88 results about "Micro-Opto-Electro-Mechanical Systems" patented technology

A method of wave propagation from 100–10000 GHz. The currently disclosed method and apparatus adapts micro-opto-electro-mechanical systems (MOEMS) technologies and processes to construct Kinoform optical components from microwave to terahertz range. The method uses induced coupled plasma (ICP) and gray scale processes for upper terahertz band; LIGA-based high aspect ratio (HAR) and gray scale processes are for the mid band; and computer numerical control (CNC) for lower band. In all cases, the thickness of any processed components is about the respective wavelength and system efficiency is about 95%. A Kinoform lens element is designed at 5000 GHz. However, the method is applicable for the entire terahertz band.

The present invention relates to an optical interferometric apparatus and method for measuring acceleration, pressure, and pressure of fluids during flow using micro-opto-electro-mechanical-systems (MOEMS). The high-sensitivity and high-resolution apparatus includes a movable mass, a stationary mass, a light source, and a photo detector. The light source emits a beam which is converted into two beam portions after impinging onto the movable and stationary masses. Interference between the beam portions are used to measure acceleration or pressure. The MOEMS structure may be integrated with a photo detector or planar waveguide. Differential amplification can be realized by employing two similar detecting structures.

The invention discloses a method and a device based on focusing and leveling of a lenticule array and belongs to the technical field of opto-electrical detection. The invention comprises an emitting part and a receiving part, wherein, the emitting part comprises a light source, a focusing lens, a pinhole filter, a beam expanding lens, an optimal entrance pupil device, a lenticule array and a steering mirror; the receiving part comprises a steering mirror, a lenticule array, a focusing lens, a scan mirror of a micro-opto-electro-mechanical-system (OMEMS), a pinhole filter and a detector. The invention adopts the optimal entrance pupil device to control light entrance quantity and then improve measuring light spot, or the quantity of the imaging point can be controlled by the state of a switch to adapt to different exposure viewing field; the invention adopts the lenticule array to replace a slit array; the scan mirror of the micro-opto-electro-mechanical-system (OMEMS) is adopted to replace the single lens scan; the difference receiving method is adopted and then the requirement for stability of the light source is decreased and higher measuring accuracy can be acquired.

In an apparatus and method for magnetic field assisted electrochemical discharge machining (ECDM), the magneto hydrodynamic (MHD) effect is utilized to improve the thickness of bubble film and the electrolyte circulation so as to enhance the machining accuracy and efficiency. Since charged ions in a magnetic field are induced by Lorenz force to move, and the electrolysis bubbles generated in the ECDM process are suffused with electrification ions on their surfaces, the electrolysis bubbles can be forced to move in the direction of the magnetic field without the need of mechanical disturbance. The present invention can be widely applied in the micro-machining of non-conductive brittle materials of different dimensions and shapes, comprising the forming of microchannels and microholes on a biochip, and in the micro-opto-electro-mechanical system (MOEMS) and various kinds of micro-machining fields. The machined surface is smooth and does not require a second time machining.

The invention discloses a method for measuring straightness accuracy and positions thereof based on a double frequency interference principle. The measuring method adopts a double frequency optical laser to output laser beams containing cross-line polarized lights which are processed by the light splitting of a common spectroscope and a depolarization dispersion prism, the beam splitting of a Wollaston prism, the reflection of a right-angle prism, and the transmission of the Wollaston prism, the light splitting of a polarization splitting prism, the beat frequency of an analyzer to finally obtain a first-path reference signal and a second-path reference signal. The measuring method utilizes the dichroism and polarization property of optical devices to make up a double light path measurement structure based on the heterodyne interference principle; the simultaneous measurement of the straightness accuracy and the positions thereof is realized by measuring the optical path difference of the double path, thus having measuring accuracy of the nanometer straightness accuracy and the positions thereof. The method is mainly applied in the motion displacement measurement of an accurate work table, the straightness accuracy detection of an accurate guide rail and the like belonging to fields such as super-precision processing technology, micro-photo dynamoelectric systems, integrated circuit chip manufacturing technology, etc.

