the heat exchange efficiency between the cooled water and the die is improved.

The invention provides an enormous-span steel tube house truss assembling construction method which comprises the following steps: step one: an assembling platform is arranged at a node of a truss; step two: firstly, a bottom cord plane truss is assembled; after the assembling of the bottom cord plane truss is completed and passes the inspection, an upper chord plane truss assembly is carried out at the upper part of the bottom cord plane truss; after the assembling of the upper chord plane truss assembly is completed and passes the inspection, the upper chord plane truss is welded; step three: after the upper chord plane truss is welded, the upper chord plane truss is wholly lifted in the air; and after the upper chord plane truss is lift, the bottom cord plane truss is welded; step four: the bottom cord plane truss is arched nearby each node by using a lifting jack; step five: member bars between the upper chord plane truss and the bottom cord plane truss are assembled, the assembling of the member bars between the upper chord plane truss and the bottom cord plane truss is carried out in the air, and an assembling sequence is as follows: upright rods are firstly installed and then slanting poles are installed.

The invention discloses a method for realizing the machining of combustion-compression ring bushes by using a combustion-compression ring bush cutting clamp, relating to a machining method for ring parts. The invention aims to solve the problems that because the existing combustion-compression ring bush is a thin-walled workpiece, the existing combustion-compression ring bush is easy to deform in the process of machining, so that the machining quality of the combustion-compression ring bush is affected, and meanwhile, the 30-equated positions of 30 molded holes of a combustion-compression ring bush machined by using the existing machining method are poor in accuracy. The clamp used in the invention comprises a base plate, a turntable, two positioning pins and four pressing plates. The method disclosed by the invention comprises the following steps of: 1, roughly turning an inner hole, an outer circumferential surface and two planes of a blank; 2, relieving stress of a semi-finished combustion-compression ring bush product; 3, carrying out finish turning on an inner hole, an outer circumferential surface and two planes of the semi-finished combustion-compression ring bush product; 4, drawing center position lines of radial holes and molded holes; 5, drilling 30 radial holes with a diameter of 5 mm; and 6, cutting and machining 30 molded holes. The method disclosed by the invention is used for machining combustion-compression ring bushes.

The invention discloses a robot for wall and floor paving, belonging to the field of construction machinery. Aiming at the problem that mechanized operation cannot be carried out on the wall and floor paving, the robot for wall and floor paving keeps a vertical state in real time, and provides a benchmark for the paving operation; a camera is used for identifying wall and floor tiles to enable a sucking disc to suck up the central positions of the wall and floor tiles, and an elevator mechanism rises and falls vertically, and reaches a required height through the feedback of a coder and the control of a control system; a work head can overturn after grabbing the wall and floor tiles, so that slurry can be scraped on the wall and floor tiles conveniently, not only can the floor be paved, but also the wall can be paved, and the design of a leveling device and a vibrator guarantees the accuracy requirement on construction. The robot for wall and floor paving, disclosed by the invention, can solve the problem that the mechanized construction for parts such as corners is difficult, the rack can be folded and spread, and thus is convenient to take in, and the robot for wall and floor paving can meet the requirements for wall paving and floor paving simultaneously.

The invention discloses a manufacturing method of a wedge-shaped lens, belonging to the technical field of optical cold processing. The manufacturing method comprises the specific steps of: manufacturing a wedge-shaped lens blank and a high-precision glass clamp by adopting a conventional optical processing technology so as to ensure that a first guide through face of the wedge-shaped lens as well as the surface shape and the surface defects of the wedge-shaped glass clamp meet formulated requirements; optically cementing the first light through face of the wedge-shaped lens onto the inclined surface of the wedge-shaped glass clamp which is already optically cemented onto a parallel planer optical cementing base plate, carrying out fine grinding and polishing on a second light through face of the wedge-shaped lens, and obtaining the wedge-shaped lens with second-level precision by controlling the thickness, the parallel difference and the surface shape precision of the second light through face and the parallel planer optical cementing base plate. The manufacturing method for machining the wedge-shaped lens, disclosed by the invention, not only has a simple process, strong operability and a greatly-prolonged manufacturing period, but also is easy to ensure the single-batch finished product ratio of wedge-shaped lens parts with small sizes, large angles and second-level precision and overcomes the difficulties of unstable quality, low efficiency and low finished product ratio in the conventional processing method.

