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603 results about "Microchannel plate detector" patented technology

A micro-channel plate (MCP) is a planar component used for detection of single particles (electrons, ions and neutrons) and low intensity impinging radiation (ultraviolet radiation and X-rays). It is closely related to an electron multiplier, as both intensify single particles or photons by the multiplication of electrons via secondary emission. However, because a microchannel plate detector has many separate channels, it can additionally provide spatial resolution.

Device for rapid detection and identification of single microorganisms without preliminary growth

This invention describes a device consisting of a micro channel plate, filter, and porous holder for filter, which is substituted by a pure agar block during method performance, and supportive structural elements. The device is intended for rapid detection and / or identification of microorganisms. Microorganisms are trapped by filtration in long (diameter / length=1 / 10-1 / 100), cylindrical, parallel, micro-channels that are open from both sides and attached to a filter from one side. A micro channel plate houses a multiplicity of micro channels (possible diameter of each channel=1-30 μm, length 100-1000 μm, and number on centimeter2−100,000-1,000,000). The micro channel plate with cells trapped on the surface of the filter is attached to an agar block impregnated by artificial substrate(s) so that the molecules of the artificial substrates will fill all micro channels. Trapped cells produce colored or fluorescent molecules from artificial substrates. These molecules are collected in the very small volume of a micro channel. The extremely small volume of a micro channel (1 / 25 million part of milliliter) allows it to collect a detectable concentration of color or fluorescent substances in a very short time (several minutes). Even one cell from a filtrated sample can be detected by the enzyme—artificial substrate method and / or identified by enzyme immunoassay.
Owner:NANOLOGIX INC

Integrated liquid to air conduction module

An integrated cooling system for cooling systems such as laptops or subsystems such as a graphics card is disclosed. An integrated cooling system includes a first layer having a contact area configured for coupling to a heat source, wherein the first layer has a fluid path passes adjacent to the contact area where the heat source is in thermal contact with first layer. Coupled to the first layer is a second layer to which a number of air fins are attached. The invention includes a pump that is connected to the fluid path forming a closed path for circulating a fluid through the first layer. Within the first layer, the fluid path will contain a plurality of fluid fins which control the flow of a fluid within the fluid path. Within the fluid path, a structure providing a double-counter flow adjacent to one or more electronic devices. Additionally the fluid path can include a microchannel plate structure. The system can include a includes a programmable controller connect the an air-mover, pump and temperature sensing device. A reservoir can be connected to the fluid path.
Owner:VERTIV CORP

Low-photon flux image-intensified electronic camera

ActiveUS20060081770A1Low backgroundZero effective read noiseSolid-state devicesMultiplier circuit arrangementsGallium arsenide phosphidePhotocathode
A low-photon flux image-intensified electronic camera comprises a gallium arsenide phosphide (GaAsP) photocathode in a high vacuum tube assembly behind a hermetic front seal to receive image photons. Such is cooled by a Peltier device to −20° C. to 0° C., and followed by a dual microchannel plate. The microchannels in each plate are oppositely longitudinally tilted away from the concentric to restrict positive ions that would otherwise contribute to the generation high brightness “scintillationnoise events at the output of the image. A phosphor-coated output fiberoptic conducts intensified light to an image sensor device. This too is chilled and produces a camera signal output. A high voltage power supply connected to the dual microchannel plate provides for gain control and photocathode gating and shuttering. A fiberoptic taper is used at the output of the image intensifier vacuum tube as a minifier between the internal output fiberoptic and the image sensor.
Owner:STANFORD PHOTONICS

Long Range Acquisition and Tracking SWIR Sensor System Comprising Micro-Lamellar Spectrometer

A sensor system is provided having a precision tracking sensor element and a micro-lamellar spectrometer for determining the wavelength of an electromagnetic source such as a laser designator source. Acquisition sensor elements may be provided and mounted on a rotating base element that rotates about a first axis. The precision tracking sensor elements may be mounted on a hinged or pivoting element or gimbal on the housing and provided with drive means to permit a user to selectively manually or automatically direct it toward a scene target of interest detected by the acquisition sensor elements. At least one of the imaging elements in the precision tracking sensor or acquisition sensors is stacked micro-channel plate focal plane array element.
Owner:IRVINE SENSORS +1