The invention discloses a method for measuring straightness accuracy and positions thereof based on double frequency interference principle. The measuring method adopts an optical laser outputting g cross-line polarized lights, a common spectroscope, a depolarization dispersion prism, a polarization splitting prism, a Wollaston prism, three analyzers, three photodevices and a measurement reflecting mirror comprising a right-angle prism. The measuring method utilizes the dichroism and polarization property of optical devices to make up a double light path measurement structure based on the heterodyne interference principle; the simultaneous measurement of the straightness accuracy and the positions thereof is realized by measuring the optical path difference of the double path, thus having measuring accuracy of the nanometer straightness accuracy and the positions thereof. The method is mainly applied in the motion displacement measurement of an accurate work table, the straightness accuracy detection of an accurate guide rail and the like belonging to fields such as super-precision processing technology, micro-photo dynamoelectric systems, integrated circuit chip manufacturing technology, etc.

As the traffic volume carried by telecommunication networks has been rapidly increased as a result of the bandwidth-intensive applications such as Internet access, electronic commerce, multimedia applications, and distributed computing, it is imperative to utilize the optical network for backbone, metropolitan, and local area networks. The optical networks employing optical fibers as the transmission medium have exhibited a superior performance / cost ratio for both long-haul and short-haul routes and the emerging dense wavelength division multiplexing (DWDM) / all-optical networks have shown a promising potential to improve speed, capacity and connectivity of optical telecommunication networks. The present invention provides Micro-Opto-Electro-Mechanical Waveguide Switch (MOEM-WS) by integrating MEMS actuators and micromachined PLCs on the same substrate. The MOEM-WS is an integrated hybrid microsystem: Micro-Opto-Electro-Mechanical System (MOEMS) and it is particularly applicable for optical cross-connect (OXC) switches and optical add / drop multiplexers (OADM). The MOEM-WS can provide an essential fiber switching capability for DWDM / all-optical networks with numerous accompanying benefits such as low cost, small crosstalk, reliability, compactness, high speed, reconfigurability, modularity, scalability, and insensitiveness to signal wavelength and polarization.

Disclosed is a low-cost high-resolution compact accelerometer which utilizes multiple self-mixing optical interferometers. The device is also a micro-opto-electro-mechanical systems (MOEMS) sensor. The interferometers are used to detect acceleration as well as monitor the wavelength, temperature, and refractive index and perform differential measurements. In addition, photodetectors are employed to monitor the input optical power.

The invention relates to an MEMS (Micro-electromechanical Systems) comb-finger off-plane electrostatic driver structure with low driving voltage and a production method thereof. The driver structure comprises a fixed electrode, a movable electrode, an anchor, a combined torsion beam, a driving output part and a signal lead out bonding pad, wherein the fixed electrode is a comb-finger electrode fixed on a substrate; the movable electrode is a comb-finger electrode connected to the driving output part; and the combined torsion beam comprises two groups of foldable torsion beams and one bracket cross beam, and is suspended and fixed on the substrate. According to the driver structure, angular displacement is converted into linear displacement through the adoption of the combined torsion beam, so that not only can large-stroke off-plane motion under low driving voltage be achieved, but also the influence of the electrostatic pull-in effect can be refrained, and the reliability of the driver can be improved. The off-plane electrostatic driver and the production method have the advantages that the technological process is simple and is compatible with various types of MEMS device technologies, and integration with other micro-optic-electro-mechanical systems can be achieved.

The invention relates to a multispectral imaging device for satellite observation by “push-broom” scanning over an observed area, operating in N wavelength bands, respectively centered on a first wavelength (λ1), . . . , an nth wavelength (λN) comprising:a source emitting a light beam in a set of the N wavelength bands;a wide-field optic;a set of N rows of detectors making it possible to acquire images of said observed area;optical filtering means,characterized in that it also comprises:a first dispersion element (R1,R) making it possible to disperse the light beam toward the filtering means;optical filtering means comprising at least one micro-opto-electro-mechanical system (MOEMS) capable of carrying out N filtering functions for the N spectral bands, wavelength-tunable;control means for said micro-opto-electro-mechanical system making it possible to select the filtering function.

