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1023results about How to "Fast scanning" patented technology
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Light Field Display Device and Method
ActiveUS20140035959A1Fast scanningCathode-ray tube indicatorsImage data processingRadianceDisplay device
The present invention provides a light field display device (300) comprising an array of light field display elements (310) populating a display surface, each display element (310) comprising: a beam generator (522) for generating an output beam of light; a radiance modulator (524) for modulating the radiance of the beam over time; a focus modulator (530) for modulating the focus of the beam over time; and a scanner (504, 506) for scanning the beam across a two-dimensional angular field.
Owner:VERGENT RES PTY LTD
Fast forming method of fusion of metal powder of three beams of laser compound scanning
The invention discloses a fast manufacturing method of three-beam laser compound scanning. The method comprises the following steps of: firstly utilizing long-wavelength laser (CO2 laser) for preheating the metal powder, then utilizing short-wavelength laser (YAG or optical fiber laser) for fusing the metal powder and finally utilizing long-wavelength laser (CO2 laser) to carry out heat treatment to the frozen metal. The fast manufacturing method uses the three beams of laser to carry out compound scanning, namely uses long-wavelength laser to preheat, short-wavelength laser to fuse and then long-wavelength laser to carry out heat treatment, can realize the compound process of preheating, fusion and heat treatment of the metal powder. The three beams of laser compound scanning mode can reduce internal stress of the metal part, avoid warping and cracking, improve organization and improve performance.
Owner:HUAZHONG UNIV OF SCI & TECH
Method and apparatus for spatiotemporal valuation of real estate
InactiveUS20060015357A1Low costShorten the timeProduct appraisalBuying/selling/leasing transactionsGeographic regionsComputer graphics (images)
A method and apparatus for valuing every property in a predetermined geographic region at regular intervals and storing those valuations for ready access later in a layered data stratum, using customary sources of property valuation data to create a new layers of the data stratum and using the data stored in the one or more layers of the data stratum for the creation of tables, spreadsheets and maps for evaluations of changes and trends in property valuation.
Owner:CORELOGIC SOLUTIONS
User proximity detection for activating vehicle convenience functions
ActiveUS20150161834A1Increase in overall average battery drainRaise the potentialElectric signal transmission systemsDigital data processing detailsPower flowCommunications system
A convenience controller activates a small zone high location precision welcoming detecting function (with high current utilization) in response to a detected arrival of an authorized user into a larger zone low location precision welcoming detecting function (with low current utilization) approach region around a vehicle. A short range transmitter broadcasts a polling signal covering the region. The short range transmitter has an approach pending mode wherein the polling signal is broadcast according to a first predetermined repetition and a baseline mode wherein the polling signal is broadcast according to a lower repetition. The short range transmitter has a first power drain in the approach pending mode. A wireless communication system is configured to monitor for user activity outside the approach region corresponding to a potential user entry into the approach region, wherein monitoring by the wireless communication system has a lower power drain. If the short range transmitter is in the baseline mode when the user activity is detected, then the short range transmitter switches to the approach pending mode.
Owner:FORD GLOBAL TECH LLC
Security detection method and system of Android application program
ActiveCN102779257ACause harmImprove scanning efficiencyComputer security arrangementsSoftware engineeringApplication software
The invention provides a security detection method and system of an Android application program, aiming to solve the problems of an antivirus method of the existing Android platform that the scanning speed is slow and the false positive ratio is high. The method comprises the following steps of: scanning an Android installation package and extracting appointed characteristic information from the Android installation package; finding characteristic records which are matched with the appointed single characteristic information or a combination thereof from a pre-arranged security identification base, wherein the security identification base comprises the characteristic records and security grades corresponding to the characteristic records, and each characteristic record comprises single characteristic information or the combination of the characteristic information; and respectively displaying the security grade corresponding to the found characteristic records in a security detection result of the Android installation package. The security detection method and system of the Android application program disclosed by the invention have the advantages of fast scanning speed and high searching and killing accuracy.
Owner:360 TECH GRP CO LTD
Security detection method and system of Android application program
ActiveCN102831338ACause harmImprove scanning efficiencyComputer security arrangementsSpecial data processing applicationsSecurity levelFalse alarm
The invention provides a security detection method and system of an Android application program, solving the problems of low scanning speed and high false alarm rate of the traditional virus killing method of an Android platform. The security detection method comprises the steps of: scanning an Android installation package, extracting appointed characteristic information from the Android installation package; uploading the appointed characteristic information to a server, searching a characteristic record matched with appointed single characteristic information or combination from a security identification base preset in the server; and receiving a security detection result returned by the server aiming at the Android installation package, and displaying on a client end user interface, wherein the security detection result includes a security level corresponding to the characteristic record searched by the server. The client end detection is combined with the server detection, thus the security detection method is high in scanning speed and high in killing accuracy rate.