LIDAR System Comprising Large Area Micro-Channel Plate Focal Plane Array

A sensor system is provided comprising a precision tracking sensor element and one or more acquisition sensor elements. The acquisition sensor elements may be mounted on a rotating base element that rotates about a first axis. The precision tracking sensor elements may be mounted on a hinged or pivoting element or gimbal on the housing and provided with drive means to permit a user to selectively manually or automatically direct it toward a scene target of interest detected by the acquisition sensor elements. At least one of the imaging elements in the precision tracking sensor or acquisition sensors is stacked micro-channel plate focal plane array element.
Owner:PFG IP +1

Contact-field optical microscope

A broad-spectrum, high spatial and time resolution contact-field optical microscope comprises a fiber optical taper, a vacuum chamber, a photocathode, a magnetic lens photoelectron image enlarger, a micro-channel plate image intensifier, a phosphor screen and a CCD. Sample is placed directly in contact with a smaller sampling face of the optical taper. Light which is emitted, reflected or transmitted by the sample is launched into each of the fiber core ends on the sampling face and conveyed by the optical fibers to a larger imaging face of the optical taper, thereby presenting an enlarged image at the imaging face. The image is converted into a photoelectron image by photocathode which is deposited on the surface of the imaging face. The photoelectron image is further enlarged by magnetic lenses and intensified by micro-channel plate. The enlarged and enhanced electron image is displayed on phosphor screen and coupled through faceplate to CCD.
Owner:YU BI

Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials

A method for fabricating a sensor for chemical and / or biological materials, comprising steps of providing a wafer comprising a plurality of cantilever assemblies, each of the assemblies comprising a cantilever member and a micro-channel plate bonded to the cantilever member, the micro-channel plate further comprising a micro-channel, functionalizing each of the cantilevers by directing a flow of a plurality of functionalizing materials through the micro-channels, and dicing the wafer into a plurality of the sensors. Each of the cantilever assemblies comprises substrate comprising control and sense electrodes deposited on its top side and scribe marks etched on its back side; a cantilever member comprising a cantilever, a seed layer and a contact pad formed on top side of the cantilever member; and the micro-channel plate comprises a micro-channel housing defining the micro-channel etched through the housing, wherein the back side of the cantilever member is bonded to the substrate and the micro-channel plate is bonded to said top side of the cantilever member. Control electronics are incorporated into the substrate for a completely integrated design.
Owner:HRL LAB

Microchannel plate-fin type water vapour reforming reactor for hydrogen production

The invention discloses a microchannel plate-fin type water vapour reforming reactor for hydrogen production, wherein the main unit is a microchannel plate-fin structure, with a plurality of sealing heads through soldering, the reactor consists two combustion chambers, a reforming chamber and two gasification chambers, whereint he hydrogen-rich gas and air are subject to catalytic combustion reaction in the combustion chamber, discharging a vast amount of heat, which is transferred to the reforming chamber and the two gasfication chambers through a heat guide board, the raw material liquid first enters the two gasification chambers of the hydrogen production reactor, then enters the reforming chamber after being gasified, finally is reformed in the reforming chamber to obtain gaseous mixture of hydrogen gas that meets requirement.
Owner:KAILING CHEM ZHANGJIAGANG CO LTD

Matrix auxiliary laser decomposition-absorption-particle bundle collision decomposition flying time mass spectrograph

A base material assisting laser desorption-particle beam collision dissociation time-of-flight mass spectrometer relates to a mass spectrograph and provides a time-of-flight mass spectrometer obviously decreasing noise disturbance and improving mass resolution. The invention is provided with a cavity, a sample introduction probe rod, a preposition and a postposition mesh units, a particle beam generator, a multi-polar rod, a particle beam detector, a microchannel plate electron multiplier, a laser and a focusing lens. The sample introduction probe rod, the preposition mesh unit, the postposition mesh unit, the particle beam generator, the multi-polar rod, the particle beam detector, the microchannel electron multiplier are arranged inside the cavity in turn. The cavity and the sample introduction probe rod are coaxial. The axle wire of the postposition mesh unit is coaxial with the particle beam generator, the multi-polar rod and the particle beam detector. The cavity is provided with a quartz window for laser in, a vacuum opening for extraction and a valve for sample introduction probe rod in and out on the wall. The sample introduction probe rod is provided with a sampling fixing component on the top end. The laser and the focusing lens are arranged outside the cavity.
Owner:XIAMEN UNIV

