Preparation methods of nanopore-arrayed anodic alumina membrane and nanopore-arrayed anodic alumina microchannel plate

Abstract

The invention relates to preparation methods of a nanopore-arrayed anodic alumina membrane and a nanopore-arrayed anodic alumina microchannel plate. The preparation method of the nanopore-arrayed anodic alumina membrane comprises the following steps of preparation of an alumina membrane and directional pore broadening. The preparation method of the nanopore-arrayed anodic alumina microchannel plate comprises the following steps of preparation of an alumina membrane, directional pore broadening and preparation of a microchannel plate. According to the preparation methods of the nanopore-arrayed anodic alumina membrane and the nanopore-arrayed anodic alumina microchannel plate, the technical bottleneck that the channel aperture of the traditional lead-containing silicate glass microchannel plate cannot be easily reduced is overcome; the difficult problems that the area of the microchannel plate is increased if the ultra-small aperture of the microchannel plate is realized and the like are solved; and the excellent properties of the microchannel plate are achieved, i.e., the space resolution and time resolution of the microchannel plate are improved, the gain is increased, the dark count rate is decreased, the area array is enlarged, a higher temperature can be borne and the like.

Description

technical field [0001] The invention belongs to the technical field of microelectronic technology and photoelectric imaging device manufacturing, and specifically relates to the processing technology of anodic aluminum oxide film of nanohole array and aluminum oxide microchannel plate. Background technique [0002] Micro-channel plate (MCP) is an excellent electron multiplier device, its gain can reach 10 3 -10 6 , the response time is less than 1ns, the spatial resolution is on the order of the channel diameter, the sensitivity reaches a single electron mode, has a high radiation resistance, and can work in a strong magnetic field environment. MCP has important applications in photoelectric conversion, scientific instruments, medical diagnosis, low-light night vision, charged particle detection, nuclear physics, space astronomy detection and other fields. With the development of market demand and the continuous advancement of science and technology, these application fiel...

AI Technical Summary

Problems solved by technology

[0004] The invention provides a method for preparing an anodic aluminum oxide membrane of nanohole array and an aluminum oxide microchannel plate, to overcome the technical bottleneck that the channel aperture of the traditional lead-containing silicate glass microchannel plate is difficult to reduce, and to solve the problem of realizing ultra-thin microchannel plate Small aperture, increasing the area of ​​the microchannel plate and other problems, to achieve excellent performance such as improving spatial resolution, time resolution, increasing gain, reducing dark count rate, expanding area array, and withstand higher temperature

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