Patents
Literature
Hiro is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Hiro

33results about How to "Enhanced tunneling effect" patented technology

Contacting passivation crystalline silicon solar cell structure and preparation method

The invention belongs to the technical field of solar cells and relates to a contacting passivation crystalline silicon solar cell structure and preparation method. Double face polishing of an N or P type crystal silicon wafer is performed and then double face silicon oxide layer or aluminum oxide preparation is performed; than double face golden or silver nano particle preparation is performed; back face non-crystalline silicon N (P) type layer preparation is performed; light receiving face quasi crystalline state P (N) type silicon film preparation is performed; 70 nm thick ITO film and grid electrode is prepared on the P (N) type silicon film; and back face silver film preparation is performed. The invention has beneficial effects that metal nano particles wrapped by a passivation coating realizes an effect of a carrier tunneling channel, so that the carrier tunneling channel effect is improved, the fill factors of a crystalline silicon solar cell can be increased integrally and the surface plasma effect of the metal nano particles realizes an antireflection effect.
Owner:CHANGZHOU UNIV +1

GaAs tunnel junction and preparation method thereof

The invention provides a GaAs tunnel junction and a preparation method thereof. Excellent tunneling performance and a high peak current are achieved, the requirement for a high-power optically-focused multi-junction battery can be well met, and photoelectric conversion efficiency of the battery is promoted. The GaAs tunnel junction comprises a barrier layer, a first doped layer and a second doped layer, wherein the barrier layer, the first doped layer and the second doped layer are arranged on the surface of a GaAs substrate in sequence, and the GaAs substrate, the barrier layer and the first doped layer have the same conduction type. The GaAs tunnel junction is characterized in that if the first doped layer is in an n type and the first adulterant is Te, the second doped layer is in a p type, and the second adulterant is Mg; if the first doped layer is in a p type and the first adulterant is Mg, the second doped layer is in an n type, and the second adulterant is Te.
Owner:SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI +1

Lattice mismatch solar cell containing novel tunneling junction and preparation method thereof

The invention discloses a lattice mismatch solar cell containing a novel tunneling junction and a preparation method thereof. A Ge monocrystal is used as a substrate, and a GaInP nucleation layer, a GaInAs buffer layer, a lattice gradient buffer layer, a first novel tunneling junction, a GaInAs sub cell, a second novel tunneling junction and a GaInP sub cell are grown on the surface of the substrate sequentially from bottom to top. The first novel tunneling junction and the second novel tunneling junction include a layer of degenerate p-type gallium indium nitrogen arsenide (Ga<1-y>In<y>N<x>As<1-x>) and a layer of degenerate n-type gallium indium arsenide (Ga<1-z>In<z>As), the lattice constants of the two layers of materials are respectively consistent with the materials of the adjacent semiconductor layers or the mismatching degree is less than 3%, and the thickness of each layer is 5-100nm. The novel tunneling junction adopted in the invention has better conductivity and light transmission than general tunneling junctions. More importantly, as a rigid material, the novel tunneling junction can filter a lot of threading dislocation and mismatch dislocation, reduce non-radiative recombination, prolong the service life of minority carriers and improve the photoelectric conversion efficiency.
Owner:ZHONGSHAN DEHUA CHIP TECH CO LTD

Non-volatile memory and manufacturing method for the same

The present invention provides a non-volatile memory and a manufacturing method for the same. In the non-volatile memory, a floating gate structure has a first sharp portion and a second sharp portion, and a corner formed by a side surface of the floating gate structure and a part of a top surface of the floating gate structure is not covered by a control gate structure. The corner is connected between the first sharp portion and one end of the second sharp portion. A tunneling dielectric layer of an erasing gate structure covers the first sharp portion, the second sharp portion, and a tip part of the corner.
Owner:NEXCHIP SEMICON CO LTD

Micro-LED epitaxial structure and manufacturing method thereof

The invention provides a micro-LED epitaxial structure and a manufacturing method thereof, the micro-LED epitaxial structure comprises a substrate and also comprises an n-type semiconductor layer, a light-emitting layer and a p-type semiconductor layer which are arranged on the surface of the substrate, and the light-emitting layer comprises an electron deceleration layer, a superlattice active region and a hole aggregation layer. According to the structure, the epitaxial growth structure can be simplified, the light emitting efficiency of a micro-LED is improved, and the application of the micro-LED in the display field is promoted.
Owner:JIANGSU INST OF ADVANCED SEMICON CO LTD