The invention relates to a concrete track slab prefabricating construction method of a CRTS I type slab ballastless track. The method comprises the following steps of: (1) weaving a steel reinforcement framework; (2) mounting the steel reinforcement framework in a steel mould, wherein the steel mould is internally sprayed with a separant and provided with a pre-embedded sleeve; (3) penetrating a PC (Prestressed Concrete) steel rod and mounting an anchor backing slab; (4) pre-tightening the PC steel rod; (5) mounting a hoisting nut, a spiral bar and a grounding terminal nut; (6) testing an insulation resistor; (7) pouring concrete and vibrating; (8) plastering the surface; (9) maintaining by using steam; (10) dismounting fixing bolts of a pre-embedded piece; (11) demoulding: cleaning the pre-embedded piece and a template, closing the mould, spraying the separant in the steel mould and mounting the pre-embedded sleeve for later use; (12) overturning and examining shape: turning over the CRTS I type slab ballastless track contrete track slab obtained in the step (11) and examining the shape and the appearance; (13) stretching by prestress; (14) sealing the anchor; (15) maintaining in a water pool; and (16) storing in a slab storage area.

The invention discloses super span steel skew arch construction method. Its feature is that it adopts molding bed support sectionalizing installation method which includes the following steps: dividing the super span steel skew arch into twenty one construction units; assembling each of them by horizontal type assembling method; laying off and locating supporting molding bed by total stations instrument; installing supporting molding bed; orderly installing the 1-4, 18-21 sections steel skew arch in roof covering, the 5-10, 12-17 sections out roof covering, the eleventh healing section in roof covering; removing the supporting molding bed. The invention can eliminate installing accumulative error, increase insurance coefficient for whole project to ensure steel skew arch healing successful at a time. The method can be used in large scale hall super span steel skew arch construction.

The invention relates to an active disturbance observation-based fuel pressure control method, aims at solving the problems of time-varying characteristics and non-linearity of an internal combustion engine fuel injection system and non-ideal application of traditional PID (proportion integration differentiation) control in fuel pressure control and the like, and provides the method of realizing control on fuel pressure by adopting model-based feedforward control and state observation-based feedback control. The method mainly comprises target fuel pressure computation, fuel pressure sensor practical fuel pressure collection and computation, fuel measuring unit fuel volume flow rate feedback regulation amount computation, fuel measuring unit fuel volume flow rate feedforward control amount computation, conversion of fuel measuring unit fuel volume flow rate into current, conversion of fuel measuring unit current into a PWM (Pulse Width Modulation) duty ratio, fuel measuring unit practical work current measurement and computation, a fuel measuring unit current feedback regulator, fuel measuring unit PWM modulation frequency computation, a fuel measuring unit PWM drive, a fuel measuring unit, a fuel injection system and a fuel pressure active disturbance observer.

The invention discloses an integrated type sample feeding system for a micro-fluidic chip. According to the integrated type sample feeding system, only one injection pump is adopted to sequentially realize a series of functions of quantitative liquid transferring of a sample on a sample feeding chip, driving of the sample and buffering liquid in the chip, reaction control, washing of a sample sampling probe and the like through on-off control of a plurality of groups of three-way valves. According to the integrated type sample feeding system, the stable sample feeding performance of the injection pump is utilized sufficiently so that the cost of the system is reduced on the basis of guaranteeing the precision requirements of the sample feeding system; the integrated type sample feeding system has an important practical value on the development of relevant analysis chip systems and equipment.

A Demura data lossless compression method of an OLED screen comprises performing Demura data Huffman coding lossless compression for R, G, B. The data compression method comprises the steps of: analyzing the gray scale of the read Demura image data, and counting the frequency of occurrence of each gray scale; performing the construction of the Huffman tree according to the frequency of each gray scale sorted according to the current Demura image data; performing a binary Huffman encoding on the constructed Huffman tree; and replacing the corresponding gray scale value in the original Demura image data with a Huffman encoded value. The invention adopts Huffman coding lossless compression to ensure the accuracy requirement in the Deumra process. Due to the characteristics such as the particularity of Demura data, relatively concentrated gray scale distribution and a higher ratio of the gray scale data with high frequency, the compression ratio of the encoded data is relatively high, andthe cost is saved.