Single photon counting formatter

The invention relates to a single photon counting and imaging detection device. A high-voltage power supply of the device is connected with a micro-imaging reinforced tube through a high tension lead; a display, an image processing device and a printer are connected with a computer respectively; an anode collector is arranged between the micro-imaging reinforced tube and a preamplifier; the anode collector comprises a substrate, an electrode plated on the substrate and a signal lead; an anode is connected with the preamplifier through the signal lead; and the micro-imaging reinforced tube comprises a photocathode and a microchannel plate connected with the photocathode which are arranged sequentially along a light path. The device has the characteristics that the device can read out a time mark for arriving time and a general image of integral in a period, realize the single photon counting and two-dimensional imaging detection of an extremely-weak object, has the function of single photon counting, and can perform two-dimensional imaging on the extremely-weak luminous object. The device has the advantages of large area array, high sensitivity, low dark count, high resolution factor, good imaging linearity and the real-time measurement and processing.
Owner:陕西光电子先导院科技有限公司

Nitration method for synthesizing dinitrotoluene in one step, and microchannel reactor

ActiveCN101544567AHigh selectivityIncrease space-time productivityProductsReagentsMass ratioNitration
The invention relates to one-step dinitrotoluene synthesis in a microchannel reactor. The method comprises the steps of taking toluene and mixed acid of nitric acid / sulfuric acid (n / s) as initial reaction materials, inputting material flow synchronously into a microreactor through a metering pump and finishing mixed mass transfer and reaction in a reaction channel. The substance ratio of n to s in the reactive mixed acid is 0.1 to 1.0, and the mass ratio of water is less than 15 percent. The liquid hourly space velocity in the reactor is 500 to 50,000 h<-1>. The microchannel reactor adopts a stainless steel flat-plate structure which comprises fixed pressing-sealing plates, a microchannel plate, a raw-material inlet, a product outlet, as well as a temperature-control pore channel and a thermal-couple measurement-control jack which are positioned on two sealing plates. The method is continuously operated under a technological condition with medium / strong nitrating acid, and is safe in process. The conversion rate of the toluene in the reactor at an operation temperature between normal temperature and 80 DEG C is higher than 98 percent, and the yield of dinitrotoluene is higher than 95 percent, wherein the ratio of two main isomer components, namely 2,4-dinitrotoluene and 2,6-dinitrotoluene, is more than 4 and can be nearly 5 under optimum conditions.
Owner:DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI

Multi-layer photon counting electronic module

A multilayer electronic module for photon counting such as in the solar blind region of the ultraviolet electromagnetic spectrum is provided.The device comprises a photocathode for detecting photons and generating an electron output, a micro-channel plate for receiving the output electrons emitted from the photocathode in response to the photon input and amplifying same, readout circuitry and one or more bit-counting circuit layers used to count the electron output of the micro-channel plate.
Owner:PFG IP +1

Photomultiplier of electrostatic focusing micro-channel plates

The invention discloses a photomultiplier of electrostatic focusing micro-channel plates. The photomultiplier comprises a photocathode, an electron multiplier, an anode, a focusing electrode, a power supply electrode and a supporting post for supporting the focusing electrode, the electron multiplier and the anode, the focusing electrode, the electron multiplier and the anode are arranged in a glass vacuum container, and a signal lead of the anode and the power supply electrode penetrate through the glass vacuum container to be connected with an external circuit. The photomultiplier is characterized in that the centers of the focusing electrode, the electron multiplier and the anode are coaxial, the electron multiplier comprises the two pairs of micro-channel plates arranged in parallel, and certain gaps are reserved between the micro-channel plates. Compared with the prior art, all stages of voltages of the micro-channel plates are independently adjusted, and high gains and good photoelectron spectra are achieved.
Owner:INST OF HIGH ENERGY PHYSICS CHINESE ACAD OF SCI +2