Novel heterojunction photoelectric device based on perovskite and preparation method thereof

PendingCN111900253ASimple processThe fabrication of optoelectronic devices with simple process is simpleFinal product manufactureSolid-state devicesHeterojunctionQuantum efficiency
The invention discloses a novel heterojunction photoelectric device based on perovskite and a preparation method thereof. The photoelectric device comprises a semiconductor substrate and a hafnium dioxide layer located on the upper surface of the semiconductor substrate, a source electrode and a drain electrode are arranged on the upper surface of the hafnium dioxide layer, a perovskite film is arranged on the upper surface of the hafnium dioxide layer and located between the source electrode and the drain electrode, and a gate electrode is arranged on the lower surface of the semiconductor substrate. The photoelectric device disclosed by the invention has the advantages of small size, low cost, high performance, simplicity in manufacturing, high detection sensitivity and ultrahigh external quantum efficiency, and has great application potential in the field of photoelectric devices.
Owner:SHANDONG UNIV

P-GaN ohmic contact electrode and preparation method and application thereof

The invention discloses a p-GaN ohmic contact electrode and a preparation method and an application thereof. The p-GaN ohmic contact electrode comprises a p-GaN material layer which is provided with aheavily doped p-GaN layer. A bottom contact metal layer is formed on the heavily doped p-GaN layer. An upper cap metal layer is formed on the bottom contact metal layer. In the heavily doped p-GaN layer, the doping concentration of Mg is greater than or equal to 1*10<20>cm<-3>. The p-GaN ohmic contact electrode provided by the invention has the ohmic contact characteristic of low specific contactresistivity.
Owner:XI AN JIAOTONG UNIV

Cement soil wall inner inserting rigidity adjustable I-shaped prefabricated pile support structure and construction method thereof

The invention discloses a cement soil wall inner inserting rigidity adjustable I-shaped prefabricated pile support structure. The cement soil wall inner inserting rigidity adjustable I-shaped prefabricated pile support structure comprises a cement soil wall for water stopping and rigidity adjustable I-shaped prefabricated piles arranged in the cement soil wall and used for stopping soil. A concrete crown beam is arranged at the top ends of the rigidity adjustable I-shaped prefabricated piles. The specific value of the short edge to the long edge of a pile body of each rigidity adjustable I-shaped prefabricated pile ranges from 0.55 to 0.6. The concrete strength grade of the rigidity adjustable I-shaped prefabricated piles ranges from C55 to C80. The adaptive stratum range of the cement soil wall is wide, discreteness is small, strength is high, up-down strength is uniform, and the water isolation performance is good. The support structure is easy to operate, and construction is convenient, fast and reliable. Meanwhile, the characteristics that the concrete strength grade of the rigidity adjustable I-shaped prefabricated piles is high, and the prestress can be adjusted according to the field are brought into full play, the purposes of shortening of the construction period and reducing the project manufacturing cost are achieved, accordingly, the usage amount of concrete and steel can be reduced, and the safety requirement can be met.
Owner:南京市测绘勘察研究院股份有限公司

Manufacturing method for split-gate flash memory

The invention provides a manufacturing method for a split-gate flash memory, and the method comprises the following steps: providing a semiconductor substrate, wherein a protective layer, a polycrystalline silicon material layer and a dielectric layer are sequentially formed on the semiconductor substrate; etching the dielectric layer to form a first trench; etching the polycrystalline silicon material layer in the first trench, so that the surface of the polycrystalline silicon material layer is in an arc shape; removing the remaining dielectric layer; forming a functional layer on the polycrystalline silicon material layer; etching the functional layer to form a second trench in the functional layer; and etching the polycrystalline silicon material layer in the second trench until the protective layer is exposed to form a floating gate layer, wherein a tip structure is formed at the vertex angle of the floating gate layer. The tip structure enables the electric field intensity to beimproved from the floating gate layer to a word line, so that electrons in the floating gate layer easily penetrate through the tunneling oxide layer from the tip structure to the word line through atunneling effect under an electric field with high intensity, thereby improving the tunneling effect, and improving the erasing efficiency.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Quickly-opened floating island device and manufacturing method thereof

