A kind of micro-twisted mirror of trench isolation anchor point comb teeth and its manufacturing method

Abstract

The invention discloses a micro-twisted mirror for groove-isolated anchor point comb teeth and a manufacturing method thereof, belonging to the field of Micro-Opto-Electro-Mechanical Systems (MOEMS). The micro-torsion mirror utilizes grooves to isolate the fixed anchor points on both sides of the micro-torsion mirror into three parts: the anchor point in the middle part is the lead wire fixed anchor point for isolation and grounding, and the anchor points on both sides are the lead wire fixed anchor points for isolation test. When a driving voltage is applied to the driving end composed of the energized lead anchor point 4 and the isolated energized lead anchor point 7, the driving comb pair drives the entire mirror to rotate under the action of electrostatic force; the four isolated test lead anchor points 9 are connected The anchor point 3 of the test lead that forms a lead and connects the mirror is used as the test terminal, so as to realize the closed-loop control of the system by detecting the change of capacitance. The micro-torsion mirror has a simple structure, a novel design method, and remarkable effect, and can effectively measure the capacitance between the movable comb and the fixed comb, providing guarantee for the performance reliability and accuracy of the micro-torsion mirror device.

Description

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AI Technical Summary

Benefits of technology

This patented technology describes an improved microscope tilted reflection mirror (MTS) mechanism for measuring capacitor values accurately without requiring precise adjustments or calibrators during operation. By adding specific anchoring locations along its edges, this MTS allows for more accurate measurements compared to previous designs where only one location was found. Overall, these improvements improve efficiency and precision in measurement while maintaining high levels of functionality over time.

Problems solved by technology

This patents discusses different types of thermoeletronic crystal devices called MicroTorters or Microswitch Thermosensors (MCT). These materials exhibiting small thermal response times and wide operating range make them ideal candidates for creation of smaller electronic systems like sensory actuators. They also offer improved performance compared to previous designs due to reduced costs associated with production processes. Additionally, these MTC structures allow for precise positioning over surfaces while reducing power dissipation. Overall, these technical features contribute towards enabling efficient and reliable electromechanical oscillator (MEO)-based microelectronic waveguides.

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