Owner:360 TECH GRP CO LTD
Method to view schedule interdependencies and provide proactive clinical process decision support in day view form
ActiveUS20090119126A1Quick scanGreat advantageHospital data managementMedical imagesREMS StakeholderComputer science
A system and method for use in managing and preparing for scheduled procedures that are characterized as being interdependent and variable. The disclosed method enables schedule risk management and provides a look-ahead capability along with process diagnostics to isolate specific assets and tasks that can be managed to reduce schedule risk. The method facilitates review of upcoming tasks by the process stakeholders for education as to where the schedule risks reside and in an emulation mode for review and improved scheduling going forward. Clinical workflow is integrated such that process stakeholders and assets are directed in such a way as to keep on, reduce delay risk or recover the schedule.
Owner:GENERAL ELECTRIC CO
Check processing apparatus, POS system and method for processing checks when processing transactions using a POS terminal computer
InactiveUS20050015342A1Reduce lossesCreate efficientlyFinanceCash registersComputer hardwareSoftware engineering
A check processing apparatus, system and method for effectively and efficiently preventing illegal check use when processing sales transactions based on product information entered by an operator in a POS terminal computer including a scanning device for capturing an image of personal identification of the presenter of the check. The check processing apparatus includes means for reading check-specific information preprinted in magnetic ink on the check C and identifying the check; and a controller for evaluating the check-specific information. The scanning device is activated based upon the result of this evaluation. The scanning device may comprise a photo-ID scanner for capturing the image of identification.
Owner:SEIKO EPSON CORP
Scanning light field camera and display
ActiveUS8754829B2Fast scanningTelevision system detailsCathode-ray tube indicatorsRadianceLight beam
Owner:VERGENT RES PTY LTD
High furnace burden face measurement and control system based on industrial phased array radar
InactiveCN101492750ASolve bottlenecksFast scanningMachines/enginesLevel indicators3d imageControl system
A system for measuring and controlling blast furnace level based on an industrial phased array radar relates to the industrial phased array radar used in the fields of metallurgy, chemical engineering, cement building materials. The system includes an industrial phased array radar body, a radar electromagnetic shield and an interlock cloth control system; wherein the industrial phased array radar body is in charge of obtaining level information; the electromagnetic shield is in charge of protecting the industrial phased array radar body in a high-temperature and high-pressure dust atmosphere; and the interlock cloth control system is in charge of carrying out analysis and judgment and charging task according to the level height data transmitted by the interlock cloth control system to control the final level shape to be in a predetermined shape. The inventive system can be applied in severe atmosphere of darkness, high temperature and dustiness to precisely describe the height information of each solid level point and obtain the kind and time of charging at different moments by the interlock with PLC or DCS; so that the shapes of a plurality of level layers and 3D images of solid levels are obtained.
Owner:UNIV OF SCI & TECH BEIJING
All fiber autocorrelator
InactiveUS6847453B2Accurate and fast measurementLarge dynamic rangeInterferometersUsing optical meansRefractive indexFiber interferometer
An autocorrelator apparatus and method for economically measuring physical properties of an object where the measurement path is at least semi-translucent to light, such as thicknesses in multilayered optical structures, group index of refraction, and distance to a surface. The apparatus includes a non-coherent light fiber interferometer and an optional coherent light fiber interferometer in association so as to share PZT fiber modulators. Thickness and boundary extent measurements can be made, for example, of solids, liquids, liquids moving along a horizontal plane, or liquids flowing down a plane.
Owner:HALLIBURTON ENERGY SERVICES INC
Method for a layer-wise manufacturing of a three-dimensional object
ActiveUS9011982B2Shorten the durationShorten the timeAdditive manufacturing apparatusPretreated surfacesParticle beamElectromagnetic radiation
A method for a layer-wise manufacturing of a three-dimensional object has a first step of providing a layer of a material in powder form or a liquid material on a support or a layer that has already been solidified at selected positions previously and a second step of directing a focussed photon or particle beam (8′) selectively at selected positions of the layer. In the second step, the photon or particle beam is selected such that it brings about a change of the absorption of the material when hitting the layer. After the termination of the second step, a third step is carried out, in which the layer is irradiated by means of electromagnetic radiation (18′) such that the material is homogenously solidified at those positions of the layer that correspond to the cross-section of the object to be formed.
