Method for preparing tunneling crystal silicon solar cell
A technology of silicon solar cells and manufacturing methods, which is applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problems of difficult promotion, high process cost, surface dead zone, etc., and achieve reduction of indirect material costs, simplification of process flow, and reduction of The effect of process cost
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Embodiment 1
[0020] Step 1: According to the preparation process of the existing crystalline silicon solar cell, the p-type polycrystalline silicon wafer is cleaned, and the surface is made of suede;
[0021] Step 2: Put the p-type polysilicon wafer into the PECVD reaction chamber, pass through silane and oxygen, and deposit a layer of silicon dioxide nanoparticle film on the front surface of the p-type polysilicon substrate with textured structure at room temperature;
[0022] Step 3: Make a back aluminum electrode on the back surface of the battery by screen printing and sintering process;
[0023] Step 4: Deposit a layer of ITO film on the front surface covered with the silicon dioxide nanoparticle film by sputtering technology, as the front electrode of the battery, and complete the battery production.
Embodiment 2
[0025] Step 1: According to the preparation process of the existing crystalline silicon solar cell, clean the n-type monocrystalline silicon wafer, and make the surface suede;
[0026] Step 2: preparing a silicon nitride anti-reflection film on the front surface with a textured structure by using PECVD technology;
[0027] Step 3: Put the n-type single-crystal silicon wafer with silicon nitride deposited on the front surface into another PECVD reaction chamber, pass through silane and oxygen, and deposit a layer of two on the back surface of the n-type single-crystal silicon at room temperature. Silicon oxide nanoparticle film;
[0028] Step 4: Use screen printing process to screen-print silver paste grid lines on the front surface of the battery, and form front grid electrodes through high-temperature sintering process;
[0029] Step 5: Deposit a layer of ITO thin film by sputtering technology on the back surface covered with silicon dioxide as the back electrode of the batt...
Embodiment 3
[0031] Step 1: According to the preparation process of the existing crystalline silicon solar cell, the n-type polycrystalline silicon wafer is cleaned, and the surface is made of suede;
[0032] Step 2: preparing a silicon nitride anti-reflection film on the front surface with a textured structure by using PECVD technology;
[0033] Step 3: Put the n-type polysilicon wafer with silicon nitride deposited on the front surface into another PECVD reaction chamber, pass through silane and oxygen, and deposit a layer of silicon dioxide nanoparticles on the back surface of the n-type polysilicon at room temperature membrane;
[0034] Step 4: screen-print silver paste grid lines on the front surface of the battery by screen printing process, and form the front grid electrode by high-temperature sintering process.
[0035] Step 5: Deposit a layer of ITO film on the back surface covered with silicon dioxide by sputtering technology as the back electrode of the battery, and continue to...
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