The invention relates to a quickly-opened floating island device and a manufacturing method thereof in the technical field of semiconductors, the quickly-opened floating island device comprises a surface layer, a bottom layer and a drift region, the drift region comprises a plurality of groups of substrate layers and a plurality of groups of floating island layers, one group of floating island layers is arranged between every two groups of substrate layers, or one group of substrate layers is arranged between every two groups of floating island layers, and the surface layer is arranged between the surface layer and the bottom layer. A heavily-doped inversion region is arranged in the floating island layer, so that the floating island device has the advantage of eliminating the obstruction of space charges to current, and the problem that the conduction capability of the floating island device with an opposite type of doping region in a drift region cannot be recovered under relatively low bias voltage is solved.
Owner:ZHEJIANG UNIV

Light emitting diode and manufacturing method thereof

The invention provides a light emitting diode which comprises a self-supporting substrate layer, and an n-type semiconductor layer, a light emitting layer and a p-type semiconductor layer which are arranged on the bottom surface of the self-supporting substrate layer. The light emitting layer comprises an electron expansion layer, a superlattice active region and a hole enhancement layer. According to the structure, the light emitting efficiency under low current density can be improved.
Owner:JIANGSU INST OF ADVANCED SEMICON CO LTD

Non-volatile memory and manufacturing method for the same

The present invention provides a non-volatile memory and a manufacturing method for the same. In the non-volatile memory, a floating gate structure has a first sharp portion and a second sharp portion, and a corner formed by a side surface of the floating gate structure and a part of a top surface of the floating gate structure is not covered by a control gate structure. The corner is connected between the first sharp portion and one end of the second sharp portion. A tunneling dielectric layer of an erasing gate structure covers the first sharp portion, the second sharp portion, and a tip part of the corner.
Owner:NEXCHIP SEMICON CO LTD

Test bed and method for static detection of abnormal vibration of cutter of full-face tunnel boring machine

The invention belongs to the technical field of full-face tunnel boring machine tool anomaly detection. The invention discloses a static detection test bed for abnormal vibration of a cutter of a full-face tunnel boring machine. The static detection test bed comprises a container body, a supporting door frame, a cutter box seat, a cutter conveying trolley, a protective cover, a warm air unit, a spraying unit, a control cabinet and a detection sensor, a lifting unit is arranged between the cutter box seat and the supporting door frame, and a vibration motor is arranged on the cutter box seat; the cutter conveying trolley is arranged in the container body in a walking mode, a cutter supporting tool is arranged on the cutter conveying trolley, and a crane is arranged on the side portion of the supporting door frame. The protective cover is arranged on the outer sides of the supporting door frame and the cutter box seat in a covering manner; and the detection sensor is used for acquiring detection data of the cutter. The invention further discloses a static detection method for abnormal vibration of the cutter of the full-face tunnel boring machine. The vibration detection signals of different abnormal damaged cutters are collected, accurate recognition of the cutters is facilitated, the tunneling performance of the tunneling machine is optimized, and the service life of the cutters is prolonged.
Owner:CHINA RAILWAY ENG EQUIP GRP TECH SERVICE CO LTD +1

Fluid-driven tunneling device

The invention discloses a fluid-driven tunneling device, which uses fluid such as hydraulic oil, water or compressed air as energy to drive a rotating device to move. With a simple structure, large torque, high rotating speed, high transmission efficiency, low energy consumption and small vibration, the device can meet the requirements of the tunneling device on torque, rotating speed and runningstability well, at the same time, the fluid power device comprises an outer ring and a core body, wherein at least one-step or more-step secondary flushing channels are arranged between a nozzle and an exhaust port of the outer ring surface of the core body, the fluid enters from an inlet channel, is ejected step by step through the nozzle of the core body and the secondary flushing channels, actson at least two driving concave parts in the circumferential direction of the outer ring, generates thrust on the driving concave parts to push the outer ring to rotate and do work, and realizes power output; and finally, the fluid is discharged through the exhaust port of the core body from an exhaust channel.
Owner:TRANF TECH XIAMEN CO LTD

Monocrystalline silicon battery and its preparation method

The invention relates to the field of solar cells, and provides a single crystal silicon cell and a preparation method thereof. The preparation method comprises the following steps: sequentially adopting a texturing process, a diffusion process and an etching process to treat the silicon substrate; depositing SiO on the front side of the silicon substrate 2 1. Coating the back side to obtain a processed silicon substrate; using a mask method to selectively sputter silver on the first predetermined area on the front side of the processed silicon substrate to form sputtering pits deposited with a silver-silicon doped layer ; remove the mask on the front side of the processed silicon substrate; carry out screen printing on the silver-silicon doped layer to form silver electrode grid lines; use mask method to selectively remove the first preset on the front side of the processed silicon substrate A SiNx layer is deposited in areas other than the area; and the processed silicon substrate deposited with the SiNx layer is sintered. The invention avoids the problem of large carrier recombination caused by the direct contact between the silver electrode grid line and the silicon substrate, and improves the open-circuit voltage, short-circuit current and photoelectric conversion efficiency of the monocrystalline silicon battery.
Owner:BEIJING NORTH HUACHUANG VACUUM TECH CO LTD