Glass for manufacturing micro-channel plate glass matrix

InactiveCN101913765AWill not deformGood aperture precisionTO-18Metallurgy
The invention relates to glass for manufacturing micro-channel plate glass matrix. The glass comprises surface glass and core glass which are used together. The surface glass comprises the following components in part by weight: 47 to 50.0 parts of SiO2, 0.5 to 2.0 parts of Al2O3, 28 to 30.0 parts of PbO, 7.0 to 10.0 parts of Bi2O3, 5 to 6.5 parts of sigma (K2O+Rb2O+CS2O), 6 to 9.0 parts of sigma (BaO+CaO) and 0.5 to 1.0 part of sigma (As2O3+Sb2O3). The core glass comprises the following components in part by weight: 20 to 27.0 parts of SiO2, 12 to 18.0 parts of B2O3, 1 to 2.0 parts of Al2O3, 30 to 40 parts of sigma (BaO+CaO), 10 to 20 parts of La2O3, and 2 to 3 parts of sigma (ZnO+MgO). The glass has the advantages of deformation resistance of MCP, structural uniformity and good aperture precision.
Owner:杭州千盟光电科技有限公司

Mass spectrometer

A mass spectrometer that allows easy replacement of an MCP (microchannel plate) and is enabled to secure orthogonality between an incident surface of the MCP and an ion track at high accuracy is provided. A flight tube 2 where ions fly is arranged in a vacuum vessel composed of a vacuum flange 6 and a body 1, and an MCP group 4 is attached to a tail end of the flight tube 2 via an MCP-IN electrode 3. A vacuum flange 6 is attachably and detachably attached to the body 1, and the MCP group 4, by a spring 710 provided on a circuit board 7 for detection attached to the vacuum flange 6, is urged toward an end portion of the flight tube 2 so that its orthogonality with respect to an ion flight track is secured.
Owner:HAMAMATSU PHOTONICS KK

Ion detector

ActiveUS6906318B2Minimal broadeningNarrow pulse height distributionThermometer detailsTime-of-flight spectrometersSecondary electronsMass spectrometric
An ion detector 7 for a mass spectrometer is disclosed comprising a microchannel plate 8 which receives ions 12 at an input surface and releases secondary electrons 16 from an output surface. A detecting device 9 having a detecting surface is arranged to receive at least some of the electrons 16 emitted by the microchannel plate 8. The area of the detecting surface is substantially greater than the area of the output surface of the microchannel plate 8.
Owner:MICROMASS UK LTD

Bleeder powered gating amplifier

A gating circuit switches the responsivity of a photomultiplier tube between ON and OFF states by modulating the voltage bias of the one or more of its electrodes. The gating circuit capacitively couples a voltage pulse to the photocathode or other electrode of the photomultiplier tube in response to a low-voltage gating triggering signal. The voltage divider network and high-voltage power supply used to statically bias the photomultiplier tube also power the gating circuitry and source the gating voltage pulse, thus circumventing the need for a separate high-voltage power supply. The gating circuit represents a near-inconsequential burden on the power supply, as it draws practically negligible current from the voltage divider network. The electrode gating pulse characteristics, including rise- and fall-times, voltage swing amplitude and duration, can be modified by adjusting resistor and capacitor values and Zener diode characteristics of the gating circuit and voltage divider network. The circuit can also be used to gate related devices such as microchannel plates and image intensifiers.
Owner:LUDLUM MEASUREMENTS

Microchannel cooling condenser for precision cooling applications

The present disclosure provides a method, apparatus, and system for a centralized microchannel cooling system in precision cooling applications, such as mission-critical systems with data centers or cabinets or rooms with medical equipment. The microchannel condenser is designed to provide sufficient cooling for such applications by configuring multiple microchannel slabs together in a fashion that advantageously can increase the overall cooling abilities of multiple slabs not heretofore known. The system can provide a retrofit condenser for some existing precision cooling systems that have limitations on size, while satisfying cooling capacity requirements. The multiple slabs can be cooled by flowing a fluid such as air or a liquid across them. One or more microchannel slabs can be mounted horizontally, vertically, or in an inclined position. Further, the system can allow for multiple passes of refrigerants through the microchannel slabs.
Owner:LIEBERT