Owner:EOS ELECTRO OPTICAL SYST
Solid-state two-dimensional scanning laser radar and scanning method thereof
PendingCN107272014ALow costReduce the difficulty of assembly and adjustmentElectromagnetic wave reradiationEngineeringErbium lasers
The invention discloses a solid-state two-dimensional scanning laser radar and a scanning method thereof. The solid-state two-dimensional scanning laser radar comprises a control processing module and also comprises a laser transmitting module and a laser receiving module connected to the control processing module. The laser transmitting module includes a laser, a collimating lens and a vibrating lens. The collimating mirror collimates a detection laser beam emitted by the laser to the vibrating lens, and the detection laser beam is transmitted in different angles by the vibrating lens. The laser receiving module comprises a first mirror, the vibrating lens, a receiving telescope and a light detector, laser echo reflected from the surface of a target object is reflected to the vibrating lens through the first mirror and then is emitted to the receiving telescope in a fixed direction. The control processing module controls and perceives the working states of the laser, the vibrating lens and the light detector and carries out data processing and analysis. The MEMS vibrating lens is used as a scanning device and also is used as a receiving device, the structure is simplified, the cost is reduced, and the synchronization of the attitudes of the scanning device and the receiving device is not needed.
Owner:广州市杜格科技有限公司
Full-automatic scanning system and method for microscopic section
ActiveCN102854615AFast scanningIncrease the speed of uniform movementMicroscopesPictoral communicationDigital imagingRolling shutter
The invention discloses a full-automatic scanning system and a method for a microscopic section. The system comprises an object stage, a lighting device, an object lens, a Z-axis controller, a scanning camera and a computing device, the scanning camera is provided with a rolling shutter exposure mode and a banded array or banded subarray reading mode, the scanning camera performs a continuous digital imaging scanning for a banded partial area of a section sample which moves at a constant speed along a shutter rolling direction of the scanning camera, under the rolling shutter exposure mode, the scanning camera can perform a parallel exposure for next frame of image before the exposure of a former frame of image is finished, and the computing device can splice each frame of image which is subjected to continuous exposure to form a complete digital section. By means of the technical scheme, the uniform motion speed of the section sample can be improved, simultaneously the motion blurring caused by sample motion during exposure of the scanning camera can be reduced, the image acquisition speed is improved, and the image acquired by the scanning camera is clear and stable.
Owner:MOTIC CHINA GRP CO LTD
High resolution optical coherence tomography with an improved depth range using an axicon lens
InactiveUS7072045B2Fast scanning speedHigh velocity sensitivityInterferometersUsing optical meansTemporal resolutionImage resolution
In optical coherence tomography (OCT), Axial and lateral resolutions are determined by the source coherence length and numerical aperture of the sampling lens, respectively. While axial resolution can be improved using a broadband light source, there is a trade-off between lateral resolution and focusing depth when conventional optical elements are used. The incorporation of an axicon lens into the sample arm of the interferometer overcomes this limitation. Using an axicon lens with a top angle of 160 degrees, 10 μm or better-lateral resolution is maintained over a focusing depth of at least 6 mm. In addition to high lateral resolution, the focusing spot intensity is approximately constant over a greater depth range.
Owner:RGT UNIV OF CALIFORNIA
Robot three-dimensional scanning device and robot three-dimensional scanning method
InactiveCN107121062ASolve the problems of blind spots in scanning, long scanning time and low scanning accuracyExpand the scope of workUsing optical meansGratingPoint cloud
The invention discloses a robot three-dimensional scanning device and a robot three-dimensional scanning method. The device comprises an MEMS scanning galvanometer laser three-dimensional probe for generating three-dimensional point cloud data, a six-axis machine arm for clamping the MEMS scanning galvanometer laser three-dimensional probe, a turntable for placing a measured object and a controller for controlling the robot and the turntable, wherein the MEMS scanning galvanometer laser three-dimensional probe is arranged at the tail end of the machine arm; and the measured object is placed in the center of the turntable. In comparison with a digital and physical grating technology, the robot three-dimensional scanning device has the advantages of large depth of field, fast scanning speed, small size and high scanning accuracy; the device combines the high-accuracy turntable and the six-degree-of-freedom robot to a seven-degree-of-freedom device, the working range of the machine arm can be increased, flexibility of scanning on a large object can be improved, scanning dead angles can be reduced, and finally, fully-automatic three-dimensional scanning can be realized.
