Micro spectrometer integrating planar variable-pitch grating and micro slit and manufacture method of micro spectrometer

Abstract

The invention is applicable to the field of spectral analysis instruments and discloses a micro spectrometer integrating a planar variable-pitch grating and a micro slit and a manufacture method of the micro spectrometer. The micro spectrometer comprises an array photoelectric detector, an upper light-transmitting flat plate and a lower light-transmitting flat plate, the upper light-transmitting flat plate is provided with a light barrier layer which is provided with the transmitting slit, and the lower light-transmitting flat plate is provided with the variable-pitch grating. The micro spectrometer is based on the planar variable-pitch grating serving as a core device, and the planar variable-pitch grating has a common diffraction grating light-splitting function and has an aberration correction function by means of gating line changes. The micro transmitting slit is a system light inlet, so that the shortcomings of difficulty in isolation of ambient light interference, inconvenience in system packaging and high stray light, system integration difficulty is lowered, and spectral signal detection precision is improved. The manufacture method is completely compatible with the MOEMS (micro opto-electro mechanical system) process, the micro spectrometer is micro and compact in size and is applicable to an embedded spectral detection system with strict requirements on size, and detection precision is high while detection effect is good.

Description

technical field [0001] The invention belongs to the technical field of spectroscopic analysis instruments, and in particular relates to a miniature spectrometer integrating a plane variable pitch grating and a micro slit and a manufacturing method thereof. Background technique [0002] The spectrometer is an important analytical instrument for analyzing the color or chemical composition of a sample according to the characteristic spectral absorption / radiation of the substance, and has a wide range of applications in environmental monitoring, food hygiene, biomedicine, petrochemical metallurgy and other fields. [0003] The broad application prospect of the spectrometer also puts forward new requirements for the instrument itself. Traditional spectrometers are bulky, have harsh operating conditions, and are expensive, so they can only be used in laboratories. In contrast, micro-miniature spectrometers have the advantages of small size, portability, and ease of use, and their...

AI Technical Summary

Problems solved by technology

The MOEMS process is suitable for processing planar components, and it is more difficult to process curved components, but the collimation and imaging functions of curved components such as convex lenses and concave mirrors are indispensable for spectrometers

The MOEMS grating spectrometer in the prior art adopts ordinary gratings with equal grating distance to split light, which has poor aberration elimination effect and unsatisfactory spectral resolution; in addition, the MOEMS grating spectrometer in the prior art lacks design considerations for the system light entrance—slit , which is critical to the overall system package and final performance

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