The invention discloses a data fusion algorithm for improving energy utilization rate and service performance of a wireless sensor network, wherein the data fusion algorithm belongs to the field of wireless communication technology. The data fusion algorithm comprises the steps of firstly, establishing the wireless sensor network in a monitored area, performing clustering on the wireless sensor network by means of a classical clustering algorithm LEACH; then, after member nodes in the cluster transmit data which are acquired through sensing to a cluster head node, transmitting all received data and the data which are acquired itself to a convergent node by the cluster head node; extracting partial data as a training sample by the convergent node, training a neural network model for obtaining a neural network parameter; and finally, establishing the neural network by the convergent node and performing data fusion verification on the data information which is acquired by each sensor node. The data fusion algorithm has advantages of greatly reducing data communication amount in a wireless sensor network, reducing network energy consumption, ensuring high accuracy in data acquisition, and prolonging network life cycle.

The invention relates to a Unity3D-based circular coal yard three-dimensional (3D) intelligent visualization display platform. Rapid and accurate checking of the inventory of a coal yard has great significance on cost accounting and scientific management of a power plant. The Unity3D-based circular coal yard 3D intelligent visualization display platform is characterized in that a 3D coal yard realization process involves generating 3D grid data according with coal yard reality through integrating point-cloud data scanned by a coal stocktaking instrument with daily coal sale data, generating a 3D stereogram by use of a Unity3D rendering technology, and then performing correction according real-time coal storage and consumption data according to a power plant DCS so as to improve the fitting precision of a drawn grid map and an actual coal yard shape. At the same time, a volume result of the coal yard inventory is given, the shape of the grid map is dynamically modified, and grid on-line 3D coal yard real-time updating is realized by use of a web technology. The Unity3D-based circular coal yard three-dimensional (3D) intelligent visualization display platform has the advantages of real-time performance, rapidness, low economic cost, high coal stocktaking precision and visual and clear interface.

The invention relates to a multi-sensor system for an inspection robot and an inspection method. The multi-sensor system is characterized in that a sensor system acquires the current state of the inspection robot and external environmental information and sends the acquired current state and external environmental information to a ground base station; and after receiving the current state of the inspection robot and the external environmental information, which are sent by the sensor system, the ground base station sends a control command to the inspection robot. The problem that comprehensive and accurate environmental information of a power transmission line are very difficult to acquire in the driving process of the inspection robot is solved, and autonomous line catching and dynamic centroid adjustment in the obstacle crossing process of the inspection robot are guaranteed.

The invention discloses an automatic focusing device for a projective bulb based on light spot detection and a use method thereof. The automatic focusing device comprises a lamp cup, a lamp cup clamping table, a screw I, a lampwick, a lampwick clamping frame, a large guide rail, a large slider, a screw II, an optical planar lens, a clamping holder, a convex lens, a supporting column, an optical filter, a two-dimensional photoelectric position sensor (PSD), a signal processing system, a PLC (programmable logic controller), a servo motor and a three-dimensional precise adjusting table, wherein light emitted from the lampwick can be reflected by the inner surface of the lamp cup to form parallel light beams, the parallel light beams can be transmitted and reflected twice by the optical planar lens, small parts of the light can be reflected to the convex lens, and then the light irradiates on the PSD by the optical filter after being gathered; a signal output by the PSD can be subjected to a series of conversion by the signal processing system, the PLC, the servo motor and the three-dimensional precise adjusting table; and finally the signal is used to control the position of the lampwick in the lamp cup. The device provided by the invention has the advantages of simple use method, low cost, high efficiency, high focusing precision and the like.

The invention discloses a wall starching and plastering robot and belongs to the field of construction machines. The problem that wall starching and plastering cannot be implemented mechanically is solved. The wall starching and plastering root keeps a vertical state in real time, and keeps parallel to the constructed surface during starching by being matched with pavement of a foldable guide rail, universal wheels are driven by a control system to move, and the wall starching and plastering robot replaces partial manual operation by means of a travel switch. A lifting mechanism ascends and descends vertically and reaches the required height position through feedback of an encoder and control of the control system. When a certain angle is reserved between a starching working head and the constructed surface, pressure of mortar to the constructed surface can be provided, and the requirement for construction precision is ensured. By means of the wall starching and plastering robot, mechanical construction on corners and other portions not easy to construct can be achieved, a rack can be folded and unfolded, and storage is convenient.