Owner:SUZHOU DEKA TESTING TECH CO LTD
Dynamic scrolling
ActiveUS10719220B2Fast scanningFast scrollingStill image data browsing/visualisationSpecial data processing applicationsGraphicsEngineering
A method, system, and computer program product provide the ability to structure an interactive and dynamic display of hierarchically organized media content. A library of the media content is acquired. The hierarchical structure of the content is graphically represented utilizing text corresponding to the hierarchical levels with a child level represented below and indented from a parent level. The content is graphically represented using (thumbnail) images that are left justified with respect to a highest hierarchical level, and directly below the text corresponding to the containing level. As scrolling of the media content is performed, the display is dynamically updated by sliding the images until all of the representative images have slid off, at which point, the text for the containing level slides under its own parent, leaving text corresponding to sibling levels of the containing level displayed.
Owner:AUTODESK INC
Silicon-based hybrid integration laser radar chip system
ActiveCN109991582AHigh continuous scanning speedFast scanningElectromagnetic wave reradiationNon-linear opticsBeam splitterMulti field
Owner:SHANGHAI JIAOTONG UNIV
Array type parallel laser projection three-dimensional scanning method
The invention discloses an array type parallel laser projection three-dimensional scanning method. The array type parallel laser projection three-dimensional scanning method comprises steps that a laser micro-vibration mirror projection device used for projecting line lasers in different directions and a plurality of array type cameras used for data acquisition are provided; laser cutter separation of each acquired image in different directions is carried out, and the laser cutter centers of the laser cutters in various directions are respectively extracted, and according to a triangle relation among the projection device and the cameras, an object surface three-dimensional coordinate of a line laser position is acquired; the projection device is used to move the line laser on the object surface by one pixel each time, and the above mentioned process of extracting the object three-dimensional coordinate on the laser cutter position is repeated until the three-dimensional coordinate of the whole object surface is acquired by the laser cutter. The laser projection device adopts MEMS scanning vibration mirror laser, and compared with a digital light and physical grating technology, field depth is large, scanning speed is fast, a size is small, and scanning precision is high; and at the same time, the system is used to distribute the cameras in an array, and then the sensitivity to complicated step edge measurement is provided, and then the non-contact, high-speed, and object edge step high precision measurement of the object is realized.
Owner:XIAN CHISHINE OPTOELECTRONICS TECH CO LTD
Magnetic resonance image reconstruction method and device and computer-readable storage medium
ActiveCN109325985AFast scanningStrong acceleration effectImage enhancementReconstruction from projectionResonanceReconstruction method
The invention provides a magnetic resonance image reconstruction method, comprising the following steps of acquiring undersampled k-space data; obtaining a prediction image based on the trained neuralnetwork model and the undersampled k-space data; and generating a reconstructed image based on a compressed sensing algorithm, the undersampled k-space data and the predicted image, wherein the compressed sensing algorithm includes a plurality of constraint terms, at least one of the constraint terms includes the predicted image.
Owner:SHANGHAI UNITED IMAGING INTELLIGENT MEDICAL TECH CO LTD
Chemical mapping using thermal microscopy at the micro and NANO scales
ActiveUS20130134310A1Small sizeReduce impactEmission spectroscopyRadiation pyrometryThermionic emissionLaser probe
A non-destructive method for chemical imaging with ˜1 nm to 10 μm spatial resolution (depending on the type of heat source) without sample preparation and in a non-contact manner. In one embodiment, a sample undergoes photo-thermal heating using an IR laser and the resulting increase in thermal emissions is measured with either an IR detector or a laser probe having a visible laser reflected from the sample. In another embodiment, the infrared laser is replaced with a focused electron or ion source while the thermal emission is collected in the same manner as with the infrared heating. The achievable spatial resolution of this embodiment is in the 1-50 nm range.