Coal mine roadway tunneling device based on big data

The invention belongs to the technical field of coal mining equipment, and provides a coal mine tunnel tunneling device based on big data. The coal mine tunnel tunneling device comprises a base, a driving structure is arranged in the base, and a buffer structure, a lifting structure and a tunneling structure are sequentially arranged on the upper part of the base. The tunneling structure comprises a supporting table, the supporting table is rotationally connected with a main rotating shaft, one end of the main rotating shaft is connected with a first rotating driving piece, the other end of the main rotating shaft is fixedly connected with a rotating seat, a plurality of branch rotating shafts are rotationally connected with the rotating seat, and spiral blades are arranged at the ends, away from the rotating seat, of the branch rotating shafts; and rotating wheels fixedly sleeve the ends, close to the rotating seat, of the branch rotating shafts, transmission parts are wound on the rotating wheels, and one branch rotating shaft is connected with a second rotation driving part. Therefore, tunneling operation at different heights can be carried out in a mine hole, and the tunneling effect is good; and meanwhile, the safety and stability of the tunneling device are high, and the service life of the tunneling device is prolonged.
Owner:山东能源集团鲁西矿业有限公司

PIN diode based on n-type gallium oxide and p-type diamond and preparation method thereof

The invention discloses a PIN diode based on n-type gallium oxide and p-type diamond, which comprises an n +-Ga2O3 substrate layer, an n-Ga2O3 layer, a p + type diamond layer, a p + + type diamond layer, a cathode layer and an anode layer, and is characterized in that the cathode layer, the n +-Ga2O3 substrate layer, the n-Ga2O3 layer and the p + type diamond layer are sequentially arranged from bottom to top, the p + + type diamond layer is arranged on the upper surface of the p + type diamond layer, a plurality of grooves are formed in the p + + type diamond layer, and the anode layer covers the interiors of the grooves and the upper surface of the p + + type diamond layer; the doping concentration of the n-Ga2O3 layer is smaller than the doping concentration of the n +-Ga2O3 substrate layer, and the doping concentration of the p + + type diamond layer is larger than the doping concentration of the p + type diamond layer. According to the PIN diode structure based on the n-type gallium oxide and the p-type diamond, the voltage resistance of the PIN diode can be enhanced, the on resistance is reduced, the reverse leakage current is reduced, the heat conduction performance is improved, and the reliability of a device is improved.
Owner:XIDIAN UNIV

Coal mine roadway angle adjusting type tunneling system

The invention is suitable for the technical field of coal mining equipment, and provides a coal mine roadway angle adjusting type tunneling system. The tunneling system comprises a base, wherein a driving structure is arranged in the base, a buffer structure, an angle adjusting structure and a tunneling structure are sequentially arranged on the upper portion of the base, the angle adjusting structure comprises an angle adjusting plate, the angle adjusting end of the angle adjusting plate is movably connected with an arc-shaped groove of the auxiliary adjusting plate, a plurality of angle adjusting assemblies are arranged at the bottom of the angle adjusting plate, the tunneling structure comprises a supporting table, the supporting table is rotationally connected with a main rotating shaft, one end of the main rotating shaft is fixedly connected with a rotating seat, a plurality of branch rotating shafts are rotationally connected to the rotating seat, and the ends, away from the rotating seat, of the branch rotating shafts are provided with spiral blades. According to the tunneling system, tunneling operation at different heights can be conducted in the mine, the tunneling effectis good, meanwhile, the safety and stability of the tunneling system are high, and the service life of the tunneling system is prolonged.
Owner:LINYI MINING GRP CO LTD