The invention relates to a zoom micro lens based on a piezoelectric inverse effect, belonging to the technical field of optical components. The zoom micro lens comprises a first glass sheet, a piezoelectric ceramic ring and a second glass sheet, wherein a circular hole is formed in the center of the second glass sheet, and an organic thin film is covered on the second glass sheet; the piezoelectric ceramic ring is clamped between the first glass sheet and the second glass sheet; and transparent liquid is filled in an inner space formed by the sealing of the first glass sheet, the piezoelectric ceramic ring and the second glass sheet. The stretching and the shrinkage are caused to piezoelectric ceramic under the action of an electric field by feeding voltage to the piezoelectric ceramic by virtue of the piezoelectric inverse effect, so that the surface shape of the micro lens is driven to change and the regulate function of the focal length of the micro lens is realized. A focal-length-adjustable micro lens provided by the invention has multiple superiorities such as simple structure, simplicity and convenience in design and process production, easiness in realizing of array structure, fast regulation and control speeds, large regulation and control ranges and the like, and has wide application foregrounds in micro-optic systems and micro-optic electromechanical systems.

A micro-optoelectromechanical system based device with aligned structures comprises at least one optical structure formed in a silicon layer of the device and at least one optical fiber connection structure that is self-aligned with the at least one optical structure. In embodiments, the at least one optical fiber connection structure is formed in a substrate of the device and may comprise a V-groove. In other embodiments, the at least one optical structure may comprise a waveguide. A nitride layer may be formed on at least a portion of the waveguide. In various embodiments, the silicon layer may be a single-crystal-silicon layer of a silicon-on-insulator wafer. A method for fabricating a micro-optoelectromechanical system based device with aligned structures is provided in which the at least one optical structure and the at least one optical fiber connection structure are defined using the same masking layer.

Disclosed is a low-cost high-resolution compact accelerometer which utilizes multiple self-mixing optical interferometers. The device is also a micro-opto-electro-mechanical systems (MOEMS) sensor. The interferometers are used to detect acceleration as well as monitor the wavelength, temperature, and refractive index and perform differential measurements. In addition, photodetectors are employed to monitor the input optical power.

The invention discloses a micro torsion mirror with a trench-isolated mirror surface and manufacturing method thereof, and belongs to the field of micro-opto-electric mechanical systems (MOEMS). The mirror surface of the micro torsion mirror consists of a conductive mirror surface 1 isolated by a trench and an isolating mirror surface 2; the trench is filled with a sandwiched material with carbon dioxide 4 at two sides and polycrystalline silicon 3 in the middle. When the micro torsion mirror is in work, after an energized lead anchor 7 is energized, the conductive mirror surface 1 and the movable comb teeth 8 on the conductive mirror surface 1 are energized to drive the comb teeth to drive the whole mirror surface to rotate under the action of electrostatic force; due to the existence of the trench, the isolating mirror surface 2 is nonconductive; therefore, an accurate capacitance value caused by the rotation of the mirror surface can be obtained by detecting the comb teeth in an uncharged manner. The whole apparatus has the advantages of simple structure, novel design method and obvious effect, and can effectively measure the capacitance between the movable comb teeth and the fixed comb teeth and well realize the closed-loop control of the system, therefore, the reliability and accuracy of the performance of the micro torsion mirror can be guaranteed; the micro torsion mirror has wider market prospect.

The invention relates to a microsensor designed by the MOEMS technique, in particular to a micro-optical fiber voltage sensor which is fabricated by utilizing a high Q annular microcavity and is based on the annular microcavity; the problem that the high Q annular microcavity can not be properly applied to sensors is solved. The micro-optical fiber voltage sensor comprises a plane annular microcavity supported by a silicon column and a conical optical fiber coupled with the plane annular microcavity, wherein, two tungsten electrode probes are planted on an aluminum ohmic contact which is arranged on a micro-disc of the middle part of the plane annular microcavity. The micro-optical fiber voltage sensor has the advantages that the gradually mature MEMS process technique is utilized, and the current physics knowledge is taken as the theoretical basis to develop the voltage sensors towards the direction of micromation and integration. The micro-optical fiber voltage sensor does not have the disadvantages of large volume, high power consumption, serious environmental influence, and the like, of the original optical fiber voltage sensors.