Owner:THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY
Vertical type method for processing nozzle cooling channel of liquid-propel land rocket engine
InactiveCN101412122AImprove smoothnessHigh-precision digital processingAutomatic control devicesMeasurement/indication equipmentsData setLaser sensor
The invention relates to a method for vertically processing a cooling passage of a liquid rocket engine thrust jet, which belongs to the processing method field of liquid rocket engine thrust jet. In the invention, the thrust jet adopts a vertical clamp; a single-point laser sensor scans bus bars strip by strip to acquire the actual profile of the thrust jet and a sampled data set to reconstruct the bus bars of the thrust jet strip by strip; the buses of the sampled data set are smoothed strip by strip to acquire a thrust jet smoothed data set; the data set of all the bus bars are compressed to acquire a compressed data set; and a cubic spline is used for performing interpolation to approximate the actual bus bars of the thrust jet. The milling tool position is calculated by dual milling head for symmetrical milling and high speed back chipping. The method realizes the integration of measurement and processing, finishes the treatments of profile measurement, milling groove and back chipping by one clamping, can satisfy the processing requirements on different physical dimensions and different bus bar linetypes, has high processing efficiency and good consistency, and realizes the digital processing with high efficiency and high precision of the cooling passage of the liquid rocket engine thrust jet.
Owner:DALIAN UNIV OF TECH
Method and device for manufacturing efficient and high-precision composite additive
ActiveCN104190931AShorten forming timeImprove forming efficiencyIncreasing energy efficiencyLight beamMetal powder
The invention discloses a method and device for manufacturing efficient and high-precision composite additive, and the method and device are achieved through composition of a laser beam and an electron beam. In the process of the action of a high energy beam and metal powder, metal powder of a surface outline is scanned and molten through the laser beam, and the surface of a part has a good surface quality. The electron beam melts the internal powder at a high speed to form a part inner cavity so as to reach the highest forming efficiency. The lower portion of the device comprises a powder laying roller, a workbench, a powder conveying cylinder and a working cylinder. The upper portion of the device comprises an electron beam generating device, a laser beam generating device, a bottom plate, two guide rails, two beams, a synchronous belt wheel and a servo motor. The electron beam generating device and the laser beam generating device are respectively integral and move to the forming area alternately to carry out scanning. By means of the method and device, the defects in the single forming technology can be overcome, and the purposes of reasonably controlling the formed microstructural organization and optimizing the comprehensive performance are achieved.
Owner:HUAZHONG UNIV OF SCI & TECH
Handheld laser three-dimension scanning method and handheld laser three-dimension scanning equipment based on mark point trajectory tracking
The invention relates to a handheld laser three-dimension scanning method based on single-camera mark point trajectory tracking. The handheld laser three-dimension scanning method comprises the following steps: (1) identifying and extracting the two-dimension position information of mark points in an image shot by a single camera, pre-judging according to the motion trajectories of the mark points in frames with a preset amount to obtain target positions in a current frame, then searching around the target positions to obtain mark points corresponding to the target positions, and establishing an initial matching relationship between the mark points in the current frame and an original mark point library; (2) utilizing the initial matching relationship to calculate the RT transfer matrix of an instrument from a current relative coordinate system Oc to a world coordinate system Ow, and utilizing a reprojection method for checking the previous initial matching relationship; (3) extracting a laser projection contour in a current frame image, and converting to three-dimensional coordinates under the world coordinate system Ow through the RT transfer matrix. The invention also discloses handheld laser three-dimension scanning equipment. According to the method and the equipment, the requirement for system hardware configuration is reduced, the smoothness during moving and splicing is good, the precision is relatively high, and the cost is relatively low.
Owner:杭州思锐迪科技有限公司
Scanning optical coherent chromatography system from microlens or microprism array
InactiveCN1713020AVertical scan speed increasedLateral scan speed increasedOptical elementsCouplingDetector array
An optical coherent chromatographic system using micro-lens array to carry out scanning consists of light source, collimation lens, splitting prism, fibre coupling unit with multi-path, three micro-lens or micro-prism arrays , quick delay line , detector array and micro-shift device. It is featured as using above devices to change spot light source to be parallel beam , focusing it on object , meeting reflection light of object with reflection light from delay line on splitting prism for generating interference focused to detector array .
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Active phased array weather radar system based on full-digital array
ActiveCN104330801AHigh working reliabilityHigh degree of automationRadio wave reradiation/reflectionICT adaptationRadar systemsWeather radar
The invention relates to an active phased array weather radar system based on a full-digital array. The system comprises a signal processing machine which is used for emitting a wave beam, receiving the wave beam and processing echo data; the signal processing machine is in bidirectional communication with a monitoring terminal and a product terminal through network; the signal processing machine is connected with a first high-speed large-capacity wavelength division multiplexing optical fiber communication machine through first optical fibers; the first high-speed large-capacity wavelength division multiplexing optical fiber communication machine is connected with a second high-speed large-capacity wavelength division multiplexing optical fiber communication machine through second optical fibers; a collector ring sleeves the second optical fibers; the second high-speed large-capacity wavelength division multiplexing optical fiber communication machine is in bidirectional communication with a correcting branch and a full-digital array module; the full-digital array module is connected with an antenna array through a correction network. According to the system, a distributive receiving-transmitting assembly is adopted to improve the working reliability of a radar; the electric scanning is performed for the wave beam, so that the flexibility and variation are ensured, a plurality of wave beams can be received at the same time, and the scanning is fast; the system can work in a plurality of working modes, and the temporal-spatial resolution is high.