Rotary excavating device and rotary excavating method

The invention discloses a rotary excavating device. The rotary excavating device comprises a slicing mechanism and a conical rotary machine head cap, wherein a slurry inlet and outlet hole is formed in the side wall of the rotary machine head cap, a rotatable and telescopic connector is arranged at the tip end of the rotary machine head cap, the slicing mechanism comprises a rotary middle shaft and at least two strip-shaped slicing knives, one end of the rotating middle shaft is detachably connected with the connector, the other end of the rotating middle shaft is provided with a connecting part used for being connected with a drill rod, one end of each slicing knife is fixed to the rotating middle shaft, the other end of each slicing knife inclines towards the rotating machine head cap, and the slicing knives are distributed around the rotating middle shaft at intervals. The invention discloses a rotary excavating method. The rotary excavating method comprises the following steps that the rotary excavating device and a directional drilling machine are installed, the directional drilling machine works; connection is carried out; excavation construction is carried out; and a tube push bench retreats. According to the rotary excavating device and the rotary excavating method, a plastic drainage plate can be cut up, a pipe jacking machine tool bit is prevented from being stuck, and the construction cost is reduced.
Owner:SINOHYDRO BUREAU 8 CO LTD

A kind of lattice-mismatched solar cell containing novel tunneling junction and its preparation method

The invention discloses a lattice mismatch solar cell containing a novel tunneling junction and a preparation method thereof. A Ge monocrystal is used as a substrate, and a GaInP nucleation layer, a GaInAs buffer layer, a lattice gradient buffer layer, a first novel tunneling junction, a GaInAs sub cell, a second novel tunneling junction and a GaInP sub cell are grown on the surface of the substrate sequentially from bottom to top. The first novel tunneling junction and the second novel tunneling junction include a layer of degenerate p-type gallium indium nitrogen arsenide (Ga<1-y>In<y>N<x>As<1-x>) and a layer of degenerate n-type gallium indium arsenide (Ga<1-z>In<z>As), the lattice constants of the two layers of materials are respectively consistent with the materials of the adjacent semiconductor layers or the mismatching degree is less than 3%, and the thickness of each layer is 5-100nm. The novel tunneling junction adopted in the invention has better conductivity and light transmission than general tunneling junctions. More importantly, as a rigid material, the novel tunneling junction can filter a lot of threading dislocation and mismatch dislocation, reduce non-radiative recombination, prolong the service life of minority carriers and improve the photoelectric conversion efficiency.
Owner:ZHONGSHAN DEHUA CHIP TECH CO LTD

P-type monocrystalline silicon battery front film coating structure and preparation method thereof

The invention belongs to the field of solar cells in the photovoltaic industry and particularly relates to a P-type monocrystalline silicon battery front film coating structure and a preparation method thereof. The method comprises the steps of texturing, diffusion, etching, front SiO<2> layer deposition, back film coating, front masking, front doped P polycrystalline silicon (n-Si) deposition, front mask removal, front SiN<x> layer deposition, silk-screen printing and metallization. According to the prepared P-type monocrystalline silicon battery front film coating structure, a layer of dopedP polycrystalline silicon is added to a front electrode pattern, the doped polycrystalline silicon layer can achieve a good tunneling effect on a battery front in combination with a thin oxidized layer, and holes in a battery are prevented from migrating to the front surface; and a front metal electrode makes contact with the doped polycrystalline silicon layer, the problem that surface recombination is high due to direct contact between the metal electrode and a silicon substrate is avoided, Voc and Isc of the battery are improved, and therefore the conversion efficiency of the battery is effectively improved.
Owner:SUZHOU TALESUN SOLAR TECH CO LTD

Underground roadway construction method suitable for double-shield tbm tunneling

The invention relates to the technical field of roadway engineering, in particular to an underground roadway construction method suitable for double-shield tbm tunneling, which comprises the following steps of: firstly, circularly starting a hydraulic pump station, immediately rotating a cutter head after the stability is determined, adjusting the posture of a tunneling machine, slowly increasing a pressure knob of a thrust cylinder to a position suitable for normal cutting of the lithology, and starting tunneling; after the propelling displacement reaches the rated displacement, the propelling pressure is zeroed, then rotation of the cutterhead is stopped, step changing is prepared after the rotating speed of the cutterhead is zero, during step changing, the front shield stabilizer is stretched out, the supporting shoe is withdrawn, then the propelling oil cylinder retracts to pull the tight supporting shield to move forwards, and when the propelling displacement becomes the initial value, step changing is finished, and the next tunneling cycle is prepared to be started. By means of the structure, under the condition that the lithology of the TBM is soft and the shield supporting device cannot provide strong jacking force, additional jacking force is still provided for the whole equipment, it is ensured that the equipment can continue to advance under the condition that the lithology is slightly soft, and the working efficiency of the device is effectively improved.
Owner:SHAANXI ZHENGTONG COAL IND CO LTD

