The invention relates to a compound containing N amidino-
silicon. The compound is prepared according to the following methods: (1) dissolving
carbodiimide or derivatives thereof into a reaction
solvent, adding an
alkyl / amido
lithium solution, aminopyridine or derivatives thereof and
alkyl / amido
lithium under the stirring condition of -78 DEG C to 0 DEG C according to the
molar ratio of 1 to (1-1.2), restoring to
room temperature, and then further stirring and reacting for 0.5-3 hours to obtain a reaction mixture; (2) filtering the reaction mixture obtained in the step (1) to obtain
lithium salt
solid, and dissolving the lithium salt
solid into an
organic solvent to obtain a lithium
salt solution; (3) dropwise adding a
silicon-containing reactant or a solution thereof to the lithium
salt solution at -78 DEG C to 0 DEG C according to the
molar ratio of lithium salt to
silicon-containing reactant being (1-4) to (1-1.1), rising to a certain temperature and reacting for 3-10 hours; (4) filtering the reaction mixture obtained in the step (3), concentrating and crystallizing filtrate, or distilling at reduced pressure to obtain a silicon compound containing an
amidine ligand. The compound disclosed by the invention can be applied to production of integrated circuits to prepare films of
silicon nitride, carbon-containing
silicon nitride and the like.