Microchannel plate with fractal structure, photocatalytic reactor and application thereof

The invention provides a microchannel plate with a fractal structure, a photocatalytic reactor and an application thereof. The microchannel plate with the fractal structure comprises a first surface and a second surface which are opposite; the first surface and the second surface of the microchannel plate with the fractal structure each is provided with a main pipeline microchannel and multistage H-shaped fractal bifurcated microchannels which are connected with one end of the corresponding main pipeline microchannel, and the H-shaped fractal bifurcated microchannels of the first surface of the microchannel plate with the fractal structure communicate with those of the second surface of the microchannel plate with the fractal structure through connecting through holes. According to the microchannel plate with the fractal structure, the photocatalytic reactor and the application thereof, through forming fractal-structured microchannels in the upper and lower surfaces of the microchannel plate with the fractal structure, three phases, i.e., gas, liquid and solid phases can be effectively distributed, heat transfer and mass transfer are strengthened, the problem in collection of reactants of fractal distribution can be effectively solved, meanwhile, the length of the microchannels can be increased, and the control on reaction flux and reactant residence time is better facilitated.
Owner:SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI

Large-area X-ray pulse detection device based on microchannel plate split joint

The invention relates to a large-area X-ray pulse detection device based on microchannel plate split joint. The large-area X-ray pulse detection device comprises an X-ray photoelectric cathode, a first insulating layer, a microchannel plate (MCP) input electrode press ring, a second insulating layer, an MCP input electrode, a first MCP layer, an intermediate electrode, a second MCP layer, a third insulating layer, an MCP output electrode, a fourth insulating layer, and an anode which are sequentially stacked up, wherein the first MCP layer and the second MCP layer are both large-area MCP detectors, and each MCP detector comprises a detector body, a split-joint framework and a processing circuit. The large-area X-ray pulse detection device resolves the technical problems that an existing MCP detector is adopted to detect the X-ray pulse, extremely long observation time is needed, and detection efficiency of the whole system is low, a detection method and a device which are high in detection efficiency are provided for an X-ray pulsar navigation system, photon measurement information with high time resolution and high time accuracy is provided for X-ray pulsar navigation, and guarantee is provided for high precision of navigation positioning.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

Novel micro-channel plate electrode with ion blocking function and manufacturing method thereof

ActiveCN104465295AAct as an electrodeElectrode function hasMultiplier electrode arrangementsCold cathode manufactureScattering effectEngineering
The invention provides a novel micro-channel plate electrode with the ion blocking function. The novel micro-channel plate electrode is manufactured on the input or output face of a negative electron affinity photoelectric cathode type vacuum photoelectric detecting device and used for exerting working voltage on normal work of a micro-channel plate. A manufacturing method comprises the steps that a uniform single-layer or multi-layer graphene film high in strength and coverage is manufactured on the input or output face of the micro-channel plate in a transferring mode, and has the conventional micro-channel plate electrode effect and the ion barrier film function, and the negative electron affinity photoelectric cathode type vacuum photoelectric detecting device is mainly composed of an optical window at the front end, a photoelectric cathode on the optical window, a middle micro-channel plate, an anode at the rear end, and a sealed ceramic metal tube shell. The novel micro-channel plate electrode has the advantages that the electron penetration rate is greatly increased compared with that of the traditional structure of a nickel-chromium metal electrode and a Al2O3 or SiO2 ion barrier film, the scattering effect on electrons is reduced, the detecting efficiency of the device is improved, and the signal to noise ratio of the device is increased.
Owner:NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD

Preparation methods of nanopore-arrayed anodic alumina membrane and nanopore-arrayed anodic alumina microchannel plate