The invention relates to an optical modulator. A micro-opto-electro-mechanical systems (MOEMS) electro optical modulator (2) having an electrically tuneable optical resonator comprises an asymmetric Fabry-Perot etalon incorporating a mirror (10) resiliency biased with respect to a substrate (13) and moveable in relation thereto in response to a voltage applied there-between. The optical modulator (2) is capable of modulating electromagnetic radiation having a plurality of wavelengths. The modulator is adapted to modulate the transmission of short wave infrared radiation (SWIR), medium wave infrared radiation (MWIR) and long wave infrared radiation (LWIR) and the reflection of visible radiation. A spatial optical modulator having a plurality of said MOEMS optical modulators (2). A method of addressing said spatial optical modulator.

The invention is applicable to the field of spectral analysis instruments and discloses a micro spectrometer integrating a planar variable-pitch grating and a micro slit and a manufacture method of the micro spectrometer. The micro spectrometer comprises an array photoelectric detector, an upper light-transmitting flat plate and a lower light-transmitting flat plate, the upper light-transmitting flat plate is provided with a light barrier layer which is provided with the transmitting slit, and the lower light-transmitting flat plate is provided with the variable-pitch grating. The micro spectrometer is based on the planar variable-pitch grating serving as a core device, and the planar variable-pitch grating has a common diffraction grating light-splitting function and has an aberration correction function by means of gating line changes. The micro transmitting slit is a system light inlet, so that the shortcomings of difficulty in isolation of ambient light interference, inconvenience in system packaging and high stray light, system integration difficulty is lowered, and spectral signal detection precision is improved. The manufacture method is completely compatible with the MOEMS (micro opto-electro mechanical system) process, the micro spectrometer is micro and compact in size and is applicable to an embedded spectral detection system with strict requirements on size, and detection precision is high while detection effect is good.

The invention discloses a method for realizing guided-mode resonance filtering through a single gradient-material grating structure, and belongs to the field of an optical communication and MOEM (micro optical electro mechanical) system. The method is characterized in that an optical thin film, the refractive index of which increases progressively with the thickness, is prepared on a substrate, and by etching the refractive-index-gradient thin film, a guided-mode resonant grating structure is obtained, and furthermore, guided-mode resonance filtering can be realized; on the basis of the above, by selecting different etching depths, channel position of a filter can be adjusted; and with the etching depth being kept unchanged, by reducing gradient coefficient, multichannel filtering can be realized. The filtering performance of the guided-mode resonant grating structure is highly insensitive to change of substrate refractive index, so that even if the substrate refractive index is higher than the maximum value of the refractive index of the gradient thin film, the guided-mode resonance filtering performance keeps excellent; and the method breaks away from the limit that refractive index of a waveguide layer in a conventional guided-mode resonance filter needs to be higher than the substrate refractive index, and is more advantageous in practical application.

The invention discloses a tube shell for vacuum package of a micro-optical-electronic-mechanic system and a manufacture method thereof. A chip fixing groove is arranged in a base, a sealing cap is hermetically fixedly connected to an annular externally-extending stopper outside one end of the base, an optical filter hermetically covers an opening of the other end of the base, a light-transmitting plate hermetically fixedly covers the outside of a light-transmitting window on the axial end face of the sealing cap, and a getter fixing device is fixedly arranged in the sealing cap and the base. The manufacture method includes machining the base and the sealing cap, and performing hydrogen burning, decarburization, nickel plating and annealing; machining the getter fixing device, cleaning, blow-drying and baking; performing chromium sputtering to a welding area of the base and the sealing cap, and electrogilding; performing multi-layer welding to the optical filter and the light-transmitting plate by tin-lead solder welding and transition glass respectively, and annealing; adhering the getter fixing device and welding the base with the sealing cap; and performing air leak detection and vacuum pumping. The tube shell is used for vacuum package of the micro-optical-electronic-mechanic system, and chip is protected from failure due to high temperature.