Owner:ANHUI SUN CREATE ELECTRONICS
Scanning method and device for microscopic section
ActiveCN102427502AFast scanningReduce control precision requirementsMicroscopesPictoral communicationImage sensorLight source
The invention relates to a scanning method and device for microscopic sections; the scanning device comprises a computer, an automatic three-dimensional moving platform, a light source, section support frame and an imaging system, wherein the light source, the section support frame and the imaging system are sequentially and coaxially arranged; the automatic three-dimensional moving platform is connected with the section support frame or the imaging system and is controlled by a controller to drive the sections or the imaging system to move in a three-dimensional direction; and the controller and the imaging system are respectively and electrically connected with the computer. The scanning method comprises the following steps of; (1) dividing the sections to be measured along longitudinal and transverse directions; (b) leading the sections to continuously pass through an object field of the imaging system; (c) exposing the imaging system; (d) collecting image data; (4) storing data; (f) judging whether the scanning of a current scanning band is finished; (g) combining and storing data; and (h) judging whether the scanning of all scanning bands is finished. The scanning method has the advantages: during scanning, the sections continue to move relative to the imaging system in high speed; the requirement for control accuracy is low, thereby the cost is reduced; and a common planar array image sensor is directly used for establishing a focusing model without an additional auxiliary focusing device, thereby more cost is reduced.
Owner:MOTIC CHINA GRP CO LTD
Fast forming method of fusion of metal powder of three beams of laser compound scanning
ActiveCN101607311BSlow down drastic changesUniform temperature fieldIncreasing energy efficiencyLength waveMetal powder
Owner:HUAZHONG UNIV OF SCI & TECH
Terahertz wave fast imaging scanner
InactiveCN101832912AFast imagingReduce volumeMaterial analysis by optical meansOptical elementsRapid imagingImaging modalities
The invention relates to an imaging device for performing large field of view and fast scanning on terahertz waves by using a fast scanning device. The terahertz wave fast imaging scanner is used for scanning objects to be scanned, and comprises a frame scanning lens group, a row scanning lens group, a concave mirror and a terahertz wave detector. The frame scanning lens group is positioned behind the objects to be scanned and is used for longitudinally scanning the objects to be scanned; the row scanning lens group is arranged on a light path behind the frame scanning lens group and is used for transversely scanning the objects to be scanned; the concave mirror is positioned on the light path behind the row scanning lens group and is used for converging the terahertz waves; and the terahertz wave detector is positioned on the light path behind the concave mirror and is used for receiving scanning signals. Due to the adoption of the imaging mode of single point light machine scanning, the terahertz wave fast imaging scanner can realize fast imaging of the field of view, and make the whole imaging system have small volume, low cost and relatively easy manufacture and debugging. The terahertz wave fast imaging scanner can be applied to passive imaging modes, and also can be applied to active imaging modes.
Owner:CAPITAL NORMAL UNIVERSITY +1
Silicon chip surface defect detector capable of classifying defects and defect classifying method
InactiveCN101672801AEasy to detectImplement classificationScattering properties measurementsOptically investigating flaws/contaminationPhotovoltaic detectorsSilicon chip
The invention relates to a silicon chip surface defect detector capable of classifying defects and a defect classifying method. The flat surface of the silicon chip to be detected on a highly reliablesilicon chip working platform is irradiated by a laser from an inclination direction. Circular narrow channel collection and annular narrow channel collection are carried out on scattered lights produced by the silicon chip surface defect by two paraboloidal mirrors with different calibers in a direction near the silicon chip face normal and parallel with silicon chip face. Two photoelectric detectors detect intensities of the collected electrooptical signals in two channels respectively and then take a ratio of two intensities, then compare the ratio with a given threshold value, and at lastthe silicon chip surface defects can be classified. The defect detector has the advantages of simple structure, high sensitivity, fast detecting speed, capability of classifying the defects on the silicon chip surface, etc.
Owner:SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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