The invention relates to preparation methods of a nanopore-arrayed anodic alumina membrane and a nanopore-arrayed anodic alumina microchannel plate. The preparation method of the nanopore-arrayed anodic alumina membrane comprises the following steps of preparation of an alumina membrane and directional pore broadening. The preparation method of the nanopore-arrayed anodic alumina microchannel plate comprises the following steps of preparation of an alumina membrane, directional pore broadening and preparation of a microchannel plate. According to the preparation methods of the nanopore-arrayed anodic alumina membrane and the nanopore-arrayed anodic alumina microchannel plate, the technical bottleneck that the channel aperture of the traditional lead-containing silicate glass microchannel plate cannot be easily reduced is overcome; the difficult problems that the area of the microchannel plate is increased if the ultra-small aperture of the microchannel plate is realized and the like are solved; and the excellent properties of the microchannel plate are achieved, i.e., the space resolution and time resolution of the microchannel plate are improved, the gain is increased, the dark count rate is decreased, the area array is enlarged, a higher temperature can be borne and the like.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

High-acid-dissolution-rate core material glass component for microchannel plate

InactiveCN102515515AHigh acid dissolution rateGood chemistryAcid dissolutionMicrochannel plate detector
The invention discloses a high-acid-dissolution-rate core material glass component for a microchannel plate. The glass component comprises 30-40wt% of B2O3, 20-30wt% of BaO, 20-30wt% of La2O3, 5-10wt% of SiO2, 1-5wt% of Al2O3, 5-10wt% of MgO and CaO and 5-10wt% of Na2O and K2O. The invention provides a new microchannel plate core glass system. The glass system is high in acid dissolution rate, has good compatibility with a microchannel slab glass system in chemical and thermal properties, and can be used for preparing a small-bore microchannel plate, a conductive glass microchannel plate and a thick bending microchannel plate.
Owner:CHINA BUILDING MATERIALS ACAD

Ionization Gauge Having Electron Multiplier Cold Emission Source

An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.
Owner:MKS INSTR INC

Ultraviolet imaging enhancer

An intensifier of ultraviolet image is prepared as setting input window at front end of shell and screen at back end of shell, forming vacuum airtight structure by sealing in input window with kovar alloy 4J50 cathode plate in utilizing low melting point glass powder, sealing photoelectric cathode and micro channel plate as well as screen in shell with excellent vacuum air tightness, coating a layer of conductive film with ultraviolet ray transmission ability and conductivity on internal surface of input window and setting photoelectric cathode on said conductive film.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

Micro channel plate borate core glass and preparation method thereof

The invention relates to micro channel plate borate core glass and a preparation method thereof. The micro channel plate borate core glass comprises the components by the molar fraction: B2O3 with the content of 33-63 mol%; BaO with the content of 25-40.5 mol%; La2O3 and Y2O3 with the total content of 3.5-9.0 mol%; Na2O, K2O, Rb2O and Cs2O with the total content of 0-8 mol%; MgO, CaO and SrO with the total content of 1-9.3 mol%; Al2O3 with the content of 1-8.5 mol%; TiO2 with the content of 0-5.6 mol%; and Nb2O5 and Ta2O5 with the total content of 0-4.5 mol%. The time of a corrosion process of the micro channel plate borate core glass is shortened, erosion of an acid solution on micro channel plate skin glass and edge-cladded glass is reduced, and thus the problems of deformation and breakage of a small-pore-diameter micro channel plate are solved.
Owner:CHINA BUILDING MATERIALS ACAD

Detector using microchannel plates and mass spectrometer

A mass spectrometer detector having a coupling capacitor including an anode that is placed at a high potential of say −4.9 kV. An annular electrode is placed outside the anode. A voltage of say −5 kV is applied to the annular electrode. This reduces the potential difference between the anode and the annular electrode, mitigating the electric field. A peripheral electrode is mounted on the outer fringe of a dielectric body and stably held at a potential of say −2.5 kV, for example, by voltage-dividing resistors.
Owner:JEOL LTD

Self-separation manufacturing method for silicon micro-channel structure

The invention discloses a self-separation preparation method for silicon microchannel structure, which includes steps: 1. pretreatment; 2. electrochemistry process; 3. stripping, concretely containing: a) oxidation / sedimentation for mask; b) photolithography; c) potassium hydroxide corrosion; d) removal of mask; e) deep engraving by electrochemistry; f) microchannel plate peeling. Macropore silicon microchannel prepared by the method possesses high depth-width ratio and is easy to be separated.
Owner:EAST CHINA NORMAL UNIV
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