The invention belongs to the field of micro-opto-electro-mechanical systems and particularly relates to a measurement system ad method of the amplitude of a resonant type scanning mirror. The system comprises a laser, a tool clamp used for fixing the laser and a to-be-measured scanning mirror, a photosensitive fixed scale and at least two photoelectric detectors arranged on the photosensitive fixed scale. Laser rays irradiate into the center of the to-be-measured scanning mirror. Incidence light is reflected by the to-be-measured scanning mirror so that scanning paths are formed. The photoelectric detectors capture electrical signals of respective position of reflection light generation marks. According to the electrical signals obtained in the step 3 and the position relation of the photoelectric detectors, the vibration amplitude of the to-be-measured scanning mirror is obtained. By use of the photoelectric detectors for detection, the measurement quantity of the system is reduced and a problem of low measurement precision when the photoelectric detectors are used for measuring and calculating the amplitude of the to-be-measured scanning mirror is solved.

The invention discloses a bifocus micro lens with an aspheric surface and adjustable focal length, belonging to the technical field of optical devices. The bifocus micro lens with the aspheric surface and the adjustable focal length comprises an upper transparent glass substrate, a lower transparent glass substrate, an upper ITO (Indium Tin Oxide) electrode, a lower ITO electrode, a liquid crystal layer and a liquid crystal sealing layer; the contacting surface of the liquid crystal sealing layer and the liquid crystal layer is in a concave aspheric surface shape formed by intersecting a first rotational symmetroid with larger height and smaller curvature radius and a second rotational symmetroid with smaller height and larger curvature radius; the upper ITO electrode has the same shape with the bottom surface of the liquid crystal layer; and the lower ITO electrode consists of an inner circular electrode and an outer annular electrode which are insulated mutually. The bifocus micro lens with the aspheric surface and the adjustable focal length in the invention realizes focal length adjustment and bifocus independent control based on a photoelectric effect of a liquid crystal, has the advantages of compact structure, simple and convenient design and process, easiness in realizing an array structure and integrating with other optical devices, high control speed and the like, and has a wide application prospect in a micro optical system and a micro-optical-electro-mechanical system.

Electromagnetic waves in wide frequency ranges up to photonics have been used for applications to time-domain imaging (TDI). Realistic time domain imaging requires a rapid optical delay line on the order of 100 ps with sampling rate at least 100 Hz. Present available optical time delay systems suffer either from low sampling rate or low time delay length, deviating from ideal requirements. The purpose of this invention is to introduce a miniature and rapid scanning optical delay line based on micro-opto-electro-mechanical system (MOEMS) technology to improve the data acquisition in time domain imaging, capable of sampling rate beyond 100 Hz and time delays beyond the 100 ps.

The invention relates to an adjustable artificial crystal based on micro-photo dynamoelectric system, belonging to field of biological medicine engineering. The invention comprises a zoom-lens system that be embedded into eye and a control system out of eye. Said zoom-lens system comprises: positive lens, negative lens, signal and energy receiving coil, artificial crystal, singal treating and controlling unit, micro-motor and guide rail. Said control system comprises: signal and energy receiving coil, infrared distance-measuring unit, energy supply unit and glass frame. Said control system comprises zoom-lens system with combined functions of energy supply, distance measuring, coupling signal with energy into eyes; said zoom-lens system possesses functions of receiving, treating and controlling signal and energy. The negative lens are moved in axial direction drove by micro-motor, to change the diopter and ensure target object be imaged on retina accurately at real time.

An array-type integrated sensor based on micro photo-mechano-electric system for receiving and transmitting laser is composed of frame, substrate, monosilicon structure body, semiconductor laser device, photoelectric detector, and glass. The micro semiconductor laser devices and micro semiconductor detectors are integrated on a substrate by special monosilicon structure body. The semiconductor laser transmitting and receiving cells are alternatively arranged.