The invention provides a secondary mirror supporting structure of a space optical remote sensing camera, belongs to the technical field of space optical remote sensing, and aims at solving the technical problems that the conventional supporting structure has high weight, low specific stiffness, high truss rod width and high obscuration ratio. One surface of the flange is evenly provided with multiple flange bosses. The edge of the same surface is evenly provided with multiple flange embedding connectors. The cross section of the truss rods is shaped like a Chinese character "ri". One end of each truss rod is connected with the top part of a truss cylinder base through a truss rod embedding connector, and the other end is connected with the flange through one flange embedding connector. Multiple pre-embedded members are fixed on the bottom part of the truss cylinder base. The structural stiffness can be strengthened and the advantages of stable structure and low gravity deformation canbe realized by the ring enforcing ribs arranged in the truss cylinder base, and the stray light shading capacity can also be provided. The cross section of the truss rods is shaped like the Chinese character "ri" so that the advantages of low obscuration, high stiffness and high lightweight rate can be realized.

The invention discloses a middle hole pressure storage static leakage-free oil sprayer, comprising a high speed solenoid valve, a locking screw sleeve, a tapered surface ball valve type switch valve, a control plunger and barrel assembly, an oil sprayer spring, a spring seat, an opening check ring, an oil sprayer body, an oil sprayer assembly and an oil nozzle locking cap; the tapered surface ball valve type switch valve is arranged in a concave cavity in the upper end of the oil sprayer body; the upper end of the oil sprayer body is connected with the high speed solenoid valve by a locking nut; the lower end of the oil sprayer body is connected with the oil nozzle assembly by the oil nozzle locking cap; the control pole plunger and barrel assembly is arranged in a central hole formed along the axis of the oil sprayer body; the central hole of the oil sprayer body and the control pole plunger and barrel assembly form a middle hole pressure storage cavity. The oil sprayer is simple in structure, low in machining cost and convenient to mount, so the production efficiency and product percent of pass are improved.

The invention discloses an intelligent sample storage cabinet system. The system comprises a sample storage unit for storing samples, a sample storage / taking movement unit for shifting the samples, and an intelligent control unit; the sample storage unit includes multiple storage bins arranged in an array form; the sample storage / taking movement unit includes a pneumatic manipulator mechanism; the pneumatic manipulator mechanism is provided with a storage cavity and a negative-pressure production component; and after an opening end of the storage cavity is tightly connected with opening ends of the storage bins, the negative-pressure production component extracts air in the storage cavity and the storage bins to form vacuum negative pressure so as to suck the samples in the storage bins to the storage cavity. The system has the advantages of high space utilization rate, high intelligent modular degree, capability of synchronously storing and taking one or more samples and safe and efficient sample storage and taking.

The invention relates to a rotating triple-prism beam scanning device comprising a rotating double-prism system, a rotating single-prism system, a guide rail, an adjustable support, and a fixed support. The rotating single-prism system comprises a base component, a prism and frame assembly, and a worm-and-gear mechanism. The prism and frame assembly comprises a flat washer, a wedge prism, a rubber pad, a wedge retainer ring, a threaded retainer ring, and a frame. The base component comprises a base, a base baffle, and a base insert. The worm-and-gear mechanism comprises a rotary motor, a motor stand, a coupling, a worm, a bearing support, a rolling bearing, a worm gear, an encoder support, and a rotary encoder. The rotating double-prism system is formed by assembling two rotating single-prism systems together. In the invention, the three wedge prisms are driven by the worm-and-gear mechanisms to do full-circumferential rotation, transmission is stable and accurate, and the scanning precision and stability of dynamic beams can be ensured; the prisms are independent of one another in rotation control, and diversified scanning modes can be achieved; and by introducing the third prism to the double-prism system, the scanning field of beams is enlarged significantly, and the problem that a double-prism system has scanning blind areas and control singular points is solved effectively.

The invention discloses a production method of a high-sensitivity biochemical sensor based on a resonance type micro-cantilever structure. The biochemical sensor is produced on a silicon substrate by using a micro-nano processing technology and taking a cantilever as a structural unit, namely the cantilever and an affiliated structure thereof are produced on a silicon slice by using a photoetching technology and a dry etching technology; an electrical induction element is produced by using an ion injection technology and an electronic beam evaporation technology, so that the element has a function of self-detecting a detection signal; a package cover slice is produced by a design die by a polymer solidifying, demolding and bonding technology. According to theproduction method, the production precision and the yield of the high-sensitivity biochemical sensor are greatly improved; the production method can be used for producing the sensors on a large scale; the production cost is effectively reduced. Moreover, the production method can be also applied to production of micro-electromechanical system (MEMS) devices with other structures, such as a double-end fixed supporting structure, a interdigital accelerator and other capacitance and resistance type sensors.