Microsilicon microphone and its preparing method
A microphone and micro-silicon technology, which is applied in the field of micro-silicon microphones and its preparation, can solve the problems of high structural stress, easy adhesion, and waveform distortion of the microphone, and achieve the effects of low cost, avoiding waveform distortion, and small structural stress
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[0033] refer to Figure 1-Figure 11 , the process integration scheme for making micro-silicon microphones is as follows:
[0034] 1. Preparation of boron-expanded monocrystalline silicon plates:
[0035] 1. Silicon dioxide, the mask material required for thermal growth and expansion of boron, 2. Photolithography, 3. Erosion of part of the silicon dioxide to obtain a silicon dioxide pattern, 4. Short-term boron expansion to obtain the pattern of a single crystal silicon plate 5. Etch away the silicon dioxide used as a mask.
[0036] Second, the production of silicon dioxide insulating layer material:
[0037] 1. Obtain the silicon dioxide insulating layer by deposition method, 2. Photolithography, 3. Etch part of the silicon dioxide to obtain the pattern of the insulating layer.
[0038] Three, anti-corrosion layer material production:
[0039] 1. Deposit silicon nitride first, then deposit silicon oxide, and then deposit silicon nitride to obtain a multi-layer silicon nitr...
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