Rapid collecting and distributing method of real-time data for integrated circuit production equipment

Abstract

The invention discloses a rapid collecting and distributing method of real-time data for integrated circuit production equipment, aiming to distribute the real-time data collected by different types of integrated circuit production equipment. The rapid collecting and distributing method includes steps of 1), configuring a data collection ID of database management and an event ID mapping table; 2), configuring a real-time data-collecting periodic table of the database management; 3), configuring a notification information table of data-overrun emails for a control section that the equipment of the database management belongs to; 4), loading configuration information from the database; 5), customizing the collected events from the integrated circuit production equipment; 6), subjecting the received data of the collected events to analytical processing; 7), subjecting the collected and analyzed data to distributing processing. By the rapid collecting and distributing method, the real-time data collected by the different types of the integrated circuit production equipment can be subjected to distributing processing which can be customized by customers, so that flexibility and adaptability of software are improved.

Description

technical field [0001] The invention relates to a method for quickly collecting and distributing real-time data of integrated circuit production equipment, in particular to a method for distributing real-time data collected by different types of integrated circuit production equipment. Background technique [0002] In integrated circuit production plants, users are often more concerned about some key parameters of production equipment. These key parameters directly affect production efficiency and product quality. In traditional integrated circuit production plants, it is impossible to track and record these key parameters in real time. To carry out over-limit control and alarm, the operator of the production line often conducts manual inspection after the event, which will result in a decline in production efficiency and a reduction in product quality. Contents of the invention [0003] In view of the above-mentioned technical deficiencies, the object of the present inven...

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Problems solved by technology

[0002] In integrated circuit production plants, users are often more concerned about some key parameters of production equipment. These key parameters directly affect production efficiency and product quality. In traditional integrated circuit production plants, it is impossible to track and record these key parameters in real time. To carry out over-limit control and alarm, the operator of the production line often conducts manual inspection after the event, which will result in a decline in production efficiency and a reduction in product quality

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