Solar cell and manufacturing method thereof

The embodiment of the invention provides a solar cell and a manufacturing method thereof, a plurality of stacked sub-cells and a tunnel junction structure located between adjacent sub-cells are included, the tunnel junction structure comprises a first superlattice layer, a tunnel junction layer and a second superlattice layer which are stacked, the first superlattice layer and the second superlattice layer can restrain doping ions in the tunneling junction layer from diffusing into adjacent sub-cells, so that the doping concentration of the tunneling junction layer is prevented from being reduced, the characteristic of high doping of the tunneling junction layer is maintained, the tunneling effect of the tunneling junction layer is good, the tunneling current is large, and the large-current transportation requirement is met. Moreover, the first superlattice layer and the second superlattice layer can effectively inhibit the doping ions in the tunnel junction layer from diffusing into the adjacent sub-cells, and can also prevent the doping concentration of the tunnel junction layer from being reduced, thereby preventing the loss of the open-circuit voltage of the solar cell from being increased by the tunnel junction layer.
Owner:YANGZHOU CHANGELIGHT

Multi-claw drill suitable for loosening earth surface soil texture formed holes

The invention discloses a multi-claw drill suitable for loosening earth surface soil texture formed holes. The multi-claw drill comprises a drill bit body and a drill handle. Front claws are arranged on the front portion of the drill bit body, middle claws are arranged on the periphery of the middle of the drill bit body, and rear claws are arranged on the periphery of the drill bit body and close to the drill handle. The distance between the top end of the each rear claw and the axis of the drill bit body is larger than that between the top end of each middle claw and the axis of the drill bit body. The distance between the top end of each middle claw and the axis of the drill bit body is larger than that between the top end of each front claw to the axis of the drill bit body. The front claws, the middle claws and the rear claws are axially arranged on the drill bit body in a staggered mode. According to the multi-claw drill suitable for loosening the earth surface soil texture formed holes, the front claws have positioning and guiding functions in the drilling process, the middle claws have the heading hole-forming function, and the rear claws have the function of expanding the holes. The defect that a single-layer drill claw is only suitable for forming holes in surface layer hard rock and soil is overcome, due to the fact that the drill claws are layered and staggered, the heading performance of the drill claws is greatly improved, and construction quality and construction work efficiency are greatly improved in the construction work of slope support and hole forming of the loose earth surface soil texture.
Owner:CHINA METALLURGICAL CONSTR ENG GRP

Epitaxial structure of blue-green light chip for phototherapy and preparation method thereof

The invention relates to the technical field of electronic device manufacturing, and particularly discloses an epitaxial structure of a blue-green light chip for phototherapy and a preparation method thereof. The epitaxial structure of the blue-green light chip for phototherapy comprises a substrate, and a reflection DBR layer, a first n-type GaN layer, a first quantum well layer, a first p-type GaN layer, an emergent DBR layer, a tunnel junction and a GaN-based LED epitaxial wafer which are sequentially arranged on the substrate, the preparation method comprises the step of sequentially generating the reflection DBR layer, the first n-type GaN layer, the first quantum well layer, the first p-type GaN layer, the emergent DBR layer, the tunnel junction and the GaN-based LED epitaxial wafer on the substrate. The epitaxial structure of the blue-green light chip for phototherapy has the advantages of relatively large light emitting angle and relatively narrow half-wave width; in addition, the preparation method provided by the invention is helpful for reducing light loss.
Owner:BEIJING TRUWIN OPTOELECTRONICS

Gold-free ohmic contact radio frequency device based on two-step annealing and preparation method thereof

The invention relates to a two-step annealing-based gold-free ohmic contact radio frequency device and a preparation method thereof, and the device comprises a first semiconductor lamination layer which is arranged on a substrate and comprises a nitride channel layer; the source electrode, the second semiconductor lamination layer and the drain electrode are arranged on the first semiconductor lamination layer in the same layer; the second semiconductor lamination layer comprises an insertion layer arranged on the nitride channel layer and a nitride barrier layer arranged on the insertion layer; the grid electrode is arranged on the nitride barrier layer; the source electrode and the drain electrode comprise a contact layer, a covering layer, a barrier layer and a cap layer which are sequentially stacked, the contact layer is formed by circularly stacking a low-work-function metal M sub-layer and a metal Al sub-layer, and the first sub-layer and the last sub-layer are metal M. The annealing alloy temperature is reduced, the problem of high on-resistance is improved, the cut-off frequency and the maximum oscillation frequency of the device are improved, and a process line is prevented from being polluted by formed impurities.
Owner:SOUTH CHINA NORMAL UNIVERSITY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products