Piezoelectric integrated MOEMS scanning raster micromirror
A grating micromirror and piezoelectric technology, which is applied in the field of spectral analysis and micro-opto-electromechanical systems, can solve the problems of reducing device stability, affecting device resolution, and limiting mirror size, etc., to achieve improved stability and good process compatibility , the effect of small quality
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[0030] The specific implementation manners of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0031] Such as figure 1 As shown, the piezoelectric integrated MOEMS scanning grating micromirror includes: a rectangular fixed frame 7 , an integrated scanning grating micromirror 2 , two torsion beams 3 , four piezoelectric microdrivers 5 and two connecting beams 4 . The fixed frame 7, the integrated scanning grating micromirror 2, the torsion beam 3, the piezoelectric micro-driver 5 and the connecting beam 4 are processed by MOEMS technology, and are integrally integrated on a monomorphic 111 silicon substrate. The integrated scanning grating micromirror 2 has the same thickness as the silicon substrate used. The thickness of the silicon layer of the torsion beam 3 , the connecting beam 4 and the piezoelectric micro-driver 5 is consistent.
[0032] The integrated scanning grating micromirror 2 adopts a cuboid ...
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