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Array-type integrated sensor based on weak-light electromechanical system for emitting or receiving laser

An integrated sensor, laser transceiver technology, applied in the field of photoelectric sensors, can solve the problems of inability to realize miniaturization, complex structure of space laser communication system, etc., and achieve the effect of easy miniaturization design and manufacture, and simple use

Inactive Publication Date: 2002-03-06
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can be seen that the structure of this space laser communication system realized by discrete communication equipment is extremely complex and cannot be miniaturized

Method used

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  • Array-type integrated sensor based on weak-light electromechanical system for emitting or receiving laser
  • Array-type integrated sensor based on weak-light electromechanical system for emitting or receiving laser
  • Array-type integrated sensor based on weak-light electromechanical system for emitting or receiving laser

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Embodiment Construction

[0021] like figure 1 As shown, the micro-opto-electromechanical system-based array laser transceiver integrated sensor designed by the present invention includes a frame 1, a substrate 2, a single crystal silicon structure 3, a semiconductor laser 4, a photodetector 5 and a glass sheet 7. The monocrystalline silicon structure 3 is a honeycomb flat plate, and the semiconductor lasers 4 and photodetectors 5 are arranged in a rectangular array and placed in the honeycomb through holes of the monocrystalline silicon structure. The single crystal silicon structure 3 is combined with the substrate 2 through the bonding pads 14 and 15 at the bottom of the semiconductor laser 4 and the photodetector 5 . The substrate 2 is placed on the bottom of the frame 1, and the glass sheet 7 is connected to the pad 10 on the upper surface of the monocrystalline silicon structure through the pad 9 on the lower surface. The upper periphery of the frame 1 and the upper surface periphery of the glas...

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Abstract

An array-type integrated sensor based on micro photo-mechano-electric system for receiving and transmitting laser is composed of frame, substrate, monosilicon structure body, semiconductor laser device, photoelectric detector, and glass. The micro semiconductor laser devices and micro semiconductor detectors are integrated on a substrate by special monosilicon structure body. The semiconductor laser transmitting and receiving cells are alternatively arranged.

Description

Technical field: [0001] The invention relates to an array type laser transceiver integrated sensor based on a micro-opto-electromechanical system, in particular to the production and application of an array type laser transceiver sensor with signal direction judgment and control functions used in space laser communication, and belongs to the field of photoelectric sensors. Background technique: [0002] Laser space communication is one of the hotspots of laser communication research at home and abroad. It is widely used in many fields such as sea and air traffic control, satellite space communication, and object recognition in motion. Laser emission and detection devices are key devices in laser communication systems, and have always been one of the hotspots in the field of laser communication at home and abroad. However, the current discrete laser emission and detection devices have the disadvantages of large volume, complex structure, and high cost. Therefore, the develop...

Claims

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Application Information

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IPC IPC(8): H01L23/00H04B10/40
CPCH01L2224/48091
Inventor 陈非凡苑京立陈益峰
Owner TSINGHUA UNIV
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