The invention discloses a PFM-based
lithium niobate nano-domain
processing and imaging method. The method comprises the following steps: firstly, scanning the surface of a
lithium niobate film by utilizing a conducting probe for applying first
alternating current voltage; secondly, performing nano-domain
processing on the scanned
lithium niobate film by utilizing a conducting probe for applying first
direct current voltage; and finally, performing nano-domain structure imaging on the
lithium niobate film after domain
processing by utilizing a conducting probe for applying second
alternating current voltage, and simultaneously, applying second
direct current voltage to the surface of the
lithium niobate film. The method disclosed by the invention has the effects that before lithium niobatenano-domain processing, the
alternating current is applied, and then the forming probability of the
lithium niobate nano-domain can be improved, thereby increasing the capacity of a lithium niobate nano-ferroelectric memory; and during lithium niobate nano-
domain imaging, the
direct current is applied, and then the structure imaging resolution of the lithium niobate nano-domain can be obviously improved, thereby verifying whether the lithium niobate nano-domain is formed by reversion or not, and determining the size of the nano-domain.