Stereolithography machine (1) comprising: a container (2) for a fluid substance (14); a source (3) of predefined radiation (3a) suited to solidify the fluid substance (14); an optical unit (4) suited to direct the radiation (3a) towards a reference surface (5) in the fluid substance (14); a logic control unit (6) configured to control the optical unit (4) and / or the source (3) so as to expose a predefined portion of the reference surface (5). The optical unit (4) comprises a micro-opto-electro-mechanical system (MOEMS) (7) provided with a mirror (8) associated with actuator means (7a) for the rotation around at least two rotation axes (X, Y) incident on and independent of each other, arranged so that it can direct the radiation (3a) towards each point of the reference surface (5) through a corresponding combination of the rotations around the two axes (X, Y).

An absorbing hydrogen sensing driven by optical electro mechanical system is used in automatic control technical field, comprising light source emission part and light source receive part. Its light source emission part consists of first Si base, palladium film, optical fiber probe, substrate copper-nickel film, first fiber-tail, silicon beam, palladium film adhering to substrate copper-nickel film to form dual-layer structure which adheres successively to silicon beam whose one end fixed on the first Si base, silicon beam has optical fiber probe sticking on it and the first fiber-tail is linked to light source. Its light source receive part consists of second fiber-tail, optical fiber contact, second fiber-tail, optical fiber contact sticking the second Si base, towards optical contact on silicon beam, the second fiber-tail of optical fiber is linked with optical power meter. The invention has increased axial driving force of silicon beam, solved the problem of easy to be destroyed brought by increasing film thickness for raising sensitiveness and simplified instrument structure of this kind notably.

The invention relates to a Stereolithography machine (1) comprising: a container (2) for a fluid substance (15) suited to be solidified through exposure to predefined radiation (3a); a laser source (3) apt to emit a beam of said predefined radiation (3a); a vector scanning optical unit (4) configured to perform a vector scanning of a reference surface (5) arranged inside said container (2) according to a desired vector data image by means of said predefined radiation; a memory to store said vector data image representative of an image to be scanned on said reference surface; a logic control unit (6) configured for controlling said vector scanning optical unit (4) and / or said laser source (3) in such a way as to expose a predefined portion of said reference surface (5) to said radiation (3a) according to said vector data image; wherein said vector scanning optical unit (4) comprises a first and a second micro- opto-electromechanical systems (MOEMS) (7, 8) arranged in series one after the other with respect to a travelling path of said predefined radiation, each MOEMS system comprising: a mirror (9) having a diameter comprised between about 2 mm and about 8 mm associated with a supporting structure (10) through articulation means (11) configured so as to define for said mirror (9) a rotation axis (X1, X2); an actuator (12) suited to move said mirror (9) around said rotation axis(X1, X2) in a quasi-static manner at an angular speed so that a corresponding marking speed of said laser beam on said reference surface (5) is comprised between about 0.5 m / s and about 3 m / s when said laser source (3) is emitting said predetermined radiation (3a) during said vector scanning; and wherein the rotation axis (X1) of the mirror (9) of the first MOEMS system (7) is incident to the rotation axis (X2) of the mirror (9) of the second MOEMS system (8).

The invention discloses a piezoelectric integrated MOEMS scanning raster micromirror and relates to the field of spectrum analysis and micro optical electro mechanical systems. The piezoelectric integrated MOEMS scanning raster micromirror consists of an integrated scanning raster micromirror, a torsion beam, a connecting beam, an angle sensor, a piezoelectric micro driver and a fixing frame. The integrated scanning raster micromirror is based on monotectic orientation (111) silicon substrate, a blazed grating is integrated on the front side, a groove is sapped in the back side, and the diffraction efficiency and device robustness are improved. For achieving large-angle scanning under low-drive voltage, the piezoelectric micro driver and the connecting beam are adopted to amplify drive displacement. For monitoring the motion state of the integrated scanning raster micromirror in real time, the piezoelectric angle sensor is integrally integrated on the connecting beam. The piezoelectric integrated MOEMS scanning raster micromirror is novel and simple in structure and compatible with an integration process, the diffraction efficiency, resolution ratio, robustness and integration level of the scanning raster micromirror can be remarkably improved, and the driving and angle sensing properties of the scanning raster micromirror are improved.